CM2

66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A (mm) 20 25 32 40 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 2.5(0.5) 7.5 1.5(0) 3.5(1.5) 8.5 6.5 ( ): Denotes the values with air cushion.

10

) 94 (102) 100.5 R 34 (39.5) 45 (53) 49.5 (57.5) 53 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 108 110.5 113 113 R 36 (41.5) 47 (55) 51.5 (59.5) 55 1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

IDU/IDF

IDU3D to 75C Page 24 IDF1D to 75C How to Order Transformer separately installed Base integrated with transformer IDF TR 1500 5 IDF TB 2 Size order Supply voltage Volume Applicable dryer IDU3D, IDF4D IDU4D to 15C, IDF6D to 15C IDF22C1 IDF37C1 to 75C Symbol 1 2 3 4 Applicable dryer IDU3D-1 to11C-1, IDF1D-1 to11C-1 IDU15C-1, IDF15C-1 IDU22C1-3, 37C1-3, IDF22C1-3, 37C1-3 IDU55C-3, 75C-3, IDF55C

CQM

1 !2 !3 !4 !5 !6 !

Refrigerated Air Dryers

[MPa] Correction factor 0.2 0.62 0.3 0.72 0.4 0.81 0.5 0.88 0.6 0.95 0.7 1 0.8 1.06 0.9 1.11 1 to 1.6 1.16 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15 1.3 Refrigerant R134a (HFC) IDU E IDU55E, 75E IDF100F to 150F Outlet air pressure dew point [C] Correction factor 3 0.55 5 0.7 10 1 15

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 !2 !3 !

Compact Cylinder

(D-M9A(V)L can be used with a lead wire of 0.5 m and 3 m.) Note 3) 1 m (M): D-M9(V), M9W(V), M9A(V)L only.

5-Port Solenoid Valve

1 !2 !3 SY 3 5 C6 1 0 3 1 Valve Replacement Parts Top ported !

Table of Contents

1!3@2@3@4 MHZAJ-A0603 Piston assembly MHZAJ2-6S wo!1!3!

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

7

24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53) 3 A VXD2 64.5 52.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

4 @3 o !7 !8 !2 !6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

SMC

Unstable area Stable area Class M2.5 Grade 1 Grade 1 Grade 2 Grade 2 (1) Cleanliness Class M3.5 Grade 2 Grade 3 Grade 3 Class M4.5 Grade 1 Grade 2 Grade 3 Grade 2 Grade 3 Grade 4 Grade 2 Grade 3 Grade 4 :Class M2.5 and M3.5 levels of cleanliness cannot be achieved in area due to dust accumulation or flotation.

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

Air Fittings & Tubing

KQY Male run tee KQY 1 4 1 4 The male thread for piping drastically cuts piping manhours 3 8 3 8 1 2 1 2 1 8 1 8 1 4 1 4 Branch Y KQU Branch Y KQU 3 8 3 8 1 2 1 2 1 8 1 8 Extended male elbow KQW Extended male elbow KQW 1 4 1 4 3 8 3 8 1 2 1 2 1 8 Refer to the catalog No.