High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

LEC-OM069xx

Recommended Noise Filter Noise Filter Selection Main Circuit Power Supply Driver Model LECYM2Recommended Noise Filter Details Model Specifications Leakage Current V5, V7 FN2070-6/07 Single-phase 250V 6A 0.734 mA 230VAC/50Hz [1] Single-phase V8 FN2070-10/07 Single-phase 250V 10A 200 V V9 FN2070-16/07 Single-phase 250V 16A V5, V7, V8 FN258L-7/07 Three-phase 80V 7A 0.5 mA 440VAC/50Hz [2] Three-phase

2/3 Port Valve

(56) 54 (64) Y 74 (81) 81 (91) 88 (98) U 47 48 51 W 84 (91) 90 (100) 98 (108) Q 23 25.5 28 VVX21l VVX22l VVX23l The figures in parentheses are a closed style at energizing ( ): Individual pressure 20.5 (17.5) 26.5 (22.5) 26.5 (22.5) 56 (67) 64 (81) 72 (87) 38 49 49 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 10.5 13 13 4.1-16 Pilot 2 Port Solenoid Valve Series VXD21/22

V

1/4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

7ND9071en

Class I, Division 2, Groups A, B, C, and D; T4/ T5/T6 Ex nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga Class I, Zone 2 AEx nA IIC T4/T5/T6 Gc or Ex nA ia IIC T4/T5/T6 Gc Ga ND_E2 CSA Std C22.2 No.25-1966, CSA Std C22.2 No.30-M1986, CAN/CSA-C22.2 No.94-M91, C22.2 No. 142-M1987, CAN/CSA C22.2 61010-1-04, CAN/CSAC22.2 No 60079-0-07, CAN/CSA-C22.2 No 60079-1-07, CAN/ CSA C22.2 No 60079-31

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

3/8" 25 22.5 21 19.5 44.5 32.5 47.5 1/2" 52.5 33 29 24.5 54.5 24 22.5 3/4" 61.5 40 37 26.5 64 32 24 1" 73 46 49 30 77 41 26 328 Series LQ3 Fluoropolymer Fittings Hyper Fitting / Flare Type Dimensions Female elbow: LQ3L-F Metric Size Y Port size Rc (NPT) B Applicable tubing O.D.

HRX-OM-M005

CH1-07 CH2-07 Reservoir High Level WRN Continued Drain the circulating fluid. Check the load specification. Replacement of the thermal fuse is required. Call the supplier for service. CH1-08 CH2-08 Temp. Fuse Cutout FLT Stop The circulating fluid tank was raised in temperature. The temperature of the circulating fluid exceeded the specified value.

Nozzle Type Ionizer

ON OFF Output Maintenance signal Requirement for maintenance detected ON OFF Input External switch signal 1, 2 16 IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01m 06 07 High flow rate nozzle IZN10E-02m 06 07 18.31 (100) 2.5 16 5 92.5 46 3.5 L 6 18.5 6 11 8 L 12.4 5 6 M3 x 0.5 thread depth 4 (Ground terminal) 40 27.7 L-L Applicable tubing O.D. d A 86.4 [mm] Model

Vacuum Unit Ejector / Vacuum Pump System

In such cases, the entire silencer case assembly needs to be replaced. 4 For nozzle size 07, 10 6 For nozzle size 12, 15 8.2.4.

13

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Series KV2 Fittings

-33S KV2Y03-34S KV2Y03-35S KV2Y07-11-35S KV2Y07-34S KV2Y07-35S KV2Y07-36S KV2Y11-07-35S KV2Y11-07-36S KV2Y11-35S KV2Y11-36S KV2Y11-37S KV2Y13-07-37S KV2Y13-11-36S KV2Y13-11-37S KV2Y13-35S KV2Y13-36S KV2Y13-37S KV2Y15-37S 14.29 14.29 14.29 14.29 19.00 14.29 14.29 17.46 19.00 19.00 19.00 19.00 22.23 23.80 23.80 22.23 19.00 19.00 22.23 23.80 13.2 13.2 13.2 13.2 17.9 13.2 13.2 13.2 17.9 17.9

Direct Operated

46 6 9 9 49 55 55 19.5 22.5 25 80.5 91 99.5 19.5 22.5 25.5 40 43 46 45 53.5 61.5 97 107.5 116 (mm) DIN terminal Electrical entry (AC/Class B) Model Grommet Conduit Conduit terminal R S 44 52.5 60.5 T T 65.5 68.5 71 U 53.5 56.5 59 V X 100.5 103.5 106 W Y 69.5 72.5 75 VVX31 VVX32 VVX33 30 33 36 48.5 51.5 54 45 53.5 61.5 95.5 106 114.5 22 Direct Operated 3 Port Solenoid Valve Series VX31/32

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 3 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 4 Stations, A B Port Size: M5 (Base Mounted M5X0.8)