ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 47 32.5 4 8 40 Up to 1000 24 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 54 38 4 8 50 Up to 1000 32 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 66 46.5 5 63 Up to 1000 32 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121 4 9 6.3 77 56.5 5 80 Up to 1000 40 25 G 3/8 16 M10 x 1.5 10 M20 x 1.5 22 38.4 17 128 4 11.5 6 99 72

Vacuum System Peripherals:

Construction Port size Rc Model ZL AR10 AR20 1 16 1 8 1 8 1 8 1 4 1 4 1 4 1 4 100 0.05 to 0.7 600 M5 x 0.8 1 8 1 4 , ZY AR25 , 1200 1 4 3 8 AR30 AR40 AR40-06 AR50 AR60 1 4 3 8 , , , 2900 5000 6000 0.05 to 0.85 Relieving type 1 4 3 8 1 2 ZQ 3 4 3 4 , 1 1 8000 10 ZF Inlet pressure 0.7 MPa, Set pressure 0.5 MPa, Pressure drop 0.1 MPa ZP ZCU Modular, Filter regulator Series AW Flow rate

Table of Contents

4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.

ISO Cylinder

10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

High Power Cylinder Series RHC

Composed effective area So (mm2) 1500 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 2000 38 2500 47 0.5 3000 56.5 0.1 0.3 10, 12, 16 1/4, 3/8 50 500 15 63 1000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 0 1500 45 1,000 2,000 3,000 2000 60 Maximum speed Vmax (mm/s) 2500 75 80 3000 89.5 16 3/8, 1/2 500 24.5 =0.7 1000 48.5 3/8, 16 1/2, 16 3/4 3/4 3/4 3/8 1/2, 16 3/4 3/4 3/4 3/4 150 80 1500

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 4 0.5 0.5 4 3 16 16 2 2 40 40 5 5 2 1 Pin no.

Compact Cylinder

16 30 35 40 45 45 55 22 26 32.5 38 46.5 56.5 72 89 22 22 24.5 26 31 31 38.5 45 7 7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72

Clamp Cylinder with Lock

1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy

Air Cylinder

Bore size [mm] 10 16 Action Double acting, Single rod Fluid Air Proof pressure 1 MPa Non-rotating accuracy 10: 1.5, 16: 1 Can operate without lubrication.

LEC-OM02704CN

33 44 55 66 (3) (RES)ON [8][2] [0][0] 1EA5 14 41 14 14.5.11 (1) (a) [4][0][0][1][F][F] 14.4.1 16 0 11 () 22 33 44 55 0 0 0 16 66 1 10 0 1 (b) [5][0][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 14 42 14 (c) [5][4][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 (d) [5][8][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 14 43 14 (e) (DWELL) (DWELL) [6][0][0]

Free Mount Cylinder Series CU

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

ZP

1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat with ribs Deep Bellows Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Pad form Thin flat/Thin flat with ribs 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16 10, 16, 25, 40 Material (Color) NBR (Black), Silicon rubber (White), Urethane rubber

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

C85

M6 x 1 M8 x 1.25 M10 x 1.25 dh7 h 27 27 30 30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12

C85

4 12 28 5 15 8 12 16.7 4.2 M12 x 1.25 M4 x 0.7 M5 x 0.8 12 7 9.5 5.5 6 19 10.5 16 4 12 28 5 15 10 16 19.7 6.2 M16 x 1.5 M6 x 1 M5 x 0.8 16 10 10.5 5.5 8 24 14 22 5 6 17 38 6 18.3 12 16 19.7 6.2 M16 x 1.5 M6 x 1 M5 x 0.8 16 10 10.5 5.5 8 24 14 22 5 6 17 38 6 18.3 16 22 28 8.2 M22 x 1.5 M8 x 1.25 G 1/8 20 13 15 15 11 32 17 24 6 8 20 44 8 24 20 22 33.5 10.2 M22 x 1.5 G 1/8 22 M10 x 1.25 17

SMC

thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4

Compact Manifold Regulator Series ARM5

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500