CJ2

(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore NN NB NA MM KA H GB GA FZ FY FX FT FC FB F CB CA BB BA Z A S 10 9.5 12.5 M4 X 0.7 4.2 28 5 8 42 20 33 2.3 M10 X 1.0 5.5 17.5 8 14 17 12 15 74 15 46 16 9.5 12.5 M5 X 0.8 5.2 28 5 8 42 20 33 2.3 M12 X 1.0 5.5 19 8 20 20 18 18 75 15 47 Double Clevis (D) CJ2KD Bore size Stroke Material: Iron Part No.

Prevents Micro-Bubbles

4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 17-5-30 28 Series LVH/Integral Fitting Type Manifolds Manifold Specifications Model LLH2A LLH4A LLH3A Manifold type Stacking type VC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations VDW 3/8 3/4 1/2 Tubing size (port P) 1/4 1/2

High Purity Chemical Valve

3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PFA 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc

CM2

46 40 Rear flange Built-in One-touch fitting CM2G20SCM220A, #5 SCM220A, #5, #19 CM2G25SCM225A, #5 SCM225A, #5, #19 CM2G32SCM232A, #5 SCM232A, #5, #19 CM2G40SCM240A, #5 SCM240A, #5, #19 The data shows auto switch equipped styles.

Electric Actuator/Slider Type

LEC-CYUis JEPMC-W6012-E manufactured by YASKAWA CONTROLS CO., LTD. cable -@ L 16 4 19 46 cable -# 33 L 4.8 11 10.7 Terminating connector for -@ LEC CYRM LEC-CYRM is JEPMC-W6022-E manufactured by YASKAWA CONTROLS CO., LTD. 19 16 46 110 Series LECY M U Options USB cable PC LECYM2 LECYU2 Drivers Setup software (SigmaWin+TM) (LECYM/LECYU common) Please download the SigmaWin+TM via our website

JXCx-OMT0023

U V AWG 19 (Black) AWG 19 (Green/yellow) W AWG 19 Note.

•

M5 Modol ~ M6 M8 M5 1M6 M8 M5 M6 M8 M4 IM5 M6 M8 ZPR10g 10 12 12 21 29.9 46 5 6 3 1.7 19 20 i''i: '')I {''::''j ,"i'i 1,;,,1 I 19 1 :P>~2 ZPRIl8 , 20 ZF!R13g 1 3 15 12 21 29.9 46 5 6 3 1.8 '2.~,1 ''2,H 23 22 ZPR13 -,ZPR16g 1 6 18 12.5 21.5 30.' 46.5' 5 6 3.5 1.2 ZPR10 23 22 23 22 22 Deep type (mm) I Model M ,.8 C D E F M:M5xO~J M:M6X1 y G ! G ZPR16 23 22 ZPR20' !

Table of Contents

-06, AC40B-06 AC40C-06 AC50, AC55 AC60, AC50B AC55B, AC60B 46 44 24 66 19 Caution on Mounting 57 53 30 81 22 If a T-interface is used on the IN side of the lubricator, lubricant may be mixed.

Air Slide Table

22 46 13 35 10 67.1 MXQR-JS20 12 67.3 MXQR-BS25 MXQR25 M8 x 20 31 22 19 19 M14 x 1.5 M8 x 18 33 12 18 22 54 16 35 10 67.1 MXQR-JS25 1) Size of hexagon socket head bolt 2) Mounting the adjuster on the left side is also available.

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

CY1

Bore size (mm) 6 10 Content CYR 15 E CYR 6ENos.18, 19, 22, 27 at the left CYR10ENos.18, 19, 20, 22, 27 at the left Note 2) Nos.17, 18, 20, 22, 27 at the left 15 CYR15EStroke CYR20EReed switch 20 Solid state switch CYR20EN25 32 40 50 63 Bore size CYR25ENos. CYR32E17, 18, 19, 20, 22, 27 CYR40Eat the left CYR50ECYR63ENote 1) indicates the stroke.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Lower: Absolute encoder 50 12 Dog fitting for switch 40 5 Work piece mounting reference plane 20.5 19 36 4.5 46 Pitch = 100 Body mounting reference plane (n1 1) x pitch 67.5 21.5 74 Section AA The body mounting reference plane and work piece mounting reference n1 Stroke Model plane should be used as standards when mounting onto equipment.

