Compact Cylinder Series CQS

Note 2) Please contact SMC for details concerning the mounting bolts to be used with 12 and 16 that exceed 30 mm strokes, or 20 and 25 that exceed 50 mm strokes. 30 35 40 45 50 55 60 65 70 75 M5 x 30L M5 x 35L M3 x 40L M5 x 45L M3 x 50L M5 x 55L M3 x 60L M5 x 65L M3 x 70L M5 x 75L 25 30 35 40 45 50 M3 x 25L M3 x 30L M3 x 35L M3 x 40L M3 x 45L M3 x 50L 6.5 OA thread 8.5 Secure the cylinder

Series KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for

Series KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 18 26 21.5 14 10 29 41 24 17 19 22 M 46 58 25 L A 12 H Connection threads Reference dimension for

KP/KPQ/KPG

25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10 19.5 (R) 12 14 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 19.5 20 26.5 24.5 31.5 26.5 27.5 26 7 14 14 13 24 23 23 46 (R) Applicable tubing 8 14 18 26 21.5 10 17 29 41 24 19 22 M L A 12 46 58 25 H Reference dimension for R threads after

AC

10 0 1 VY170 0 1 10 12 01 02 0 1 0 1 01 02 0 1 VY190 0 1 14 20 M5 01 0 1 VY110 VY1D00-M5 VY1A0 -M5 VY1B0 VY120 VY130 Model 14 M5 01 04 02 03 04 20 10 M5 Port P A R mm2 M5 01 02 01 02 02 03 04 06 10 12 11 2 1 Port size M5 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 4 1 300 17 2 M5 M5 1 1 1 4 2 10 5 0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4

AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

CLQ

78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking

CLQ

CLQ 157 245 402 629 982 1559 2513 3927 M5 x 0.8 Rc 1/8 Rc 1/4 MLGP Symbol Specifications Equivalent to 0.5 MPa -XA Change of rod end shape RLQ Standard Stroke MLU Bore size (mm) Standard stroke (mm) 20, 25 32, 40, 50, 63, 80, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 ML1C DManufacture of Intermediate Stroke -X Description Part no.

Compact Cylinder with Lock Series CLQ

78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through hole): CLQB32 Extension locking

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VV5K3-20-06 VV5K3-40-06-M5 Common SUP/Common EXH VK Type 20: Body ported (A, B port top ported) Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 How to Order A port: Rc 1/8, M5 x 0.8 VZ VV5K3 20 05 A, B port Rc 1/8, M5 x 0.8 VK3120 Thread type VF VK332 Valve stations Nil 00F 00N 00T Rc 01 1 station Applicable blanking plate assembly VK3000-7-1A VFR G NPT 20 20 stations R port:

Prevents Micro-Bubbles

x 0.8 Pilot port Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2-M5 x 0.8 Depth 6 20 17-5-26 24 Manually Operated Series LVH How to Order Valve (Single Type) VC Applicable tubing size Body class Body class 2 3 4 Connecting tubing O.D.

o

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

o

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

KP/KPQ/KPG

19 22 M L A 12 46 58 25 H Reference dimension for R threads after installation Connection threads Note 1) Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm2 D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection thread R Weight g M L2 D2 L1 M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06

High Purity Chemical Valve

142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Table of Contents

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

Rotary Table/Rack & Pinion Style Series MSQ

Basic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAY23-M5 15 9.6 28.5 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 33 3.4 2.9 9 1 8 KAY23-M6 KAY23-U01 10 3.2 17.5 10 KAY04-M5 KAY04-M6 16 18 18.5 15.5 M5 x 0.8 M6 x 1 8 29.5 6 4.6 4.6 8 10.4 16 4 1 8 KAY04-U01 1 4 KAY04-U02 22 34 34.5 15 20 9 14 10 10 18 6.4 6.4 KAY06-M5 KAY06-M6 16.5 20 20.5 16 M5 x 0.8 M6 x 1 32