Aluminum High Vacuum Angle Valve XLA XLFV/With solenoid valve J XL XL XLQ XM XY M N Port P D(Pressure port) XSA K L P R XVD XGT Port R (Exhaust port) CYV (mm) (mm) J J K L M N K L M N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 Model XLFV-63 XLFV-80 XLFV-100 XLFV-160 35.5 12.3 10.2 3.6 3.6 78.5 28.7 12 4 2 40.5 13.8 10.2 3.6 3.6 87 38.7 12 4 2 50.5 21.6 10.2 3.6 3.6 105.5 49.7 12 4 2 67 21.7 12 4 2 128.5 58 12 4 2 Other dimensions
(2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).
(Maintenance space 100 mm or more) With float With drain guide Port size A B C D E type auto-drain F G H J K L M N P Q R S Model T U IDG3V3, 3HV3, 5V3, 5HV3 IDG10V3, 10HV3 IDG20V3, 20HV3 1/4, 3/8 284 202 41.5 10 119 144 174 97 5.5 12 73 173 180 237 262 93 30 24 5.5 29 67 3.2 192 1/8, 1/4 254 55 14 208 201 129 7 14 86 107 41 35 7 41 82 4 242 39 Made to Order Series IDG
B Counter bore depth C 2 x 4-MM thread depth M 4-J x E (depth) H 2-P (piping port) Y T T HA CB L HP TC F X WP GW GP WS QW PW D 4-LD W K With switch rail Plug HS Q + Stroke G Z + Stroke HR CR Area E (Area E) For CY1R25, 32, 40, 50, 63 (mm) A B C CB CR D G GP GW H HA HB HC HP HR HS HT J x E F Model CY1R 6 9 6.5 3.2 2 0.5 7.6 4 20 18.5 19 17 10.5 18 9 17 6 7 M4 x 0.7 x 6 5.5 CY1R10 9 6.5 3.2
hole (80F: 8 x 2 x 18) VND VCC Applicable flange Port 1, 2 65 80 A B C D E F H Note) Model 1 4 1 4 VNC81 -65F VNC91 -80F 210 240 305.5 341.5 175 185 204 235 140 150 65 80 405.5 (391.5) 441.5 (427.5) Note) ( ): CE compliant product (-Q) 405 Series VNC How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 CE compliant SF4 5 D 23 Q VO307 Q Note )Electrical entry: D or DZ only CE
Q Q Q Q Q Q Q Q Q Q Q Q Q 133 Q MXW Series 8, 12, 16, 20,25 Linear guide table provides long stroke Linear guide Long stroke (up to 300mm) Linear guide provides long stroke and smooth operation without vibration.
q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.
VCHm Dimensions: Bracket VDW VQ A J LVM 4 x G C 1.5 VCA VCB VCL B D L E VCS VCW 4 x H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) B C D E F G H J L A Bracket part no.
(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage
M 0.2 A + Stroke E 25, 28 H thread effective depth C 2-Rc 1/8 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA Y Q F E J I 4-N through M 0.2 D W K B + Stroke L A + Stroke M 0.2 E Bore size (mm) Stroke range (mm) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6
thread effective depth C 2-Rc 1/8 F Q Y 2 x 4-OB Counterbore depth RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E Bore size (mm) Stroke range (mm) A OA B C D E F H RB I J K L M N OB Q RA W Y 10 10 to 40 39.5 M4 x 0.7 31.5 6 6 29 5.5 M3 x 0.5 4 38 5 8 20 3.5 6.5 14.5 7 5 16 10 to 60 44 M6 x 1.0 34 8 8 36 5.5 M4 x 0.7 7 47 7 10 25.5 5.4 9 18
Speed 300 mm/s Dimensions Basic Type REA A K W HT HC X N Direct Mount Type REAR 2-P piping port 4-Counter bore B Counter bore depth C H HA Y T 8-MM thread depth M CB L T 4-J effective thread length E X F GW GP WS Slider Type/Slide Bearing REAS Slider Type/Ball Bushing REAL QW PW D 4-LD HS CR W K REAR10 REAR15 Switch rail HR Q + Stroke G Plug Z + Stroke High Precision Guide Type REAH (mm)
Component Parts No. q w e r t y u i No. o !0 !1 !2 !3 !4 !
3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !
Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.
0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
Local Area: (800) 258-9200-www.stevenengineering.com 4-FD RHC MK(2) FT FV M RS Q G FX FL RS H A 4-O (Special cap bolt) A + Stroke FZ FG RZQ Head side flange style: MI W S CE1G Bore size Stroke 4-FD CEP1 CE1 FT FV M CE2 FL FX ML2B A + Stroke 4-O (Special cap bolt) FZ FG C J G5-S Double clevis style: CE1D Bore size Stroke CV MVGQ 4-O CC CX +0.4 +0.2 CZ 0.1 0.3 RB J CD hole H10 Shaft d9 CU T
0 u @8 @4 !2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.