High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

HRX-OM-X084

HRR Series 3.4 Piping 3-19 HRX-OM-X084 Chapter 3 Transport and Setting Up [Tips] For HRR010-AN-10/20-,HRR010-WN-10/20A set of thread adapters that converts the connections from Rc to NPT is enclosed as an accessory. For NPT thread, be sure to use this adapter.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 1417 A VK300 Series Specific Product Precautions Be sure to read this before handling the products.

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Caution Fitting assembly part numbers Metric size One-touch fitting for4 VVQ1000-50A-C4 SY3000 One-touch fitting for6 VVQ1000-50A-C6 Caution One-touch fitting for4 VVQ1000-51A-C4 Note 1) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/ exhaust block assembly must also be added.

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

ZSE40/ISE40

Rc 1/8 12 16-2-23 10 Series ZSE40/ISE40 Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 600 (3000) Lead wire length 3.5 ForM5

2-Color Display High Precision

7 30 10 20 R6.5 3.5 8.8 Atmospheric vent port 2.6 14.7 6 W1: Rc1/8 WF1: G1/8 12 5 Series ZSE40A(F)/ISE40A Dimensions ZSE40A(F)/ISE40A-C4 ZSE40A(F)/ISE40A-C6 32.3 12.8 30 20 8 2 x 4.5 28.15 22.15 44.3 30 10 19 25.4 -M5 28.2 41.2 14.7 8.5 7 One-touch fitting 4, 6 M5 x 0.8 thread depth 5 6 Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch Dimensions ZSE40A(F)/ISE40A

Digital Flow Switch (Integrated display type)

/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-C6(-L) 87.9 2.8 depth 8.4 2.5 depth 6 PF2M725/750S-N7(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 -103No.PF-OMW0007-E PF2M7#W-C4/C6/C8/N7(-L) (mm) Model A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8

EtherNet/IP TM Compatible Fieldbus System

OUT1 18 OUT1 17 OUT1 16 OUT115 OUT114 OUT113 OUT112 Slave Diagnostic setting 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 connection diagnosis 32 point 9 COM_D COM_C COM_B COM_A switch diagnosis -: Unused 23 No.EX-OMS0014-A Diagnostic data Diagnostic information Input data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 8 #D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1

VDW30/40-XF

Rz 3.2 or less for sheet surface 500 Compact / Lightweight 2 Port Solenoid Valve VDW30/40-XF Series For Air/Water Dimensions VDW30-G--C4 C6 /One-touch fitting for 4, 6 VDW40-G-/One-touch fitting for 8, 10 C8 C10 36 30 21 23 Approx. 300 32 17.5 20 Approx. 300 27 56 48 10 9 18 21 3 3 21 23 26 A A C4, C6 1 (IN) port C4, C6 2 (OUT) port C8, C10 1 (IN) port C8, C10 2 (OUT) port Dimentions A 3

Secondary Batteries

CE-certified Symbol EX124D-SDN1-X188 DeviceNet (Negative common) Q A, B port size (Inch) A, B port size (Metric) P, E port Applicable series P, E port Applicable series A, B port Symbol C4 C6 C8 M A, B port Symbol N3 N7 N9 M One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 A, B ports mixed One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

ZQ-OM01301

Pay attention not to cause breakage due to over tightening. 19 - Doc. No. ZQ-OM01301-A . Structural Drawing and Replacement of Part 7.1 Construction (single unit) Vacuum ejector Specifications Vacuum pump system specification Component Parts No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

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Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions C4 C6 M5 ZSE40(F)/ISE40 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 * For splash proof use (IP65), insert an air tube into the atmospheric release

High Precision Digital Pressure Switch, Series ZSE40/ISE40

Rc1/8 12 3 High Precision Digital Pressure Switch Dimensions ZSE40(F)/ISE40 C4 C6 M5 32.3 20 30 2-4.5 12.8 8 28.15 22.15 MPa 44.3 30 OUT1 OUT2 SET 19 25.4 6.4 18.35 Atmospheric release port 600 (3000) Lead wire length 3.5 ForM5 7.8 12.4 7 2.6 2.5 30 15.2 43 10.7 8.5 7 12 M5 x 0.8 thread depth 5 One-touch fitting 4, 6 For splash proof use (IP65), insert an air tube into the atmospheric release

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

AC Servo Motor Driver

4.4.6 Trouble at start-up . 4 -19 5.

LEC-OM02904

C4 TM MR Configurator2 2. 7.7 5 19 5 5.3 (No.PC) * * ** 5.3.1 No.