Basic type / Direct mount type Series CY3B/CY3R

2!6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

CQM

1 !2 !3 !4 !5 !6 !

Series 10-SV ® EX500 Decentralized Serial Wiring

2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Double wiring Note 1) 08 02 8 stations 2 stations Specified layout Note 2) SUP/EXH block assembly (up to 16 solenoids possible) 16 16 stations Internal pilot External pilot Nil R Double wiring: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations

4/5 Port Solenoid Valve

) 63.6 34 8.5 2-M5 x 0.8 1 (Pilot port) 13 3 1 A B B A 2-M5 x 0.8 34 2-3.2 27 17 A B (Pilot port) (For manifold mounting) 1 35 R1 P R2 31.5 2-3.2 18 35 (For mounting) 63.6 Manual override 74.6 28 29 25 21 1.6 14 74.6 Manual override 55 1/8 2-1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 (Piping port) 20 12 11.5 R1 R2 P 18 22 22 1/4 2-1.8 (Bleed port) 63 27.2 (R1, R2 port) With fiflter (

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

*1,*2 Para.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

2 !1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

CJ2

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

CM2

Double knuckle joint Mounting nut Rod end nut Single knuckle joint Rod boot Mounting Basic style (1 pc.) (2 pcs.) Foot style (2) (2) Flange style (1) (2) Operating Precautions (2) (1) Trunnion style (1) Warning CJ1 One/Both side(s) Note 1. Do not rotate the cover.

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

Tie-rod base SS5V W 1 A2W D 05 U 10S Cassette base U SS5V W D 05 16S 1 A2W Enclosure IP67 specifications DIN rail length specified Series Standard length Nil 3 SI unit 1 2 SV1000 SV2000 Specify a longer rail than the standard length.

MY1

RB2725 x 1 pc. RB2725 x 2 pcs. RB2015 x 2 pcs.

10

1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 4 0.5 0.5 4 3 16 16 2 2 40 40 5 5 2 1 Pin no.

Refrigerated Air Dryers

Thread type and port size Applicable air dryer C D E Material Number of 1 set Male thread A side Female thread B side Female thread B side IDF-AP601 R1/2 NPT1/2 IDF4E IDU4E 38 20 26 IDF-AP603 R3/4 NPT3/4 IDF6E to 11E IDU6E to 11E 43 23 32 IDF-AP604 NPT1 Rc1 IDF22E, IDU22E 50 27 46 IDF-AP605 R1 NPT1 IDF15E1, IDU15E1 IDF-AP606 NPT1 1/2 Rc1 1/2 IDF37E, IDU37E 55 31 54 Brass 2 Male thread A side

IDU/IDF

-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR1000-1 IDF-TR1000-2 IDF-TR1000-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR500-1 IDF-TR500-2 IDF-TR500-3.4 IDF-TR1000-1 IDF-TR1000-2 IDF-TR1000-3.4 328 356 681 IDF4D-1 53 IDF-TB1 348 376 584 IDU3D-1 Transformer separately installed 442 470 A 595 IDF6D-1 75 442 470

21

Number of auto switches Same surface Different surfaces Same surface (n 2) 2 D-M9m/M9mW D-A9m 15 + 45 10 15 Note 1) Note 1) 45 45 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 D-H7BAL/H7NF 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) (n 2) 2 D-C73C/C80C D-H7C 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6) (n 2) 2 D-B54/B64 D-G5NTL 15 + 50 10 15 75 75 + 55 (n 2) (n = 2, 4, 6) (n 2) 2 20 + 50 D-B59W

Compact Cylinder

A B C D A B C D B D (2) (2) (2) (2) (2) (2) (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 View from piston rod end 25 C 32 Mounting the D-P3DW on a 20 to 25 port surface interferes with the fitting, so it needs to be mounted on a place other than the port surface.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage