Vacuum Pad: Ball Joint Type

width across flats 3 ZP3E 3 ZP2 ZP2V 2 A B ZP Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR XT661 Dimensions: 10 mm Stroke (mm) A B C D F H I J Model ZPT20F10-01-A14 20 22 12.5 15.5 36 48.5 1 15 ZPT25F10-01-A14 50 25 28 ZPT32F10-01-A14 32 35 13 16 36.5 49 1 15.5 Additional Dimensions by Stroke (mm) H I J Stroke 20 +10 +5.5 0 30 +20 +15.5 50 +40 +60.5 +25 715 ZPT Series 10 13 16 40 50 J K J K ZPT F

Table of Contents

Note 3) Specify the wiring specifications on the manifold specification sheet. 01 1 station Note) 08 16 8 stations (Double) 16 stations (Single) NKE Corp.: Uni-wire H System Note) Note) For details, refer to page 2-4-29.

LEC-OM02904

PA02 **REG 0h (37) No.PA02 PA02 0 0 00 100W 0.2k7kW 11k22kW 30kWMR-J3-CR55K(4) (30kWMR-J3-CR55K(4) ) 01FR-BU2-(H)FR-RC-(H)FR-CV-(H) 02MR-RB032 03MR-RB12 04MR-RB32 05MR-RB30 06MR-RB50() 08MR-RB31 09MR-RB51() 80MR-RB1H-4 81MR-RB3M-4() 82MR-RB3G-4() 83MR-RB5G-4() 84MR-RB34-4() 85MR-RB54-4() FA11k22kWUP 00 100W 200W 02LEC-MR-RB-032 03LEC-MR-RB-12 () 5 6 5 5.1.5 No.

LEC-OM07605CN

SW2) 3 7 LED (SW1) (SW2) ON 1 2 3 4 4 7 4. (1)(SW2-1) ON()ON() MR Configurator2)JOG ON()(2) OFF() ON 1 2 3 4 OFF() ON() (2)(SW2-2) ON() ON 1 2 3 4 (3) (SW2-3SW2-4)(SW1) 2.lmm2.3mm 0.6mm0.7mm (SW2-1)SSCNET/H 164( (3)(c)) SSCNET (a)(SW2-3SW2-4) ON()17 4 8 4.

SV

Description Function Drain No. 1 2 3 2 Sensor power supply + 1 5 Drain/Shield 1 Open N.C (SIGNAL) 2 4 3 4 1 Circuit power supply + V+ 2 SW Sensor power supply 3 Circuit power supply V 3 5 SIGNAL Sensor input signal 4 Signal H CAN_H 4 E Sensor ground 5 Signal L In the case of a 4 input block (EX250-IE2), this is the sensor input signal.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-06 AS121F-M5-07 1/4" M5 x 0.8 M5 x 0.8 13.5 11.7 18.3 23.1 7 13.5 12 18.1 6 11.6 22.9 AS121F-U10/32-06 AS121F-U10/32-07 1/4" 10-32UNF 10-32UNF AS221F-01-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2

Modular Type Regulator Series AR

4) Square embedded type Note 2) GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G27-10-R1 Note 3) Round 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

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'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ... ZPT20~ 20 23 I. 23 34.5 57.5 70.5 90.5 91 4 1.7 . 43 1 8.5 ) 32 44.5 ZPT40g 94.5 1 00.5 128 133.5 4() 6.5 3.3 ~ 53 19.5 1 33 45.5 25 28 I. 23 34.5 57.5 70.5 90.5 91 4 1.8 50 110.5 129 134.5 95.5 7.5 ZPT~ 3.8 . .

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80, 100 R 1/2 AS121F-U10/

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

connector VZS VFS 20 (12, 14 port) 10.5 (2, 4 port) VS4 85.5 72.5 VQ7 10.5 PE port 29 14 SMC EVS M5-2 port 12, 14 port 1/8, 1/4-2 port 2, 4 port 1/8, 1/4-2 port 3, 5 port 21 21 VFN 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

A_HEC-OM-J017

setting temperature -4-1 4.3 Reading internal sensor -4-2 4.4 Reading external sensor -4-3 4.5 Reading alarm status -4-3 4.6 Reading temperature average data -4-5 4.7 Offset setting (without writing EEPROM) -4-5 4.8 Reading offset -4-5 4.9 Temperature setting (with writing EEPROM) -4-6 4.10 Offset setting (with writing EEPROM) -4-7 5 Troubleshooting -5-1 6 Communication Format and Examples

REC

181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55

ZP

How to Order ZP40 H N Pad unit Pad diameter Pad material Symbol Pad diameter 40 50 63 80 100 125 Symbol Material NBR Silicone rubber Urethane rubber FKM EPR 40 50 63 80 100 125 N S U F E Pad type Symbol Type Heavy-duty (Flat with rib) Heavy-duty (Bellows) H HB Dimensions: Pad Unit ZP H 40 50 ZP H ZP H 63 80 100 125 C C C 4.5 4.5 6 5.5 3.5 3.5 21 D 6 10 8 Y 11.5 3 7.5 A A A B B B 4 x 6 4 x

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

N1, N2, F1, F2 Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

REA/REB

B 4-Counter bore depth C MM thread depth M Hollow shaft for piping FA FB EB H S + Stroke HO TT T HP 4-J depth JK HI HG PA Slider Type/Slide Bearing REAS H 2-P HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT Slider Type/Ball Bushing REAL (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A High Precision Guide Type REAH N N Max.