10

Bore size [mm] E1 L1 MM R1 U1 NDH10 NX NZ I-03M 32 40 14 20 30 M10 x 1.25 12 16 10 +0.058 0 14 0.10 0.30 I-04M 40 50 19 22 40 M14 x 1.5 12.5 19 10 +0.058 0 14 0.10 0.30 I-05M 50, 63 64 24 28 50 M18 x 1.5 16.5 24 14 +0.070 0 20 0.10 0.30 I-08M 80 80 26 40 60 M22 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-10M 100 80 26 40 60 M26 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-12M 125 119 36 46 92 M27

MB

+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22

Guide Cylinder Series MGG

(26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 27 (36) 40 40 35 37.5 38 36.5 34.5 35.5 34.5 35 39 29.5 32 31 38 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 32 (36) 50 50 40.5 43 43.5 43.5 41.5 42.5 40 42 46 36.5 39.5 38 43.5 28 (40) 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 32 (36) 63 63 47.5 50 50.5 43.5 41.5 47 42 46 42.5 36.5 39.5 38 50.5

Table of Contents

17 19 19 21 19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5

Cylinder with Lock Series CLS

190 31 50 47 145 75 18 145 110 136 1/4 115 36 59 43 16 107 58 110 M14 x 1.5 15 19 Up to 1400 1401 to 1600 90 3 255 20 112 50 47 161 78 18 160 110 146 1/4 128 36 59 43 19 212 16 114 64 110 M14 x 1.5 15 31 19 30 Up to 1400 1401 to 1600 90 5 275 53 95 132 43 19 20 236 118 120 36 22 56 182 23 180 169 1/4 144 40 59 18.5 130 74 M16 x 1.5 17 46 Up to 1800 1801 to 2000 115 30 24 25 265 132 320

MNB

14 50 58.5 104.5 15.5 120 11 100 9 46.5 1/4 120.5 32 Up to 600 75 77 20 19 35 27 40 14 12 52 18 63 119.5 16.5 68 135 11 115 56.5 9 1/4 134.5 32 Up to 600 90 92 20 23 35 27 45 14 12 62 18 80 150 19 81 153 13 72 12 126 1/4 169 Up to 750 37 102 100 25 33 40 32 45 20 16 63 22 100 96 170 19 178 16 14 150 89 1/4 189 Up to 750 37 116 120 30 37.5 40 41 55 20 16 75 26 Bore size (mm) T V VA W ZZ S

MNB

14 50 58.5 104.5 15.5 120 100 11 9 46.5 1/4 120.5 32 Up to 600 75 77 20 19 35 27 40 14 12 52 18 63 68 119.5 16.5 135 115 11 9 56.5 1/4 134.5 32 Up to 600 90 92 20 23 35 27 45 14 12 62 18 80 81 150 19 153 126 13 12 72 1/4 169 37 Up to 750 102 100 25 33 40 32 45 20 16 63 22 100 96 170 19 178 150 16 14 89 1/4 189 37 Up to 750 116 120 30 37.5 40 41 55 20 16 75 26 Bore size (mm) T V VA W ZZ S

ZP

silicone rubber Symbol Pad diameter 2 4 5 6 40 46 N S U F GN GS 02 04 05 06 40 46 Pad type Type Bellows Symbol ZJ Dimensions: Pad Unit ZP2-02ZJ ZP2-04ZJ ZP2-05ZJ ZP2-06ZJ 8 6.2 6.4 4 4 4.3 2.2 2 3.8 5.7 1 2.5 1 4.5 8 8 2.3 2 6.4 4.7 4.6 1.5 3.3 1 2.6 6 4 2 5 6.7 5.7 4.3 2.5 8 6.4 3.8 ZP2-40ZJ ZP2-46ZJ 24 30 21 27 44 44 40.2 40.2 35 29 46 40 50 44 16 Symbol/Type Oval Pad W: Oval Pad size