3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Compact Manifold Regulator Series ARM5

P U C S O H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 522 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

EtherNet/IP TM Compatible Fieldbus System

Input data Offset Meaning MSB LSB MSB LSB (INT) 15 8 7 0 D4 #D3 #D2 #D1 #C4 #C3 #C2 #C1 #B4 #B3 #B2 #B1 #A4 #A3 #A2 #A1 Slave 8 condition 0 0 0 0 0 0 0 0 0 0 0 0 0 1 1 1 Error code COM_D COM_C COM_B COM_A Port 9 diagnostic/ Error code 0 1 1 1 0 0 0 1 0 0 0 1 0 0 0 1 27 No.EX-OMS0014-A Configuration data map Configuration data Offset MSB LSB MSB LSB (INT) 15 8 7 0 0 QC Web COM_D COM_C COM_B

Digital Flow Switch (Integrated display type)

/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-C6(-L) 87.9 2.8 depth 8.4 2.5 depth 6 PF2M725/750S-N7(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 -103No.PF-OMW0007-E PF2M7#W-C4/C6/C8/N7(-L) (mm) Model A C D P PF2M705/710W-C4(-L) 86.2 7.6 18.2 2.8

2-Color Display High Precision

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

5 Port Solenoid Valve Series SQ1000/2000

or less Maximum operating pressure 0.7MPa (High pressure type: 1.0MPa) Single 2 position 3 position 4 position 4.5 (0.25) SQ1131 15 or less 80 Rubber seal 20 or less 0.1MPa 0.15MPa Single 3.2 (0.18) SQ1230 15 or less 80 Metal seal 0.18MPa 0.18MPa Double (latching) Double (latching) Minimum operating pressure 4.5 (0.25) SQ1231 20 or less 80 Rubber seal 0.1MPa 0.1MPa Double (double solenoid

4 Port Solenoid Valve Series VQD1000

U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n x C4, M5 4(A), 2(B) port C4: One-touch fitting for 4 M5: M5 thread 2(B) 2(B) 27.5 20 15 4(A) 4(A) 5 P = 11 12.5 (46) L plug connector (L) n: Stations Dimensions n L 11 138 130 10 127 119 L1 L2 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215

SYA3000/5000/7000

Note 2) ( ): denotes without sub-plate. 1731 Series SYA3000/5000/7000 Dimensions/Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

5 Port Air Operated Valve SYA3000/5000/7000 Series

Note 2) ( ): denotes without sub-plate. 1461 SYA3000/5000/7000 Series Dimensions/SYA3000 Series: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 0.8 (Pilot port) Manual override (Non-locking) Applicable tubing O.D.: 4, 1/4" 6, 5/32" 2 x 2.2 (For manifold mounting) 2 x 3.2 (For mounting) (2 x 3.2 for mounting

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

Intrinsically Safe Valve

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Symbol 3 6 10 15 20 30 100 Lead wire length 300 mm Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Digital Pressure Switch

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes).

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

PSxx-OMM0006CN

) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1 M8 P PNP1 /M8 1 L M SI2 M8 P (psi)1 1 2kPaMPa 1 ZS-24-A A M35 L,M45 L, 2 ZS-24-D D M35 L,M45 L, 2 / V100-49-1-1 300 mm() V100-49-1-2 500 mm() V100-49-1-

Table of Contents

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.