LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

New

VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A Air operated type VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A Solenoid valve type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring

VZ100/300/500

Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Made to Order Specifications (For details, refer to page 4-6-46.)

Table of Contents

ZS-20-5A-50 . 1 pc.

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

XL-OMY0002

9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

3 Port Solenoid Valve

V100-31-1A Part No. V100-77-1A Round head combination screw Place the notch mark on a blank plate to the port 2 side when assembling.

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NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

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Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

Manifold Specifications

Internal wiring 1 3 5 6 M5 C4 C6 VZ323MOZApplicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note ) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

3 Port Air Operated Valve Series SYJA300 1

Free 300/50 VPA342: VP300-27-1A VPA542: VP500-27-1A VPA742: VP700-27-1A Bracket (With screw) Option N.C. N.O. Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

0.55

Body Ported 0.5 MPa = 73 psi Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 1000 Perpendicular, upward actuation Horizontal

Table of Contents

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.