MGG

Other Warning 1. Consult SMC concerning water resistance, flexibility of lead wires and usage at welding sites, etc. 55 Series MGG Specific Product Precautions 1 Be sure to read before handling. Refer to pages 49 through 55 for safety instructions, actuator precautions and auto switch precautions. Mounting and Adjustment Warning Caution 1.

Series 10-SV ® EX500 Decentralized Serial Wiring

External pilot type (R) X, PE port sizes are 4 (metric), 5/32" (inch) for the 10-SV1000/2000 series and 6 (metric), 1/4" (inch) for the 10-SV3000/4000 series. 183

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

MXS

0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16

CV/MVGQ

, 16 D-A59W n (Same side) 90 100 110 120 15 1 2 (Different sides, Same side), 1 25 110 120 130 140 D-F5NTL n = 2, 4, 6, 8 25 + 55 (n 2) 2 110 + 55 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 120 + 55 (n 4) 2 n = 4, 8, 12, 16 130 + 55 (n 4) 2 140 + 55 (n 4) 2 n = 4, 8, 12, 16 n (Same side) 15 75 90 90 100 100 110 110 Different sides 2 D-B5/B64 D-G5/K59 D-G5W D-K59W D-G59F D-G5NTL Same side

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

2–4

70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

One-touch fitting for 10 SV2000 SV2000 One-touch fitting for 6 One-touch fitting for 1/4" Protocol type SI unit Symbol One-touch fitting for 8 One-touch fitting for 5/16" DeviceNet PROFIBUS DP CC-Link EtherNet/IP One-touch fitting for 6 One-touch fitting for 1/4" One-touch fitting for 3/8" One-touch fitting for 12 SV3000 SV3000 One-touch fitting for 8 One-touch fitting for 5/16" EX500-S001

Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

AC

270 440 590 960 M5 X 0.8 IR 1 2 1 8 3 4 1 4 VEX 3 8 1 4 1 2 1 2 3 4 AW 1 1 1 2 1 4 1 2 AMR Operating air quality Caution AWM Refer to p.5.2-1 in Best Pneumatics 1 for details.

KQ2

48.6 15 16 8 9.8 13.4 9.8 13.4 15.4 10.4 4 2.9 2.9 1 8 M5 x 0.8 22.5 15 22.5 25 24.5 25.5 30 29.5 30 32 33.5 40.5 41.5 D1 3.8 3.8 L3 L2 8 6 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 12.8 17 5.9 7.5 Applicable tubing 10 D2 M5 x 0.8 17.6 28.5 11.2 16 12 K 15.2 8 18.5 20.6 27.5 14.3 20.5 14 M 31 20.6 21 20.3 27 18.5 10 14 H 34 25.2 12 17 20.9 22 30.8 39 1 2 3 8 1 2 (55) (65) 55 78 21 16 25 39

Compact 5-Port Solenoid Valve

A-w Connector gasket SX3000-146-2 Supplied individually A-q Manifold block assembly A-e Manifold block gasket JSY11M-9P-2 JSY31M-9P-2 JSY51M-9P-2 Supplied individually A-r Tie-rod for additional stations*1 JSY11M-49P-1-1-A (6.5 mm pitch) JSY11M-49P-2-1-A (9 mm pitch) JSY31M-49P-1-1-A (11.5 mm pitch) SV2000-55-2A-A (16 mm pitch) 3 pcs. supplied Plug-in Common Dimensions Made to Order t Tie-rod

JA/JAH/JB/JS

As a rule, after the rod bottoms out, back off 1 to 2 turns.

JA/JAH/JB/JS

As a rule, after the rod bottoms out, back off 1 to 2 turns.

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1