Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Single Solenoid Coil on the Same Side as A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 6 Stations, A, B Port: Base Mounted M5X0.8, P R Port Thread: NPTF

5-Port Solenoid Valve

or less 42 or less 52 or less 44 or less Metal seal SY71l1 39 or less 48 or less 39 or less 34 or less 43 or less 34 or less Rubber seal SY72l0 2-position double 18 or less 19 or less 19 or less 18 or less 17 or less 17 or less Metal seal SY72l1 17 or less 17 or less 16 or less 16 or less 16 or less 16 or less Rubber seal SY73/4/5l0 3-position 52 or less 54 or less 47 or less 42 or less 46

AC Servo Motor Driver (Network card type ）

40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2

Table of Contents

3/4 1 Thread type ON-flow range Note 1) IF30 is available for 06.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.

smcmaintenancepartslist

AFM30 to AFM40-06 AFD30 to AFD40-06 Model Semi-standard specifications Note 2) Note 3) Note 3) With bowl guard With barb fitting Float type auto drain Bowl material With drain guide AFM20 AFD20 AFM30 AFD30 AFM40 AFD40 AFM40-06 AFD40-06 OUT IN N.C. N.O.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 VFR NPTF T Note) Bottom ported is not available for external pilot.

5

Applicable bore size (mm) d H B C D Y-12A 125 8 46 100 M30 x 1.5 25 +0.084 0 32 +0.3 +0.1 64 0.1 0.3 27 42 Y-14A 140 8 48 105 M30 x 1.5 28 +0.084 0 36 +0.3 +0.1 72 0.1 0.3 30 47 NT-12 125, 140 M30 x 1.5 18 46 53.1 44 Y-16A 160 8 55 110 M36 x 1.5 32 +0.1 0 40 +0.3 +0.1 80 0.1 0.3 34 46 NT-16 160 M36 x 1.5 21 55 63.5 53 * Use a single knuckle joint or a double knuckle joint individually.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

(S)A 6 10.4 26.2 20.4 38.8 AS23l1FG-01-08(S)A 8 13.2 10.2 16.4 30.1 21.5 40 14.2 12 (11) AS23l1FG-02-04(S)A 4 7.2 9.6 12 ASP 1/8 13 (12.7) ASN 36.6 35 31.1 29.5 13.3 18 (19) AS23l1FG-02-06(S)A 6 11.2 19 33.8 (33.9) 21.4 43.9 20 (21) AS23l1FG-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (23) AS33l1FG-02-06(S)A 6 8.2 16.5 29.9

Combination Cylinder

Auto Switch Mounting Bracket Mounting Bracket Refer to p.3.1-46 for auto switch Refer to p.3.1-46 for part no. of mounting bracket (Band) when auto mounting bracket except basic style. switch is mounted. 3.1-44 Fine Lock Cylinder/Double Acting Double Rod Series CLAW Weight/ ( ): Value at steel tubing (kg) Stopping Accuracy (Not including tolerance of control system.)

V

6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube

CL

/G59F/G5NTL Double clevis CA1-D04 CA1-D05 CA1-D06 CA1-D08 CA1-D10 BA-04 BA-05 BA-06 BA-08 BA-10 When ordering foot brackets, 2pcs. should be ordered for each cylinder.

VQZ1000/2000/3000

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB/CA1 Tube x Length T0604 x 1 m VQZ1121-C6 Speed controller AS2051F-06 Silencer AN120-M5 Tube x Length T0604 x 1 m VQZ2121-C6 Speed controller AS3001F-06 Silencer INA-25-46 Tube x Length T1075 x 1 m VQZ3121-C6 Speed controller AS4001F-10 Silencer AN101-01 2-7-2 3 Series VQZ Model

Modular F.R.L. Units

-06-A AC40C-06-A Caution on Mounting 18.6 66 46 44 24 If a T-shaped spacer is used on the IN side of the lubricator, lubricant may be mixed.

Modular Type Regulators Series AR

3.3 M62 x 1.5 43.5 44.5 55 42.5 84 42.5 84 1/4 95 1 AR Optional specifications AL Bracket mount Panel mount Model M N Q R S T U V W Y Z AW AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 4.5 6.5 30 25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3 26 32.5 16 6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

High Purity Fluoropolymer

Description Replacement parts Tubing outside diameter Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 4 04 04 04 04 6 06 06 06 8 08 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D