LEC-OM069xx

If any of the following commands is received during execution of ZRET 19 command, homing motion will be interrupted.

CLS

19 19 24 24 29 14 20 20 25 25 30 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 145 136 115 90 90 90 115 115 140 16 58 110 M14 x 1.5 110 190 100 230 Up to 1400 1401 to 1600 3 5 30 46 114 161 78 18 160 110 146 128 212 16 64 110 M14 x 1.5 112 255 Up to 1400 1401 to 1600 130 182 95 23 180 169 144 18.5 74 120 M16 x 1.5 132 236 118 275 Up to 1400 1401 to 1600 5 5.5 6 30

MGG

100 35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 150, 200, 250 14 depth 10 19 21 22

Air Cylinder Series CS1

85 188 8 M14 x 1.5 Lube Non-lube Air-hydro Up to 1000 30 to 1000 50 47 161 128 36 90 59 43 14 16 15 31 19 100 188 9 M14 x 1.5 Up to 1200 30 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 19 106 206 9 M16 x 1.5 Up to 1200 30 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41 24 125 231 10 M18 x 1.5 Up to 1200 30 to 1200 Lube Non-lube 63 60 226 182 50 115 74 48 17 18.5 20 46 24 132 231 10 M20

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

85 47 188 145 8 115 36 90 59 43 14 16 Lube Non-lube Air-hydro Up to 1000 30 to 1000 M14 x 1.5 50 15 31 19 100 47 188 161 9 128 36 90 59 43 14 16 Up to 1200 30 to 1200 M16 x 1.5 56 17 36 19 106 53 206 182 9 144 40 90 59 43 14 18.5 Up to 1200 30 to 1200 M18 x 1.5 63 20 41 24 125 60 204 231 10 162 45 115 70 48 17 18.5 Up to 1200 30 to 1200 M20 x 1.5 63 20 46 24 132 60 231 226 10 182 50 115

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

VM

85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101 79 81 22 VHK-B2A 49 17 1 30 25 21.5 31 VHK-04S-04S 1 2 1 2 3 port valve Reference dimensions after insertion of R thread. 5-8-4 5 Finger Valve Series VHK Piping Precautions Caution Be sure

C95

19 M6 M6 M8 M8 M10 M10 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 12.2 14.2 19 19 23 27 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 15 17 24 24 30 32 4 4 5 5 5 5 30

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 132 132 132 142 160 193 250 278 306 13-/22-MXQ20L10 13-/22

CV/MVGQ

5 8 30 13 M8 x 1.25 41 15 24 20 0 0.033 Up to 300 17 6 22 9 70.5 19.5 10 33.5 19 5.5 10 30 13 M10 x 1.25 45 15 30 26 0 0.033 Up to 300 17 6 22 9 76.5 19.5 10 37.5 19 5.5 12 30 13 M10 x 1.25 45 15 34.5 26 0 0.033 0 0.039 Up to 300 22 8 24 10 84.5 21 15 46.5 30 7 14 39 16 M14 x 1.5 50 21.5 42.5 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

CV/MVGQ

5 15.5 10 28 18 9 65.3 Up to 300 13 5 20 0 0.033 30 45 15 13 M10 x 1.25 10 30 19 5.5 19.5 10 33.5 22 9 70.5 Up to 300 17 6 26 0 0.033 34.5 45 15 13 M10 x 1.25 12 30 19 5.5 19.5 10 37.5 22 9 76.5 Up to 300 17 6 26 0 0.033 0 0.039 42.5 50 21.5 16 M14 x 1.5 14 39 30 7 21 15 46.5 24 10 84.5 Up to 300 22 8 32 Clevis pin and snap ring (cotter pin for 40) are packaged together.

Modular Design with Uniform Body Style

19 19 19 19 19 19 19 9 Pressure can be set higher than the specification pressure in some cases, but use pressure within the specification range. 10 Refer to chemical data on page 109 for chemical resistance of the bowl. 11 A bowl guard is provided as standard equipment (polycarbonate). 12 A bowl guard is provided as standard equipment (nylon). 13 The combination of float type auto

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Note 2) A magnet is already built in for 15. 8-15-19 19 Series CY3R Dimensions Both sides piping type: 15 to 40 Note) This figure shows types with switch rail (no symbol). HB HT HC N X A W K 2-plug H HA CB T 4-counterbore dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 46 57 2 x M4 x 0.7, thread depth 6.5 (For mounting bracket) 20 16.1 7 19.8 28 38 + (For mounting) 2 x 4.2 31.5 [38.5] One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" : 10, 3/8" G: Approx. 300 H: Approx. 600 100.1 [102.3] 77.9 (Lead wire length) 13.6 B A 101.8 [104] (For manifold mounting) 2 x 4.2 Manual override 19 42 (52) (66

15

M4 x 0.7 7.5 46 30 3.7 11 42 NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5 M4 x 12 1.5 M6 x 14 5.2 14 4.5 30 M5

MXS Series Air Slide Table

46 43 27 48 46 46 Stroke 100 to 150 A Shock absorber at extension end Max. 35 Shock absorber at retraction end Dimensions not indicated are the same as basic type.

Floating Joint

25 32 65 75 90 125 150 48 52 70 36 40 52 45 55 65 82 100 21 24 31 41 50 59.5 79 96 6 6 9 12 16 19 24 29 6.6 6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36 49 61.5 76.5 94 131 152 8 9 13 15 18 24 38 42 0.5 0.5 0.75 1 1.25 2 2.5 3 1100 2500 4400 11000 18000 28000 36000 55000 0.08 0.12 0.28 0.63 1.15

HRX-OM-T002

. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRS090-A-20/40/46-. 9-11

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Valve) DXT156-19-1A1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Two-angle socket 19 17 JIS B4636 3.