V100

12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 4-4-61 for dimensions with connector cable. 4-4-41 42 Series SYJ700 Manifold Specifications Manifold Specifications Type 20 Type 21 Type 40 Type 41 Type 42 For internal pilot Model Type 21R Type 41R Type 42R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations

Table of Contents

16 20 32 40 50 9 4 13 8 12 7 17 19.5 16.5 11.5 11.5 12 12 9 9 22.5 23.5 29.5 26 29 25 17.5 9.5 18 10 15 7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

22 26 23 26.5 20.5 19.5 5 (7) 8 (6) 5.5 (7.5) 5 (3) 2.5 (4.5) 7.5 (5.5) 16 25 29 26 29.5 23.5 22.5 20 25 32 40 50 27 31 28 31.5 25.5 24.5 5 7 8 6.5 7.5 4 30 34 31 34.5 28.5 27.5 5 7.5 8 7 7.5 4.5 34 27 38 29 26.5 35 38.5 32.5 31.5 6.5 6.5 9.5 6 9 3.5 5 12 9 11 8 8 37.5 30.5 41.5 32.5 30 38.5 42 36 35 10.5 9 13.5 8.5 13 6 7.5 16 11.5 15 10.5 12 43.5 36.5 47.5 38.5 36 44.5 48 42 41 8.5 12

5 Port Solenoid Valve Series SY3000/5000/7000/9000

12 stations Note) SS5Y3 has 4 to 12 stations.

Table of Contents

SB) AI (3-3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) HA 44 50 59 HB 36 42 50 AI 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 FX 12 15 18 NB 0 0.030 0 0.030 0 0.030 B 30 36 42 EO 9.5 10 12.5 CA 7 7 7.5 EC 7.5 8 9.5 K 4 5 6 AE 27 28 32 Q 6 7 8 DO 19.5 22 26.5 J 10 12 14 AA 46 49 55

AC Servo Motor Driver (Pulse input type/Positioning type ）

EA] automatically. 12 11 12.

Table of Contents

9 125 110 176 160 16 18 107 50 75 150 115 82.5 45 194 42 M10 200 95 12 11 135 115 210 190 19 23 142 Bore size (mm) W WH W V U T S Z R Y Q X O P 20 25 32 40 50 30 23 36 40 86 12 26 140 12 80 21 30 M6 x 1 M5 x 0.8 30 25 44 47 98 13 31 153 12 80 21 37 M6 x 1 M5 x 0.8 25 28.5 50 53 112 16 38 161 12 82 21 37 M6 x 1 Rc 1/8 20 33 60 63 132 20 47 188 12 92 25 44 M8 x 1.25 Rc 1/8 20 40.5 70 73 162

Electric Actuators

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Table of Contents

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

SYJ300/500/700

T For sub-plate type, types 40, 41 and 42 manifolds Port size 02: With 1/4 sub-plate 01: With 1/8 sub-plate Nil: Without sub-plate E: Push-turn locking lever type (With gasket and screws) Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC / 100, 110, 200, 220 VAC 24, 12 VDC 100, 110, 200, 220 VAC M plug connector DIN terminal 24, 12 VDC 6, 5, 3 VDC M8 connector G: Lead wire length

Table of Contents

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

Air Slide Table

MXQ 12-2 With end lock, extension stroke end adjuster (12) Type Adjuster part no.

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

0.55

60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port 32 Series VPA300/500/700 Series VPA500/Base Mounted/Dimensions Standard/VPA544-1l 02 03 A B 1/4, 3/8 2(A) port 13.5 28.5 51 2 x 5.2 (For mounting) 1/4, 3/8 3(R) port 47 17.6 23 1/8 12(PA) port NO 2A 42 52 NC 12 12 3R 1P NC (1/8) 12(PA) port 12.6 13.5 83 23 91 74.5 73.5 28.5 X M5 x 0.8 (Breathing hole) 13.5 28.5 57 1/4, 3/

Smooth Cylinder/Low Speed Cylinder

80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13

1

16 20 25 18 22 24 30 34 40 46 58 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 11 11 10.5 11.5 12.5 14 12 16.5 26 30 36 42 48 54 64 78 8 10 12 16 20 20 25 25 6 8 10 12 16 16 20 20 M4 x 0.7 90 94 109 109.5 135.5 142 155 160 13 15 18 21 24 27 32 39 M4 M4 M5 M5 M6 M6 M8 M10 7 7 9 9 9 9 10 10 5 5 6 6 10 10 12 12 42 46 53 53.5 59.5 66 72 77 19 19 30 30 38 38 60 60 8 8 10 10 12 12 16 16 51 58

LX

bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction

5

Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.

LX

LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold