V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

Proposals for Energy Saving

Model Description AR1000 AR2000 B220 AR2500 B320 AR3000 B420 AR4000 AR4000-06 B640A Note 3) AR5000 AR6000 Bracket B120 B220 B420 B640A Note 3) Note 1) Note 2) G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G27-10-R1 1.0MPa G36-10-01 Pressure gauge 0.2MPa (G27-10-R1) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 Auxiliary Pneumatic Equipment Air Preparation Equipment

VFR

Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !

Table of Contents

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

Modular F.R.L. Units

to AF60-A Symbol Air Filter Air Filter with Auto Drain 2 1 2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust center (A) 4 (A) 4 (B) 2 (B) 2 How to Order Manifold Base 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (

This is a legacy product, and replaced byVFS2420R-5G-02T, VALVE SOL/PILOT 24VDC1/4 *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, EG, VFS2000 BODY PT 1/4NPT (F), 0.88844 lb

This is a legacy product, and replaced byVFS3120-5G-03T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS3000 SOL VALVE 4/5 PORT, GD, VFS3000 BODY PT 3/8NPT (F), .72600 lb

This is a legacy product, and replaced byVFS1120-5G-01T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS1000 SOL VALVE 4/5 PORT, CD, VFS1000 BODY PT 1/8NPT (F), 0.396 lb

This is a legacy product, and replaced byVFS2120-5G-02T, VALVE SOL/PILOT 24VDC *LQA, VALVE, VFS2000 SOL VALVE 4/5 PORT, ED, VFS2000 BODY PT 1/4NPT (F), 0.572 lb

This is a legacy product, and replaced bySYJ3120-5G-M3-F

VM

fitting 1(P): Male thread 2(A): One-touch fitting 1(P): One-touch fitting 2(A): Male thread 1(P): Male thread 2(A): Male thread 2(A) 2(A) 2(A) 2(A) Applicable tubing O.D.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) A B C D E F G H I J Y A B C D E F G H I J Y Model Model ZPX40HBJ25-01-A18 ZPX63HBJ25-01-A18 109 160 120 171 50-01-A18 50-01-A18 144 195 155 206 40 41 28 43 20.5 32 47 69 13 63 65 46 68 31.5 43 58 80 21.5 75-01-A18 75-01-A18 180 231 191 242 ZPX50HBJ25-01-A18 ZPX80HBJ25-01-A18 112.5 163.5 125.5 176.5 50-01-A18 50-01-A18 147.5

smcmaintenancepartslist

2 A-A section (port on rod end) A A-A section (port on rod end) A A A The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205). Seal Kit List Description Material Note No. Replacement Parts: Seal Kit Kit no. Contents Bore size (mm) !2 !3 !

Modular F.R.L. Unit

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Table of Contents

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable

A

0.05~0.83MPa P R E S S U R E 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D Rc(PT)* Remove (N) when ordering F F(PF) N NPT Courtesy of Steven Engineering, Inc. !

Speed Controller with One-touch Fitting

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E Body size 1 KE AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .