SZ3000

SZ Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

SZ3000

Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

Fieldbus System

*SY3130-5U1-C6 3 sets (2-position single part number) *SY3230-5U1-C6 2 sets (2-position double part number) *EX600-DXPD 1 set I/O Unit part number (Station 1) *EX600-DYPB 1 set I/O Unit part number (Station 2) * For N, sizes are in inches. N 5/16" 3/8" 1/2" i Mounting The asterisk denotes the symbol for assembly. Prefix it to the part numbers of the solenoid valve etc.

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

4/5 Port Air Operated Valve Series SYJA3000

size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust

42

: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 9 10 11 12 13 14 15 16 L1 288 313 338 363 388 413 463 463 L2

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 48 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8,

VZS

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

x 3/8", 1/2" Stations (A, B port) 1 60 3 14 18 157 58 Max. 3 D side 72 (A, B port) 92 Grommet with terminal Bottom ported: VV5FR4-10Station 2Port size External pilot port 2 x 1/8" (PE port) EB 3 EA 5 X 12 P 1 63.5 Stations n: Station 45 26 18 2 156 168 3 199 211 4 242 254 5 285 297 6 328 340 7 371 383 8 414 426 9 457 469 10 500 512 PE Formula L1 = 43 x n + 70 L2 = 43 x n + 82 L L1 L2 24

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-3-7 8 Series SQ1000 Manifold Option Blanking plate SSQ1000-10A-3 Individual SUP/EXH spacer SSQ1000-PR1-3Name plate (-N) SSQ1000-N3-n External pilot specifications (-R) P. 2-3-44 P. 2-3-45 P. 2-3-47 P. 2-3-48 C6 L6 External pilot port SUP/EXH block SSQ1000-PR-3-C8 (-S) SUP block plate SSQ1000-B-P Blanking plug

5 Port Solenoid Valve

Thread type Nil Rc F G T NPTF N NPT Port size Symbol Port size C6 6 C8 8 C10 10 C12 12 N7 1/4" N9 5/16" N11 3/8" 02 1/4" 03 3/8" B 1/4" bottom ported Kit type Wiring specifications 2 F, P, T, S (EX126, EX250, EX600) kit 3 L, M, S (EX260, EX500) kit D Double wiring S Single wiring Note 3) Note 3) Single wiring is available only for 1 station.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (7.5) DIN rail clamp screw 18 0.5 U side n 5 Manual override Manual override SY A SMC SMC SMC SMC 4 (L4) (L3) L1 SYJ 2 L2 A 3 2 A VK 2 P=16 2 A 1 VZ 2 19 Stations VT 5.5 D side 0.7 17 70 3 300 VT 43.5 10 (C4, C6) (M5) (Lead wire) VP Cover diameter 1.6 Cross section 0.34mm2 VG VP 48.5 (11) 7.5 R 3 1 P (18) 2-Rc

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Vacuum System Peripherals:

SX3 LOZ 40R Common specifications Rated voltage Manual override Type of actuation 2 positon single solenoid 2 positon double solenoid 3 position closed center 3 position exhaust center 3 position pressure center Positive common Negative common Nil Non-locking push type Push-locking slotted type 1 2 3 4 5 5 24 VDC 12 VDC Nil N D 6 Must be the same voltage as that of the manifold.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 4 3 8 VSA430 Individual EXH 1 2 VSA430 3 4 3 4 Common EXH , 1 2 3 4 How to Order 1 2 standard , 1 2 3 4 , 3 8 1 2 3 8 VSA440 3 4 Individual EXH 1 2 SA VV 4 2 0 N 1 05 Piping specifications/Side ported, bottom ported Manifold Air operated valve Series VSA 4 port valve Thread type Body size Nil Rc EXH port Symbol Size N Piping NPT NPTF PF Individual 1 Symbol Common Type 2 3 1 4 3 8 1 2

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

VZ3000

2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations Rc 1/4 1 8 Rc Nil F N Z NPTE 01 Rc C6 One-touch fitting for 6 4(A), 2(B) port G 20 20 stations 1(P) port Rc 1/8, C6 NPT B7 One-touch fitting for 1/4" Rc 1/4 How to Order Type 43 VV5Z3 05 43 1 C4 1(P), 3/5(R) port thread type 4(A), 2(B) port size Stations 02 2 stations 3/5(R) port Nil F N Z NPTE Rc C4 One-touch fitting

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4

VZ5000

R) port 3: Common exhaust type for main and pilot valve 3 position closed center Thread type 3 Nil Rc F N G PE port 3(R) port NPT T NPTF 3 position exhaust center 4 Rated voltage 4(A), 2(B) port size 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 Rc 1 8 01 C6 C8 One-touch fitting for 6 One-touch fitting for 8 3 position pressure center 4 Note) P , R1, R2