MY1

(mm) PC 14.5 PD 32 PE 13 PF 5.5 VV 16 XX 28 YH 37.5 Z 220 ZZ PA PB PG Q PP QW QQ RR SS TT UU WW Model 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 Rc 1/16 80 60 8 264 17 51 11 16 4 16 16 16 MY1H32 15 42 13 6.5 19 32 47 280 Rc 1/16 100 80 9 322 18.5 59 11 24 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 2-d Y S R WX D Bottom ported (ZZ) (Applicable O-ring) Hole Size for Centralized

CQS

For Safety Instructions and Actuator Precautions refer to pages 7-13-3 to 7-13-6.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

Manifold Specifications

DXT192-13-3A Round head combination screw Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 M2.5 x 7 (With spring washer) Applicable base VV5Z3-40 VV5Z3-41 VV5Z3-42 VV5Z3-43 VV5Z3-41P VV5Z3-43P Blanking plate Series VZ300 Base mounted Gasket Adapter plate assembly Manifold gasket Round head combination screw Dust cap Adapter plate Adapter gasket Corresponding mark Applicable base VV5Z3-

0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

CLA

ZZ StrO ke ~ 131 71 339 65 12.5 80 ~ 148 72 358 65 14.0 81 367 P PG PH PL PW S W X V oLD LH LS LT LX LV r 40 7/16 20 27 50 30 63 % 16 31 80 37 81 51 244 43 11.2 59 F 90 58 266 52 11.2 66 ~ 'f, 106 58 290 52 11 .2 66 'I, 42 11 20 45 153 8 27 13 9 40 207 3.2 42 70 'I, 46 10 21 50 168 0 27 13 9 45 222 3.2 50 80 'I, 48.5 13 23 60 182 0 34 16 11.5 50 250 3.2 59 93 \I, 55 15 23 70 208 0 44 16

Stability of suction position,

A B ZP3EA-PT1-B8 M8 x 1.25 9.5 ZP3EA-PT1-B10 M10 x 1.5 13 Part no. A B ZP3EA-PT2-B8 M8 x 1.25 9.5 ZP3EA-PT2-B10 M10 x 1.5 13 Applicable pad part no. ZP3E-50UM ZP3E-50BM Part no. ZP3EA-PT3-B12 [Weight: 48.6 g] ZP3EA-PT3-B18 [Weight: 38.5 g] Part no.

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 26 or less 26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33 0.23 0.33 0.28 0.34 0.23 0.34 0.23 0.34 0.19 0.30 0.19 0.30 0.25 0.38 29 or less 34 or less 13 or less 13 or less 40 or less 47 or less 40 or less 47 or less 47

HRX-OM-Q026

AL47 13 Pump breaker trip AL48 Pump inverter error AL49 Air exhaust fan stoppage 14 12: Water-cooled type model does not generate this alarm. 13: Power supply "-20" specification model does not generate this alarm.

LEH_C

NO. 1 / 1) /P.39 6. 2) /P.10 2.1.1 /LEHZ /code1-193 /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) /P.42 7.3 4)() /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.52 8.3 /code1-048 / 12 RESET (40%) OFF SVON ON OFF DRV /code1-098 RESET SVRE ON SETUP ON SETOFF DRV /code1-099 RESET SETON ON /P.38 25 - No. 2 / 1)() /P.10 2.1.1 /LEHZ /P.13 2.2.1

CQS

to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 FZ FX FV FT FD 55 55 60 64 45 45 48 52 25 30 39 42 5.5 5.5 8 8 4.5 4.5 6.6 6.6 CDQSG Bore size SCQS Bore size , #4 (#4+#11+#13) (All dimensions are common between standard stroke and long stroke except "A", "B", "C", "L" and "L1".)

CXS

CXSJ6-10 10 15 19 42 52 CXSJ6-20 20 25 29 52 62 CXSJ6-30 30 35 39 62 72 CXSJ6-40 40 45 49 72 82 CXSJ6-50 50 55 59 82 92 5 Series CXSJ Dimensions: 10 Standard Piping 16 12 + ST 4-M3 x 0.5 with depth 4.5 3.5 8 7.5 2-M5 x 0.8 with depth 4 (Piping port) 28.5 8 ST 56 + ST 15 44.5 + ST 8 3.5 13 1 M5 x 0.8 x 4 (Hexagon socket head set screw) 4 16 8 + ST 4.5 4.5 M8 x 1.25 x 7.5 (Bolt holder) 1 40

Compact Cylinder with Lock Series CLQ

Joint YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 K ( across flats) YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 H (With locking) YB-08 80 16 11 38 13 52 18 depth 12 d2 d1 YB-10 100 19 14 50 17 62 21 depth 14 L UT Mass (g) Bore size (mm) C UA T1 RS T2 V W Part no. Material: Chromium molybdenum steel D(mm) YB-03 32, 40 80 9 6.5 10 18 50 Part no.

Dual Rod Cylinder Series CXSJ/CXS

side: Same) 3 8 6 22.5 22.5 2 x 2 x M5 x 0.8 thread depth 4.5 (mm) (Piping port) (Opposite side: Same) W Z ZZ SS S Model CXSW6-10 CXSW6-20 CXSW6-30 CXSW6-40 CXSW6-50 (13) (Z) (13) 66 103 46 40 10 76 123 56 50 20 86 143 66 60 30 96 163 76 70 40 106 183 86 80 50 Only the CXSW6-10 and the CXSW6-20 have a groove cut out for installing auto switches.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5 x 0.8 29 42 52 69 M5 x 0.8 15.5 14 89 Series CRBU2 Dimensions: 10 Double vane type Figures below show the intermediate rotation position when A or B port is pressurized.

Cylinder with Lock

102 32 139 1/4 1/4 78 25 52 14 123 21 79.5 20 23 18 17 71 13 M12 x 1.75 10 Up to 1500 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 93.5 22 25 20 19 72 16 M12 x 1.75 10 (mm) Bore size (mm) 40 50 63 80 100 KA LD LH LS LT LX LY MM N P RT RY S T V X Y Z ZZ 14 40 207 3.2 42 70 M14 x 1.5 27 1/4 153 37.5 9 27 13 24 244 9 18 45 222 3.2 50 80 M18 x 1.5 30 3/8 168 44 11 27 13 31 266 9 30 76 18 50