HRX-OM-O021

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-R005

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

SV

SV100 ANA1 -C08 T0604 SV200 ANA1 -C10 T0806 200 CM2 32 400 MB 50 300 150 Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 AS3201F -02-08 AS3000-02 200 100 100 50 0 0 200 CM2 40 400 MB 63 150 300 Stroke (mm) Stroke (mm) AS2201F -02-06 AS2200-02 100 AS4000-03 200 50 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700

LEC-OM02704CN

3.2.5 38 3.3 39 3.3.1 39 3.3.2 39 3.4 3-10 3.5 CPU( 3-10 3.5.1 3-10 3.5.2 3-14 3.5.3 3-23 3.5.4 (RWwn2RWwn3) 3-24 3.5.5 (RWrn2) 3-32 3.5.6 CN6 3-33 3.6 3-35 3.6.1 3-35 3.6.2 3-37 3.6.3 3-39 1 - 3.7 3-42 3.7.1 3-42 3.7.2 3-45 3.7.3 3-46 3.7.4 3-47 3.7.5 3-50 3.7.6 3-53 3.8 3-56 3.8.1 1 3-56 3.8.2 1 3-57 3.8.3 2 3-59 3.8.4 2 3-60 4 414-40 4.1 43

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E Applicable size Y200-D 3.2 35 13.2 42 0.6 JSXM20 Y300-D 4.2 43 16.2 53 JSXM30 Y400-D 5.2 51 19.2 71 JSXM40 Part no.

Compact 5-Port Solenoid Valve

JJ5SY5-10TC JSY5000 Type 10/Side Ported Plug-in Connector Connecting Base: Spring Type Terminal Block Box p. 43 ZK2mA Vacuum Unit ZK2 Combination Manifold: Ejector Unit p. 122 ZZK2mA Vacuum Unit ZK2 Combination Manifold: Ejector Manifold p. 121 141 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q E D C Y 2.5 A B Dimensions A (mm) B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by tube diameter (mm) Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S 40, 50 12.8 26.2 11 Lateral Vacuum Entry Series ZPR With Buffer How to Order ZPR 10 F GN J 30 06 A10 Mounting thread diameter/male thread (Refer to Table 1 for applications

13

06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5

FILTER REGULATOR

SPECIFICATIONS Model AW20-B AW30-B AW40-B AW40-06-B AW60-B Port size 1/81/4 1/43/8 1/43/81/2 3/4 13/4 Gauge port size Note1) 1/8 Air Fluid Ambient and fluid -5 to 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa Set pressure range Filtration 5 m Drain capacity cm3 8 25 45 Polycarbonate Bowl material Semi-standard Bowl guard Standard

FILTER REGULATOR

SPECIFICATIONS Model AW20K-B AW30K-B AW40K-B AW40K-06-B AW60K-B Port size 1/81/4 1/43/8 1/43/81/2 3/4 13/4 Gauge port size Note1) 1/8 Air Fluid Ambient and fluid -5 to 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Set pressure range Note2) 0.05 to 0.85 MPa Filtration 5 m Drain capacity cm3 8 25 45 Polycarbonate Bowl material Semi-standard Bowl

AIR FILTER

SPECIFICATIONS Model AF10-A AF20-A AF30-A AF40-A AF40-06-A AF50-A AF60-A Port size M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 Air Fluid Ambient and fluid -5 60 (Should be no freezing) temperature 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 5 m Filtration Drain capacity cm3 2.5 8 25 45 Polycarbonate Bowl material Semi-standard Bowl guard Standard Polycarbonate Steel plate Mass kg 0.06

HAW

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36

LUBRICATOR

SPECIFICATIONS Model AL10-A AL20-A AL30-A AL40-A AL40-06-A AL50-A AL60-A Port size M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 Air Fluid 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure Ambient and fluid temperature -5 60 (Should be no freezing) 1/430 3/840 1/250 15 Min. operating flow Note1) L/min(ANR) 50 1/430 3/840 4 190 220 Bowl capacity cm3 7 25 55 135 Class 1 turbine oil (ISO VG32)

MIST SEPARATOR

SPECIFICATIONS Model AFM20-A AFM30-A AFM40-A AFM40-06-A Port size 1/81/4 1/43/8 1/43/81/2 3/4 Fluid Air Ambient and fluid -5 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Min. operating pressure 0.05 MPa 0.3 m (FILTRATION EFECIENCY 99.9%) Filtration MAX.1.0 mg/m3(ANR)(0.008ppm) Note1 Note2 Oil mist density at the out side 1100 Flow rateLminANR

MICRO MIST SEPARATOR

SPECIFICATIONS Model AFD20-A AFD30-A AFD40-A AFD40-06-A Port size 1/81/4 1/43/8 1/43/81/2 3/4 Fluid Air Ambient and fluid -5 60 (Should be no freezing) temperature Proof pressure Max. operating pressure 1.5 MPa 1.0 MPa Min. operating pressure 0.05 MPa 0.01 m (FILTRATION EFECIENCY 99.9%) Filtration Oil mist density at the out side MAX.1.0 mg/m3(ANR)(Before saturated with oil 0.01 mg/m3(ANR

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS1002FS-23 3.2 8.4 6.7 9.5 3.3 5.5 9.4 10 36.6 5.1 11.8 36.4 33.9 11 15.4 8.8 10.1 13.5 13.6 15.1 5.5 9.6 5.2 AS1002FS-04 4 9.3 7.7 10 37.6 5.5 AS1002FS-06 6 11.6 9.7 12 40.1 6.1 12.8 37.4 34.9 12.3 6.6 AS2002FS-04 4 9.3 7.7 10 3.3 5.5 12 12 41.3 6.3 13.4 44.5 43 12.6 17 10.5 12.3 13.5 20 21.5 6.5 15 9.5 AS2002FS-06 6 11.6 9.7 12 43.1 10.4 AS2052FS-06 6 12.8 11.5 4.3 7.8 13 16 54.2 7.6

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

T P M L2 L2 L1 L1 H E E R 14 S 10 Q 43 W 42 Model LQ3F2B LQ3F4B LQ3F4C LQ3F5A LQ3F5B LQ3F5C LQ3F6B LQ3F6C LQ3F6D 17 16 16 32.1 30.9 56.1 54.9 20 58 58 69 53 58 69 58 69 84 14 24.5 14 10 22.5 24 49 46.8 73 70.8 29 22 43 42 12 80 77.3 10 26.5 24 32 58 55.3 37 30 43 42 14 82 79.3 48 47 92.5 88.2 10 16 30 26 41 68.5 64.2 49 36 56 55 94.5 90.2 348 Union Flange Series LQ3 Options Blanking plug

Title not found

D 43 Order Made Specifications OUT SUP OUT Specifications/Content Symbol Clean room specifications 10 Copper-free specifications 20 Approx.