SMC

/m3) Standard product 105 105 105 Standard product 104 104 104 12-CY1B Standard product 103 103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

Round Type Hydraulic Cylinder

to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

end) I 5.5 6 12 Operating port 2 x M5 x 0.8 11 3 5H9 ( ) depth 4 +0.030 0 2 x M5 x 0.8 thread depth 5.5 GA HA B A 5H9 ( ) depth 4 +0.030 0 NN x M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN 1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39

KJ

41.5 42 46.5 47 48 34.5 36.5 34.5 37 35 40 36 41 41.5 43.5 45.5 46 1 8 17.5 2.5 15.5 10 9.6 Applicable tubing 1 4 1 8 5 32 18 3 16 10.4 10 1 4 1 8 1 4 3 16 11.4 19.5 3.5 16.5 10 1 8 1 4 3 8 13.2 20.5 4.6 17 1 4 10 1 8 1 4 3 8 5 16 15.2 23.5 6 18.5 12 Connection thread 97 55 59 55.5 55 55.5 54.5 52 52.5 1 4 17.46 3 8 1 2 3 8 25.5 7 17.9 21 17 22.23 64 64 1 4 9 17.46 54 3 8 1 2 21.7 28 22

VFS

Material Description VFS2000-17-1 VFS2120 Refer to How to Order Pilot Valve Assembly on page 3-8-18.

Hydraulic Cylinders

8 16.5 6 25 M10 x 1.5 9.5 depth 5.4 53 45 8 14 12 12 6 36 5.5 49 1/8 17 8 32 M12 x 1.75 11 depth 6.5 61 51 10 18 14 15 7 47 6.6 63 1/4 19.5 10 40 M16 x 2 14 depth 8.6 65 55 10 22.4 19 20 7 52 9 71 1/4 20.5 10 50 M20 x 2.5 17.5 depth 10.8 71 60 11 28 24 24 8 58 11 81 1/4 22 10 63 M27 x 3 20 depth 13 80 67 13 35.5 30 33 9 69 13 97 1/4 25.5 10 80 M30 x 3.5 23 depth 15.2 95 78 17 45 41 36 14

Profile Design ISO/VDMA Air Cylinder Series CP95

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Stability of suction position,

ZP3EA-PT2-B8 [Weight: 14 g] ZP3EA-PT2-B10 [Weight: 12.6 g] A 17 Width across flats 14 A 17 Width across flats 14 8 17 8 17 B B 1 1 23.5 31.6 Applicable pad part no. ZP3E-32UM ZP3E-40UM ZP3E-32BM ZP3E-40BM Dimensions Dimensions Part no. A B ZP3EA-PT1-B8 M8 x 1.25 9.5 ZP3EA-PT1-B10 M10 x 1.5 13 Part no. A B ZP3EA-PT2-B8 M8 x 1.25 9.5 ZP3EA-PT2-B10 M10 x 1.5 13 Applicable pad part no.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

17 17 17 15 45.5 45.5 4-Rc(PT)1/8 (Piping port) 24 24 32 4-Rc(PT)1/8 (Piping port) 32 [ ] for AC Other dimensions are the same as the grommet style

7ND9071en

(Imax) Po Pi (Pmax) 15 L 15 16 L+ L+ 16 17 L L+ 18 Notes 1.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

/4" 36.5 20 42.5 23 19 17 3/8" 36 3/8" 46 24 52 28 23 21 1/2" 44 1/2" 55 29 62.5 39 32 26 3/4" 53.5 3/4" 72 39.5 81 49 46 36 1" 71 17-5-100 5 Series LQ1 High Purity Fluoropolymer Fittings Female Connector: LQ1H-F Metric sizes Connection threads Rc/NPT Model Applicable tubing O.D.

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Square Tube Type Air Cylinder Series MB1

8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type

CXS

Table 1.

VM

66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

MG

@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

High Purity Fluoropolymer

Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings