16 114 65 M6 x 1 depth 13 9 140 17 19 170 186 134 150 12 45 170 50 93 95 134 50 75 1/8 47 20 138 84 M8 x 1.25 depth 16 11 170 23 21 190 210 140 160 12 50 194 55 103 115 152 56 90 1/4 58 25 164 94 M10 x 1.5 depth 21 Note) Rc, NPT and G ports can be selected.
Hirose Electric Co., Ltd. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 47.04 Terminal no. Note 1) Types with 15 pins are also available. Refer to page 55 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details.
Note VF3000 VF5000 Refer to How to Order Pilot Valve Assembly on page 19. Built-in strainer 7 Pilot valve assembly HNBR DXT031-30-11 DXT156-9-8 8 Gasket 1/4: VF5000-71-1; 3/8: VF5000-71-2; 1/2: VF5000-71-3; 9 1/4: VF3000-71-1; 3/8: VF3000-71-2; Aluminum die-casted Sub-plate Caution Round head combination screw (1 pc.)
1 60 80 95 105 110 130 D-A5m D-A6m n 60 + 55 (n 4) /2 n = 4, 8, 12, 16 80 + 55 (n 4) /2 n = 4, 8, 12, 16 95 + 55 (n 4) /2 n = 4, 8, 12, 16 105 + 55 (n 4) /2 n = 4, 8, 12, 16 110 + 55 (n 4) /2 n = 4, 8, 12, 16 130 + 55 (n 4) /2 n = 4, 8, 12, 16 1 60 70 85 105 110 115 140 2 (Different surfaces, Same surface) 60 70 85 105 110 115 140 D-A59W n 60 + 55 (n 4) /2 n = 4, 8, 12, 16 70 + 55
M30 x 1.5 35 1/2 98 110 337 to 1400 15 31 19 M30 x 1.5 35 1/2 98 8 110 337 to 1400 17 36 22 M36 x 1.5 39 3/4 106 9 120 380 to 1400 For long strokes (mm) With rod boot (mm) With rod boot Without rod boot Stroke range (mm) Stroke range (mm) RT Bore size (mm) 125 140 160 Bore size (mm) 125 140 160 l ZZ1 h RY M l ZZ1 ZZ 337 1/5 stroke 30 to 1400 133 371 1401 to 1600 36 164 19 360 1/5 stroke
4 14 1 4 KGE04-02 17 Connection thread 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3
67.5 71.5 78 83 88 102.5 120 (mm) A Bore size (mm) B FB Over 100mm stroke 30mm stroke or less Over 30mm to 100mm stroke 68 78 93 98.5 117 117.5 56 62 76 82.5 12 16 20 25 55 59 66 66.5 18 18 19 19 2.
Use bolts that are between the maximum and minimum screw-in depths in length. 46 Series LESH Dimensions: In-line Motor Type/D Type LESH25D depth 6 +0.03 +0.01 6 2 x M6 x 1 x 14 Manual override screw Note 4) depth 6 6 +0.03 +0.01 7 D x M6 x 1 x 8 Note 5) 23.5 23.5 61 44 36 (D/2 1) x B B 57 55 0.5 30.5 650.3 29 Table operating range Note 1) For dustproof specification [1] 1 E 14 Stroke end
{15.3kgf/cm2} Maximum operating pressure 1.0MPa {10.2kgf/cm2} Minimum operating pressure 0.05MPa {0.5kgf/cm2} Piston force Up to 7500N Rod width across flats [mm] 1) 12.2 14.2 19 19 23 27 Piston rod thread M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 Ports G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 Cushioning stroke [mm] 19 19 24 24 30 30 Mounting position Any Standard strokes [mm] 25
7 9 55 33 72 12 8 53 8 9 40 7.5 M14 x 1.5 13 36 21 40 34 f8 to 800 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 M16 x 1.5 19 44 21 (mm) Bore size (mm) P NB NC NN S ZZ 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 M30 x 1.5 19 15 1/8 87 159 40 1/4 M33 x 2 24 21 108 183 50 Series CHM Dimensions Rear flange type: CHMG GA N Rc P 2-NN Width across flats B2 H2 GB N Rc
depth 8 5.5 10 3.5 M10 x 1.25 35.5 85 125 40 to 800 1/8 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 93 143 50 to 1200 1/4 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 167 109 63 to 1200 1/4 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 167 109 80 to 1400
T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.
F G J V , w K I KA l w LH LS 43 15 M14 x 1.5 15 17 15 27 I 19 85 188 15 I' 27 I Hi 100 188 17 I 34 I 19 106 206 43 15 M14 x 1.S ., 15' 1?
st to 100 st 68 78 93 98.5 Bore size (mm) FB B Over 100 st 117 117.5 30 st or less 56 62 76 82.5 18 18 19 19 55 59 66 66.5 12 16 20 25 2.
Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35
/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller