5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

Plug-in Unit

mA), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

VQ7-6/7-8

VDC, 24 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Rubber) 3 position closed center Class B or equivalent Coil insulation type (A) 4 (B) 2 (A) 4 (B) 2 1 W DC (42 mA) 24 VDC 1 W DC (83 mA) 12 VDC Power consumption (Current) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC 1 (P) 5 (R1) 3 (

VQ7-6/7-8

VDC, 24 VDC, 100 VAC, 110 VAC, 200 VAC, 220 VAC (50/60 Hz) Coil rated voltage 10% of rated voltage Allowable voltage fluctuation 2 position double (Rubber) 3 position closed center Class B or equivalent Coil insulation type (A) 4 (B) 2 (A) 4 (B) 2 1 W DC (42 mA) 24 VDC 1 W DC (83 mA) 12 VDC Power consumption (Current) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC 1 (P) 5 (R1) 3 (

Compact Manifold Regulator

Knob Position AR425 to 935 Symbol Position Knob position Knob position Knob position Front Top Bottom 56 A B C Top Front Bottom ARX 84 42 84 70 70 AMR P 26 (Max.28) 12 U S SMC SMC H 12 SMC L O C K ARM ARM SMC 28.5 6 51.5 ARP 80 51.5 15 13 OUT IN 3 28 IR-A 13 OUT IN 15 13 OUT IN 3 3 IR 3. IN/OUT Fitting Type 2.

Digital Pressure Switch

Incorrect operation of the internal data of the Pressure switch (Er0, Er4, Er6, Er7, Er8, Er9) System error (Er0, Er4, Er6, Er7, Er8 or Er9) is displayed. (2) Check that the power supply voltage is within the range 12 to 24 VDC 10%. (2) Supply a correct voltage of 12 to 24 VDC 10%.

0.4

Product Precautions DIN rail clamp screw Stations 1 2 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Series VQ Metal Seal/Rubber Seal Body Ported

Name Material Number VVQ1000-80A-7-2 3 Bush assembly i VVQ1000-80A-7-4 12 Clip Stainless steel o Fittings Assembly No. !0 VVQ100050A Port size C3: Applicable tube 3.2 C4: Applicable tube 4 C6 : Applicable tube 6 (1) Note 1) Note 2) Standard SUP/EXH port is C6. 10 pcs. per one set. 1.10-109

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

2 3 4 5 6 7 8 9 U side VQC 3 m SQ SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 VQ0 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 VQ4 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ Cylinder port fitting

42

Maximum stations are 12.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

VQ20/30

Coil voltage One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 1 2 3 5 6 9 (1) 100 VAC (50/60 Hz) 200 VAC 110 VAC 24 VDC 12 VDC Other LQ Valve Type (A) 2 N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

-35 VQZ100/200/300 Base Mounted VQZ300 VV3QZ35C Station Port size (35) (5.5) 2-4.5 Mounting holes DIN rail clamp screw 42 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 Grommet (G) 34 (7.5) (3) 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 U side 02: Rc(PT)1/4 n A 2 A 2 Manual override 5 4 (L4) 3 (L3) L2 L1 2 P=20 P=20 19.5 1 23 9 Station D side 50 29.5 75.5 300 3.8 (

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Secondary Batteries

and up) SUS304 (6 and 8) Aluminum (12 and up) SUS304 (6 and 8) Aluminum (12 and up) Material Piston Anodized (12 and up) Chromate (12 and up) Electroless Ni-plated (6 and 8) Chromate (12 and up) Treatment SUS304 SUS303, SUS304 Iron SUS304 SUS303 Iron Brass Electroless Ni-plated Brass Electroless Ni-plated Iron Material Air slide table MXQ Piston spacer Treatment Material Packing support

Compact manifold regulator ARM5 Series

Size 4 6 5/32 1/4 Size 6 8 1/4 5/16 Symbol C4 C6 N3 N7 Symbol C6 C8 N7 N9 Straight type Elbow type Straight type Elbow type V R W X S T Y U One-touch fittings for regulator block One-touch fittings for centralized supply block Fitting size Elbow W Elbow X Elbow Y Straight V Fitting size Elbow S Elbow T Elbow U Straight R 4, 5/32 2.5 6 11 35.5 4, 5/32 6 3 6.5 11 36 6 3 12.5 19 35.5 1/4 6.5

VZ5000

connector (L) VZ5220-L-01 M plug connector (M) VZ5220-M-01 (Lead wire length) 300 (Lead wire length) 300 : With light/surge voltage suppressor DIN terminal (D) VZ5220-D-01 Built-in One-touch fittings VZ5220--C6 C8 C6: MAX. 6 C8: MAX. 6.5 MAX. 10 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-58 5 Port Solenoid Valve Body Ported

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 44 27 2 63 46 3 82 65 4 101 84 5 120 103 6 139 122 7 158 141 8 177 160 9 196 179 10 215 198 11 234 217 12 253 236 13 272 255 14 291 274 15 310 293 16 329 312 17 348 331 18 367 350 19 386 369 20 405 388 L1 L2 1427 VK3000 Series Type 42 Manifold/Base mounted (Side ported) VV5K3-42Station -01 Grommet: G DIN terminal: D Applicable

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3