CNS

25 135 125 (n 2) 2 (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 n = 4, 8, 12, 16 n = 2, 4, 6, 8 n (Same side) n = 4, 8, 12, 16 2 (Different sides, Same side), 1 155 35 145 D-F5NTL (n 4) 2 (n 4) 2 (n 2) 2 155 + 55 35 + 55 145 + 55 n (Same side) n = 4, 8, 12, 16 n = 2, 4, 6, 8 n = 4, 8, 12, 16 2 Different sides 110 35 Same side 110 100 D-A3 D-G39 D-K39 Different sides 110 + 30 (n 2) n =

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

Hydraulic Cylinders

across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J Y X Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 12 M6 x 1 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 12 M6 x 1 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 16 M8 x 1.25 40 69 55 14 22.4 19 16 M12 x 1.75 15 8 10 20 M10 x 1.5 50 75 60 15 28 24 21 M16 x 2 20 9.5

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

VQZ1000/2000/3000

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

Cylinder with Lock Series CLS

(same side) 25 + 55 125 + 55 135 + 55 BT-12 BT-12 BT-16 F5W, J59W, F5BAL, F5F n = 2, 4, 6, 8 ... n = 4, 8, 12, 16 ... n = 4, 8, 12, 16 ... 2pcs. (different side, same side), 1pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 35 145 155 BS1-125 BS1-140 BS1-160 D-A3, A4, G39, K39 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

F

12 KQU10-U04 22 18.5 59 18.5 51 21 40 5/16 1/4 KQU09-U04 17.46 15.2 52 15.2 46 18.5 6 12 14 KQU12-U02 22 20.9 61 20.9 55 22 57.4 5/16 3/8 KQU09-U02 17.46 15.2 51.5 15.2 45.5 18.5 6 12 38 KQU12-U03 22 20.9 61 20.9 55 22 57.4 3/8 1/4 KQU11-U02 19.05 17.9 56.5 17.9 50.5 21 7 12 12 KQU12-U04 22 20.9 62.5 20.9 54.5 22 57.4 3/8 3/8 KQU11-U03 19.05 17.9 56.5 17.9 50.5 21 7 3/8 1/2 KQU11-U04 22.23

Shock Absorbers and Rate Controls

(anilonl Pflt20tt -1, -2, -3 5.525.t2 N/A (lf)l/a.12 Ut{F 1T l . t 3 l.?0 3.11 .21 /A N/A t.12. .63 Prnt 25tI -2, -3 5.525.72N/A (lFllYB-12 UllF .38 t.l3 l.?0 3.41 N/A N/A 1.25 ,oJ Pfl22otf -1, -2, .3 8.14 8.34 rya(rr)r r4-l? utllF .38 l,13 l.?0 i.03 L I /A r{/ALl2 .tti, Pm225tI t, -2, -3 8 . 1 4 8.34N/A llF) lYo-12 UNt .38 l.t 3 t.?

70astamb1

6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5

mb1

16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 135 139 156 156 190 190 46 52 65 75 95 114 22 30 35 35 40 40 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 10

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

7

Description Material Qty Note 18 19 20 21 22 23 24 25 26 27 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet holder Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) C B CV DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q GC 84.5 1.5 1.5 2.5 2.5 12 12 16 16 10 10 12 12 48 54 64 78 12.5 9 12.5 112 120 148 162 M6 24 27 32 39 M8 x 1.25 20 20 22 22 M8 x 1.25 6.6 6.6 8.6 8.6 15 34 38 47 55 62.5 24 27 32 39 11 11 14 14 30 30 40 50 16 16 20 20 34 40 46 58 7.5 7.5 9 9 Rc 1/8 Rc 1/

KR

10 28.4 28.4 21 1 2 KAY10-U04 30 49 51 31 35 22 1 4 3 8 KAY12-U02 KAY12-U03 49.5 50.5 27 28 17 20.9 17 12 28.5 45.4 45.4 22 1 2 KAY12-U04 31 51.5 22 55 Reference dimensions after Uni thread installation.