CQ2

M5 X 0.8 Rc(PT)1/8 M5 X 0.8 M5 X 0.8 M5 X 0.8 M5 X 0.8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Screw-in style Piping 6/4 8/6 8/6 6/4(2) With built-in One-touch fitting Rod end male thread Rear boss mount Note 1) When requring style without auto switch, only 5 stroke uses M5 X 0.8.

AC

02 03 04 0 1 VY150 04 06 10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%

1

M12 x 1.5 41 46 54 56 62 81 8 10 10.5 13.5 15 18 21.5 28 4.5 4.5 5.5 5.5 7.5 7.5 9 9 22 25 30 23 24 4.3 4.3 5.6 5.6 6.6 6.6 8.6 8.6 10 12 13 15 20 20 22 22 8 8 9.5 9.5 11 11 14 14 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Bore size (mm) DB M5 x 0.8 M12 x 1.5 3.5 M5 x 0.8 Standard stroke (mm) HA Slide FA B C DA FB G GA GB H J K L MM ML OA GC JA JB MC NN MA A RB1007 M5 x 0.8

Table of Contents

10 N 1 1 B G LJ1 F 100 Guide type High rigidity direct acting guide X10 Non-standard motor H Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

Proposals for Energy Saving

ON H OFF Blue 50msec PFA7H-(-M) 28 29 Sensors Measuring Instruments B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mA DC 5 20 Analog output

MXQ

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12.5 (Adjuster at extension end) 28 24.5 58 49 3.5 24 29 24.5 14.5 5H9 depth 5 +0.030 0 1 F 6.5 14 4-M5 x 0.8 thread depth 7 2 N 1 x F 21 3-M6 x 1 thread depth 10 NA-M5 x 0.8 thread depth 6.5 10 M 21 KA Bottom view of MXQ6-30 10 5.5 21 K 13 35 45 10 5.5 33.7 0.3 5.5 37 Z ZZ (NN 1) x H G H

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

Table of Contents

Hexagon Socket Head Universal Male Elbow: KQ2VS VMG H (width across flats) A M Effective area (mm2) Nylon Connection thread R M5 1 8 M5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2 Applicable tubing O.D.

CJ2

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

.S. 1 digit (Ambient temperature of 25 3C) Repeatability 0.2% F .S. 1 digit Analog output accuracy 2.5% F .S.

MXS

at extension end) N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 3.5 (With stroke adjuster at retraction end) 18 (With stroke adjuster at extension end) 26 35 62 48 F 20 5H9 deep 4 +0.030 0 2-M6 X 1 thread 10 deep N -1 X F 2 21 5H9 4 deep +0.030 0 10 M 0.5 36.5 40 Z ZZ (NN-1) X H G 24 10.5 24 10.5 H A B 10.5 10.5 5.1 9.5 26 1 5H9 4 deep +0.030 0 6 NN-M6 X 1 thread 12 deep

C85

HR K H G F D SW WH 8 M12 x 1.25 4.2 12 M5 x 0.8 M4 x 0.7 15 19 28 7 12 16.7 6 7 9.5 16 11.5 10 4 10 M12 x 1.25 4.2 12 M5 x 0.8 M4 x 0.7 15 19 28 7 12 16.7 6 7 9.5 16 11.5 10.5 4 12 M16 x 1.5 6.2 16 M5 x 0.8 M6 x 1 18.3 24 5 38 8 17 19.7 8 10 10.5 22 12.5 14 6 16 M16 x 1.5 6.2 16 M5 x 0.8 M6 x 1 18.3 24 5 38 8 17 19.7 8 10 10.5 22 12.5 14 6 20 M22 x 1.5 8.2 20 G 1/8 M8 x 1.25 24 32 6 44

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ MHZ2-40 1 MHZ2-40 2 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

smcmaintenancepartslist

AM150C AM-EL150 AM-EL150-F AM250C AM-EL250 AM-EL250-F AM350C AM-EL350 AM-EL350-F AM550C AM-EL550 AM-EL550-F AM650 AM-EL650 AM850 AM-EL850 Except option F For option F Element assembly Glass fiber, others AM-EL450 AM-EL450-F 4 1) Element assembly: With gasket (1 pc.) and O-ring (1 pc.) 2) F option, the rubber material: In the case of fluororubber Maintenance Hexagon socket head bolt 1.Replace

Modular Design with Uniform Body Style

: Z) Round type pressure gauge (with color zone) P1 P2 A B C*1 D E F G J K H J H J H J AW20-D 1/8, 1/4 1/8 40 87.6 71.8 21 M28 x 1 40 21 5 37.5 57.5 37.5 58.5 37.5 58.5 AW30-D 1/4, 3/8 1/8 53 115.3 86.5 26.5 30 M38 x 1.5 55 26.5 3.5 37.5 63 37.5 64 37.5 64 AW40-D 1/4, 3/8, 1/2 1/8 70 147.1 91.5 35.5 38.4 M42 x 1.5 80 35.5 42.5 73 42.5 73 42.5 73 AW40-06-D 3/4 1/8 75 149.1 93 35.5 38.4 M42

MXS Series Air Slide Table

Applicable model H G A B C J K E D F 16.5 MXS-AT6 5 MXS 6 7 10.5 2.5 21 19 8 5 M2.5 X 8 M5 X 0.8 MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 12.5 3 25 9 6 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 18.5 4 32 13 8 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 23 5 40

VZ100/300/500

-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port Note) M5 x 0.8 Note

CRB2/CRBU2/CRB1

A B C D G E (g6) F (h9) S2 S1 R N M T U V W X Y L K H Model CRBU2WU15-D 5 0.004 0.012 0 0.043 M3 x 0.5 3.5 21 3 M5 x 0.8 29 10.5 34 10.5 36 0.5 48 25 3.2 21.2 10 18 15.5 1.5 12 CRBU2WU20-D 0.004 0.012 0 0.043 M4 x 0.7 4.5 26 M5 x 0.8 4 11 36 44 42 11.5 59 34.5 0.5 25 10 4 17 20 1.5 6 14 CRBU2WU30-D 0.005 0.014 0 0.043 M5 x 0.8 5.5 29 M5 x 0.8 4.5 13 42 12 52 50 69 47.5 1 4.5 29 12 22 17.5

Table of Contents

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22