Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

Clamp Cylinder with Lock

8 #4 !9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

21

25 32 40 55 M8 x 1.25 11 40 30 M26 x 1.5 M5 x 0.8 56 20 8 118 3.2 55 M10 x 1.25 14 40 34.5 M26 x 1.5 Rc1/8 62 20 8 124 3.2 55 M10 x 1.25 14 55 42.5 M32 x 2 Rc1/8 67 23 10 142 3.2 75 M14 x 1.5 19 Use a thin wrench when tightening the piston rod.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

5-Port Solenoid Valve

Plug-in Sub-plate Flow Rate Characteristics Rubber Seal Metal Seal Series Sub-plate piping location Fitting port size 1 4/2 4/2 5/3 (P, E) (A, B) C b C b Series Sub-plate piping location Fitting port size 1 4/2 4/2 5/3 (P, E) (A, B) C b C b Side ported 1/8 1/8 1.8 0.27 1.7 0.26 Bottom ported 1/8 1/8 1.7 0.23 1.4 0.27 Top ported 1/8 C6 1.3 0.34 1.5 0.27 Side ported 1/8 1/8 1.4 0.14 1.3

Table of Contents

8 9.5 11 11 ZB 7.4 11.4 13.4 17.4 21.4 TB 8 8 10 10 12 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 Q 11 12 14 17 20 VB 4 4 5 6 6 UB 10 10 12 16 16 ZA VA TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

SMC Pneumatic Clean Series

5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5

IDU/IDF

Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Cannot be mounted on models with option "A" (IDF6D to 75C). 21 Accessories

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

Air Fittings & Tubing

3.4 16 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 X 0.8 M6 X 1.0 3.4 3.4 27.5 8 8 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 10 1 4 18 3 8 22 26 28 37 39 41 1 8 1 4 20.5 18.5 8 12 15.2 19.7 19.7 3 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1 8 1 4 17 18.5 24 21 17 30.9 23.2 10 3 8 1 2 22 1 4 17 20.9 17 25 22 12 3 8 1 2 3 8 1 2 44.5 35.1 22

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 47 32.5 4 8 40 Up to 1000 24 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 54 38 4 8 50 Up to 1000 32 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 66 46.5 5 63 Up to 1000 32 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 77 56.5 5 80 Up to 1000 40 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 99 72

ISO Cylinder

0.8 12 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 82.5 (88.5) 94.5 (100.5) 104.5

Modular F.R.L. Units

8, 1/4 AF30-A 1/4, 3/8 Bracket (Except AF10-A) AF40-A 1/4, 3/8, 1/2 5 Float type auto drain AF40-06-A 3/4 AF50-A 3/4, 1 AF60-A 1 Pages 43 to 54 Mist Separator AFM Series AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 AFM40-A 1/4, 3/8, 1/2 Float type auto drain AFM40-06-A 3/4 Pages 55 to 63 Micro Mist Separator AFD Series AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 AFD40-A 1/4, 3/8, 1/2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 Tube gasket Steel wire Spring pin NBR !1 !