44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

A

1/4 1 4.7 2.72 2.34 1 3/8 7 1/2 4 1/4 8 1/4 1 1/4 3/4 3/4-16 7/8 1/2 5/8 3/4 D I M E N S I O N S D O U B L E R E A R C L E V I S T Y P E NC A1X F WF BORE (INCH) KK A AA B C DD E EA G MM D EE J LF P Y LR ZB CW CB CD XD M L 1 150 (1.5) 7/16-20 3/4 2.02 1 1/8 3/8 1/4-28 2 0.3 1.26 5/8 1.1 3 5/8 2.36 1.71 0.75 4.75 1/2 3/4 1/2 5 3/8 0.62 0.62 3/8 9/16 3/8 1 200 (2) 7/16-20 3/4 2.6 1 1/8 3/8

VEX1

, with lead wire L plug connector, without lead wire L plug connector, without connector M plug connector, with lead wire M plug connector, without lead wire M connector, wihtout connector DlN connector 1 8 1 4 1 4 3 8 1 2 1 2 3 4 12 L LN 12 LO 32 M 32 MN MO 50 D 1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Speed Controller with One-touch Fitting

Note 4) Only G thread Port size 01 1/8 02 1/4 03 3/8 04 1/2 Made to Order (For details, refer to page 571.)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

5 Port Solenoid Valve SY Series

) (66) 47.6 (5.5) (49.5) (42.5) 31.5 [38.5] 24.5 + 16.1 (P port) 1/4 2 18 0.9 (23.9) EA P EB For manifold gasket positioning 22.2 die-cast hole (EA, EB port) 1/8 36 L plug connector (L): M plug connector (M): DIN terminal (D): M8 connector (W0): 3 4 5 3 4 5 3 4 5 3 4 5 SY7 20-L(-F2) C8, N9 C10, N11 SY7 20-D(-F2) C8, N9 C10, N11 SY7 20-W0(-F2) C8, N9 C10, N11 SY7 20-M(-F2) C8, N9 C10, N11

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

connector VZS VFS 20 (12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

plug connector (L): VQZ115(R)-L-01 M plug connector (M): VQZ115(R)-M-01 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 54 <59> 300 52 Indicator light Indicator light 60.5 <65.5> 300 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 46 < >: AC < >: AC 4-14-30 31 Base Mounted 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Base Mounted, Plug Lead Unit Series

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

0.4

425 450 462.5 475 198 210.5 235.5 248 260.5 273 298 310.5 323 348 360.5 373 385.5 410.5 423 435.5 460.5 473 485.5 401 Kit (Lead wire) L VQ1000/2000 Series 3 2 1 4 3 2 1 4 4 3 2 1 IP65 compliant VV5Q11 VV5Q21 Direct electrical entry.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

Nozzle Type Ionizer

8 mm, I.D. 5 mm, Length 100 mm to 500 mm O.D. 8 mm, I.D. 5 mm, Length 100 mm to 500 mm Supply pressure [MPa] 0.25 Flow meter 6 Union tee fitting 0.20 O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min

JXCx-OMT0061CN

) RWr3=012Ch F8 H 70 L 3 H= L= 39 - [] PLC RWr RWr bit 0 (L) 1 (H) 2 10.1.2 (1) [IN]( )[] (P.39) 3 4 READY 5 ALARM 0 6 7 8 ONOFF 9C () D E F 10.1.2 (1) [IN]( )[] (P.39) 1 F0 L 2 F0 H 3 70 L F8 H 4 70 L 1[%] F8 H 5 F0 L 0.01[mm] 6 F0 H 70 1 1 code 310 code 1 code 7 1234 code () F8 2 2 1 () 70 3 2 0 3 0 0 4 0 0 0 8 *code 16.2 (P.72) F8 4 9 15 F0 H= L= 40 - (2

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

SFOD-OMT0005CN

Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 (-) A-3 (8) (1) (2) (B1) A1 (14.2) 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5 (3) B1 A1 2 1 (B3) (A3) (5.7) (4) 15 16 L (11) (30.7) 15.4 ()[820m] (1) (2) LECPB A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 8 8m * COM-A/COM B-3 3 A 10m * COM-B/ A-3 4 (3) B 15m * Shield

Secondary Batteries

connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-PF2W720 90-PF2W720, 90-PF2W740 90-PF2W740 PF2W5 20 03 90 Remote Type Sensor Unit Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 04 20 40 Series compatible with secondary batteries 90 Material

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Modular Type Regulator Series AR

4) Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G27-10-R1 Note 3) Round 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6