CL

42 48 56 10 10 10 10 3.2 3.2 4.5 4.5 16 20 22 30 5.5 5.5 6.6 6.6 28 28 28 30 25 30 35 40 MGG MGC MGF Clevis/CLG1DN CY1 Clevis Bore (mm) MY1 BZ TV TZ CZ TW L RR TX TY TE TF TH TT CDH10 20 25 32 40 8+ 0.058 0 10 + 0.058 0 12 + 0.070 0 + 0.070 0 14 29 33 40 49 42 42 48 56 44 35.8 43.4 11 13 15 18 28 28 28 30 14 16 20 22 16 20 22 30 10 10 10 10 5.5 5.5 6.6 6.6 3.2 3.2 4.5 4.5 25 30 35 40 52.5

Combination Cylinder

10 10 5.5 5.5 6.6 6.6 25 30 35 40 3.2 3.2 4.5 4.5 42 42 48 56 16 20 22 30 28 28 28 30 43.4 44 35.8 MGC 52.5 48 39.8 57.5 49.4 59.4 MGF 66 58.4 71.4 (Hole dia.)

CJ2

10 3.5 10 17.5 29.5 41.5 16 26.5 D-F7V/F7BAVL 10 16 10 16 10 16 20 23 23 26 19 22 D-F7WV 16 4 9.5 18 30 42 72 48 90 102 D-J79C 10 16 0.5 1 7 6.5 14.5 15 26.5 27 38.5 39 69 45 D-A79W D-A79W 87 99 6-3-32 33 33 Air Cylinder: Non-rotating Rod Type Double Acting, Single Rod Series CJ2K 10, 16 How to Order CJ1 Bore size Standard stroke (mm) CJP 10 16 15, 30, 45, 60, 75, 100, 125, 150 15, 30,

C85

12.8 4.5 12.8 35 23.8 5 3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head

Table of Contents

Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Torque (Nm) Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 0.09 42 2.87 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 234 27 Courtesy of Steven Engineering, Inc.-230

LVQ

Flow characteristics Av x 106m2(Cv) 4 6 8 10 12 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Orifice dia.

C85

12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8 6-11-17 Series C85 Dimensions

Table of Contents

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

0.55

-1l 3/8, 1/2 2(A) port 40 16 64 3/8, 1/2 3(R) port 24 18 67 2 x 6.2 (For mounting) NO 2A NC 53 66 12 3R NC 1P 1/8 12(PA) port 11.5 16 115.1 24 96.5 95.5 32.5 M5 x 0.8 (Breathing hole) 16 X 40 80 3/8, 1/2 1(P) port 34 3 Port/Air Operated Valve Manifold Common Exhaust Type 41 / Individual Exhaust Type 42 Series VPA300/500/700 How to Order Manifold VV3PA 3 1 41 04 02 Type 41/Common exhaust Series

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

/5000/7000 Type 42 10-SY3000: 10-SS5Y3-42Stations C4, N3 C6, N7 [ ]: AC Grommet (G) 1/8 (P, EA, EB port) (Lead wire length) Approx. 300 M5 x 0.8 (External pilot port) 8 15 28 Manual override 4 x 4.5 (For mounting) 73.2 [75.4] 88.8 [93.2] EB P EA X PE 16 14.7 16 19.4 32.5 55.8 97.3 [101.7] A A A A A 24.5 16 6.6 1.9 51 B B B B B (3.2) M5 x 0.8 (Pilot EXH port)

ISO Cylinder

25 26 35 12.8 23.8 91.5 (97.5) 10 4.5 5 11 86.5 (90.5) 3.2 16 25 26 35 12.8 23.8 91.5 (95.5) 12 5.5 6 14 98 (101.5) 4 20 32 33 42 18 32 106 (109.5) 16 5.5 6 14 103 (106.5) 129 (132.5) 155 (158.5) 4 20 32 33 42 18 32 111 (114.5) 137 (140.5) 163 (166.5) 20 6.6 8 17 121 146 171 5 25 40 42 54 19 36 128 153 178 25 6.6 8 17 122.5 147.5 172.5 5 25 40 42 54 23 40 133.5 158.5 183.5 ( ):

LX

Motor side 16 pulse End side 1 A Parameter no.

Fluoropolymer Piping Equipment

Inch Size Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F2B 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F4B 24.5 22.5 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F4C 69 LQ3F5A 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F5B 82 79.3 58 14 LQ3F5C 69 LQ3F6B 30 26 41 68.5 64.2 92.5 88.2 49 58 47 48 16 10 36 22 22 LQ3F6C 69 55 56 LQ3F6D 94.5 90.2 84

Compact Cylinder Series CQS

11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 5.5 6 10 11 9.5 9 14 16 -X Individual -X Note 1) The product is shipped out of the factory in installation state a).

CQS

switch A 40.5 41.5 51 57.5 Bore size (mm) Stroke range (mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

AC Servo Motor Driver

bits D8 K1 D4 NEG PLS processing command Decrementing upper 16 bits by 1 D4 K1 Reversing absolute position polarity Reversing polarity of lower 16 bits D3 NEG Lower 16 bits 0 D4 1 D4 K0 D3 D4 K1 (To be continued) 3 3 14 43 14.

Floating Joint

0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 30 42 42 52 52 52 56 56 70 80 80 88 116 8 9 9 13 13 13 15 15 18 24 24 24 42 19 25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41

NCG/CG1

WH Rod End Lock: -R Head End Lock: -H Bore size (mm) Bore size (mm) WH W P WA WB WH W P WA WB 20 M5 x 0.8 16 15(16) 30 M5 x 0.8 16 16 30 23 23 20 25 M5 x 0.8 16 15(16) 30 30 M5 x 0.8 16 16 25 25 25 32 Rc 1/8 16 15(16) 25 Rc 1/8 16 16 25 28.5 28.5 32 40 20 Rc 1/8 16 15(16) Rc 1/8 16 16 20 33 33 40 50 20 Rc 1/4 18 17(18) 40.5 Rc 1/4 18 18 20 40.5 50 63 47.5 20 Rc 1/4 18 17(18) Rc 1/4 18 18

F

KQR06-12 12.8 42 20 17 13.1/13.1 5/16 9.5(3/8) KQR09-11 16 45.5 25 18.5 6 8 10 KQR08-10 15.2 41 20 18.5 26.1/18 5/16 12.7(1/2) KQR09-13 16 42.5 21 18.5 6 8 12 KQR08-12 15.2 42 20 18.5 26.1/18 3/8 12.7(1/2) KQR11-13 48 44.5 22.5 21 7 10 12 KQR10-12 17 42 20 21 41.5/32.8 10 16 KQR10-16 21 50.5 26.5 21 41.5/(29.5) 12 16 KQR12-16 21 50.5 26.5 22 58.3/(46.1) Note: ( ) Dimensions are for Soft Nylon