Guide Cylinder Series MGG

Bore size (mm) Stroke range (mm) S A AA AB AG AH AI AJ AL AP B I J K L M N O P T U V AK 20 25 32 40 50 6.6 75, 100, 125, 150, 200 90 11 11 112 125 82 95 9 25 108 30 55 60 80 25 45 1/8 26 12 82 48 M6 x 1 depth 9 9 100 14 13 134 150 92 108 9 30 130 35 65 70 100 35 54 1/8 31 13 100 57 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 9 120 14 16 134 150 102 118 9 35 135 40 73 80 106 35 60 1/8 38

Electric Slide Tables

Description Material Note 1 2 3 4 5 6 7 8 9 10 11 12 No.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

dimensions AXT100-FC1 2 3 1 11 VZ1000 Refer to the table below for dimension L.

AS

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

0.55

Built-in strainer 7 Pilot valve assembly HNBR DXT031-30-11 DXT156-9-8 8 Gasket 1/4: VF5000-71-1; 3/8: VF5000-71-2; 1/2: VF5000-71-3; 9 1/4: VF3000-71-1; 3/8: VF3000-71-2; Aluminum die-casted Sub-plate Caution Round head combination screw (1 pc.) DXT031-44-1 Tightening Torque for Mounting Valve For mounting valve (M4 x 39.5, With spring washer) Hexagon socket head cap screw (1 pc.)

Air Cylinder

S 1 pc. n n pcs.

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

0.4

Hirose Electric Co., Ltd. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 47.04 Terminal no. Note 1) Types with 15 pins are also available. Refer to page 55 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 8 6 2 (With stroke adjuster at extension end) 5 (With stroke adjuster at retraction end) 30 30 76 46 73 58 FF 22.5 5H9 ( ) depth 5 +0.030 0 F 25 +0.030 0 5H9 ( ) depth 5 N 1 x F 2 51 2 x M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN 1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 ( ) depth 5 +0.030 0 30 1.5 NN x M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 ( )

smcmaintenancepartslist

GB2-10AS 1 Pressure gauge cover 10 ARG30P-400S ARG40P-400S ARG20P-400S PC 1 Clip 11 ARG30P-420S ARG40P-420S ARG20P-420S Stainless steel 1 Note 1) Including O-ring.

CQM

-1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

One-touch Fittings

13.3 3.4 1 1/4 5/16 KQ2N07-09 41.5 13.3 13.3 4.6 1 3/8 KQ2N07-11 45 15.6 13.3 4.6 1 5/16 3/8 KQ2N09-11 46.5 15.6 14.2 6 1.8 1/2 KQ2N09-13 47.5 17 14.2 6 2.6 3/8 1/2 KQ2N11-13 50 17 15.6 7 3.2 Color Cap: KQ2C Applicable tubing Applicable tubing O.D.

2–4

Symbol A B W A B W A B W HS 16.5 18.5 22 24 26.5 30 36 12 16 20 25 32 40 50 5.5 6 2.5 0.5 1 -1.5 -4.5 14.5 15 11.5 9.5 10 7.5 4.5 1.5 (4) 2 (4.5) -1.5 (1) -3.5 (-1) -3 (-0.5) -5.5 (-3) -8.5 (-6.5) 4.5 4 7.5 9.5 9 11.5 14.5 3.5 3 6.5 8.5 8 10.5 13.5 0 0 3.5 5.5 5 7.5 10.5 5.5 6 10 11 12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Bore size (mm) The dimension inside ( ) is for D-A93.

High Power Cylinder Series RHC

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm

Aluminum High Vacuum Angle Valve

12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

•

1/2 98 11 0 222 ;'4(1' 1-7 , . . -'1:5 ' 27 " "M30x l .S 30.5 I 112 98 11 0 228 e 75 40 133 1~ stroke 245 75 75 40 133 I!> S1rot<.e 251 160 20 17 34 M36 x 1.5 34.5 I 314 106 120 246 ~ The minimum stroke wnh roo t'

CP95

6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-13-11 11 Series CP95 Dimensions: Cylinder Mounting Accessory DS and ES [First angle projection] Mounting style (DS) Bore size (mm) E B1 B2 B3 TG1 T I2 FL d2 d3 CN R H SR (max) d1 I1 (min) 32 5 5.5 30 10.5 6.6 11 14 34 3.3 3 22 10 17 45 10 32.5 40 5 5.5 35 11 6.6 13 16 40 4.3 4 25 12 20 55 10 38 50 5 6.5

CP95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66

CG1

69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5

Digital Flow Switches

output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (4 to 20 mA) Symbol 3000 6000 12000 10 14 20 1 11/2 2 PF2A703H PF2A706H PF2A712H Switching of switch output and accumulated pulse output is possible with NPN or PNP open collector outputs.