Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 13 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 13 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

C95

G1/4 G1/4 G3/8 G3/8 G1/2 13 14 15.5 16.5 19 19 M6 M6 M8 M8 M10 M10 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 12.2 14.2 19 19 23 27 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW 12 16 20 25 42 29 6 8 5 26 11 7.5 58 M4 13 13 18 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 13 8 18 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100 125, 150, 175, 200 250, 300, 350, 400 46 33 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8

MY1

) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 3.2 3.5 4.5 4.5 13 13 17 17 45.6 53.5 67 81.5 5.8 6.5 8.5 9.5 43 49 61 76 6 7 9 10 12 15 MY1B25 MY1B32 MY1B40 12 16 16 56 56 46 43 33 43 With high load shock absorber + Adjusting bolt TT h MY1B H Stroke Bore size E F TT EA h EB W FW Stroke adjusting unit FB S (Shock absorber stroke) T FC Shock absorber a 2.8 15.4 Workpiece EC EY FH Since the dimension

MU

18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058

MU

14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Y Without rod boot With rod boot (One side) (Both sides) H ZZ e f h l ZZ ZZ 40 40 207 3.2 42 70 81 M14 x 1.5 27 1/4 42 11 20 45 153 27 13 51 255 43 11.2 59 1/4 stroke 263 271 50 45 222 3.2 50 80 90 M18 x 1.5 30 3/8 46 10 21 50 168 27 13 58 284 52 11.2 66 1/4 stroke 292 300 63 50 250 3.2 59 93 106 M18 x 1.5 31 3/8 48.5 13 23 60 182 34 16 58 298 52 11.2 66 1/4 stroke 306 314 80 65 296 4.5 76

LEC-OM069xx

DISCONNECT 13 Turn the control and main circuit power supplies.

Prevents Micro-Bubbles

S) (mm) Dimensions (mm) Dimensions W W S Model LVA2 LVA3 LVA4 LVA5 LVA6 Model LVA20 LVA30 LVA40 LVA50 LVA60 11.5 70.5 24 92.5 A B A B 29 110.5 SMC SMC 34.5 147 36 156 Dimensions (mm) A B C E D G H J K L M N R U P Q Model Rc 1/4 NPT 1/4 LVA2 30 36 61 44 14.5 35 13 4 20 37 3.5 30 M5 x 0.8 M3 x 0.5 Rc 3/8 NPT 3/8 LVA3 36 47 81.5 56 19 45.5 17.5 7.5 34 46 5.5 41.5 Rc 1/2 NPT 1/2 LVA4 46 60

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

CJ2

(mm) GB 5 5 GA 14.5 8 8 FZ 32 32 42 FY 14 14 20 FX 24 24 33 FT 1.6 1.6 2.3 FC 4.5 4.5 5.5 FB 13 13 19 F 8 8 8 D 3 4 5 T 3 NN M6 X 1.0 M8 X 1.0 C 14 14 20 S 49 46 47 MM M3 X 0.5 M4 X 0.7 M5 X 0.8 B 12 12 18 NB 7 9.5 9.5 H 28 28 28 A 15 15 15 NA 16 12.5 12.5 Z 77 74 75 Bore 6 10 16 M10 X 1.0 With air cushion/Dimensions not mentioned in the below table are the same as the above table.

10

With bracket/Special electrical entry direction Special electrical entry direction Symbol Electrical entry direction Standard Electrical entry direction Symbol Electrical entry direction Symbol Single unit Manifold IN OUT Nil 90 90 90 270 IN OUT A 90 270 90 IN OUT A C 90 IN OUT Individual port 180 180 180 180 180 IN OUT B B 180 IN OUT Individual port (mm) U 46 56 56 W 36 46 46 X 11 13 13

DOC1001322

P.5-12 (10) Compressor circuit High pressure side Displays the High pressure side of refrigeration circuit P.5-12 (11) Compressor circuit Low pressure side Displays the Low pressure side of refrigeration circuit P.5-13 (12) Circulating fluid electrical conductivity Displays the electrical conductivity. P.5-13 (13) Key lock condition display Displays the status of key lock settings.

Modular Design with Uniform Body Style

v*13 v*13 v*13 v*13 *1 Option B is included in the package with the product but does not come assembled.