CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

LJ1H

screw Rolled ball screw Slide screw 12 10 20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options

10

1 2 52.5 55 57.5 57.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 47.5 50 52.5 52.5 36 (41.5) 47 (55) 51.5 (59.5) 55 3 ( ): Denotes the Normally Open (N.O.) dimensions.

Table of Contents

Refer to pages 12-15-3 to 12-15-4 for Safety Instructions and Common Precautions on the product mentioned in this catalog, and refer to pages 12-1-4 to 12-1-6 for Precautions on every series.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Clamp Cylinder with Lock

1 o i w q $7 $8 @4 @3 @5 @1 t 40 Description Component Parts No. 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 Qty 1 1 1 1 1 1 1 1 1 1 1 2 1 4 1 1 1 1 1 2 2 4(5) 1 2 Note Zinc chromated Zinc chromated Zinc chromated Material Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy Copper alloy

Digital Flow Switches

B 82 Sensor unit Display unit (PF2A30/31) 23 60 1.6 48.2 Brown 1 2 6 Main circuit Main circuit White 2 4 8 NC + Black Switch output 12 to 24 VDC 4 3 7 34 54 44 Blue 3 1 5 PF2A5Sensor unit Display unit (PF2A30/31) 24 2-Port size 4-4.5 40 50 Brown 1 2 6 Analog output Main circuit Main circuit 4 8 + Load 2 Switch output 12 to 24 VDC White 4 3 7 Black (44.2) A 3 1 5 Blue Load is an analog input

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

21

2A 2B 2C 3 4 5 6 7 8 9 10 11 12 13 14 Anodized Anodized Anodized Anodized Chromated Hard chrome plated 1.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

5 V, 12 V M9NW V V V v v IC circuit 3-wire (PNP) M9PW V V V v v 2-wire 12 V M9BW V V V v v Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PA*1 v v V v v 2-wire 12 V M9BA*1 v v V v v Water-resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 V V IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 V V V V Relay, PLC

ISO Cylinder

GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D

Table of Contents

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

Air Fittings & Tubing

3.4 16 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 X 0.8 M6 X 1.0 3.4 3.4 27.5 8 8 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 10 1 4 18 3 8 22 26 28 37 39 41 1 8 1 4 20.5 18.5 8 12 15.2 19.7 19.7 3 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1 8 1 4 17 18.5 24 21 17 30.9 23.2 10 3 8 1 2 22 1 4 17 20.9 17 25 22 12 3 8 1 2 3 8 1 2 44.5 35.1 22

SMC

K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40

Compact Cylinder

22 26 32.5 38 46.5 56.5 72 89 22 22 24.5 26 31 31 38.5 45 7 7 7 10 10 10 12 14.5 6.6 6.6 7 9 9 9 12 14 27 29 33.5 38 45 50 63 74 4 4 4 4 5 5 6 6 2.8 2.8 5 5 6 6 8 8 22 26 32 36 45 50 63 75 36 40 46 52 64 74 96 116 8 8 10 10 12 12 16 16 22 26 32.5 38 46.5 56.5 72 89 8 10 15 17.5 20 22.5 38 38 50 55 70 80 100 120 16 16 16 18 21 21 26 27 7 7 7 9 9 9 11 13 55 60 64 72 90 100 126 150 M5 M5

CM2

5 5 24 M20 X 1.5 18 8 28 12 15.5 8 M8 X 1.25 20 15 12 13 20 8 41 20 1 to 300 17 6 5.5 30 M26 X 1.5 22 10 33.5 12 19.5 8 M10 X 1.25 22 15 12 13 25 8 45 26 34.5 1 to 300 17 6 5.5 M26 X 1.5 22 12 37.5 15 19.5 10 M10 X 1.25 27 15 20 13 32 8 45 26 21.5 42.5 1 to 300 22 8 7 M32 X 2 24 14 46.5 15 21 10 M14 X 1.5 33 20 16 40 11 50 32 With rod boot h Symbol Bore S U Z ZZ P 1/8 1/8 1/8 1/4 RR Stroke

7

W) Note 1) Power consumption (W) Note 1) VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 9 100 9 100 12 100 12 100 15 100 15 100 Note 1) Power consumption: The value at ambient temperature of 20C and when the rated voltage is applied.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1.75 depth 14 98 117 142 172 17 19.5 22.5 28 13 14 18 18 13.5 14.5 15.5 16 12 12 12 12 1 8 5 0 0.030 156 (189) 175 (213.5) 199 (243) 259 (325) 1 8 6 0 0.030 6 0 0.030 8 0 0.036 1 4 3 8 Single shaft with four chamfers: CDRA1BX Double shaft key: CDRA1BY Double shaft with four chamfers: CDRA1BZ Note) Other dimensions are the same as the single shaft.