MGP

200 200 200 Over 200st to 300st 167 167 Over 100st to 200st 105 105 117 117 Over 200st to 300st Over 300st 60 60 77 77 14 48 54 70 78 22 25 30 38 20 24 24 24 110 110 120 120 M5 x 0.8 10 10 12 12 40 44 44 44 3 3 3 4 5 5 17 17 56 62 81 91 300 300 3.5 3.5 3.5 4.5 41 46 54 64 15 17 29 29 50 56 72 82 25 27 39 39 37 38 44 50 12 16 20 25 16 M5 x 0.8 18 M6 x 1.0 26 M6 x 1.0 MGPM (slide bearing

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

CY1

6.5 3.2 12 4 27 25.5 26 24 14 25 24 5 M4 x 0.7 x 6 9 6.5 CY1RG15 2 0.5 8 4.2 17 5 33 31.5 32 30 17 31 30 8.5 M5 x 0.8 x 7 14 8 CY1RG20 3 1 9.5 5.2 22.8 6 39 37.5 39 36 21 38 11 36 7.5 28 M6 x 1x 8 11 9 CY1RG25 3 1 9.5 5.2 27.8 6 44 42.5 44 41 23.5 43 14.5 41 6.5 33.5 M6 x 1 x 8 15 8.5 CY1RG32 3 1.5 11 6.5 35 7 55 53.5 55 52 29 54 20 51 7 41 M8 x 1.25 x 10 13 10.5 CY1RG40 5 2 11 6.5 43

KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5

Series KG Stainless Steel One-touch Fittings

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 4.6 4.6 17.5 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

-04 KPGY04-M5 KPGY04-01 KPGY04-02 KPGY06-M5 KPGY06-01 KPGY06-02 KPGY08-01 KPGY08-02 KPGY10-02 KPGY10-03 KPGY12-03 KPGY12-04 M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8

Stainless Steel One-touch Fittings Series KG

KGY04-M5 KGY04-01 16 M5 0.8 13.5 22 25.5 36 13 15 3.5 4.6 4.6 7 9.5 1 8 4 6.4 6.4 16 13 M5 0.8 14 10 10 18 10.4 1 4 KGY04-02 26 38 19 4.3 13 KGY06-M5 KGY06-01 14.5 17.5 23 14 39 29 17.5 4.6 4.6 7 11.5 1 8 10 6 10 20 12.8 1 4 KGY06-02 27 41 17 17 14 13.4 13.4 21 3 8 KGY06-03 29 42.5 35 1 8 1 4 KGY08-01 KGY08-02 24.5 28.5 43.5 45.5 12 17 13.4 13.4 15 23 15.2 12 23 8 14 18.5 17.7 25.6 3

Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

VZ100/300/500

VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

25 14 24 5 14 M4 x 0.7 x 6 6.5 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

Vacuum Pad

g] ZP3-T16B;-A12-B5 [Weight: 19.3 g] M5 x 0.8 M5 x 0.8 M5 x 0.8 2 5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B

Battery-less

Check the SpeedWork Load Graph (Guide) on pages 14 and 15.

JA/JAH/JB/JS

41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 8 9 9 13 13 13 15 15 18 24 24 24 42 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 7 8 8 11 11 11 14 14 19 24 24 27 36 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 13 17 17 22 22 22 27 27 32 41 41 41 55

JA/JAH/JB/JS

41 50 59.5 59.5 66 96 4.5 5 5 6 6 6 7.5 7.5 9.5 11.5 11.5 13 16 7 8 8 11 11 11 14 14 19 24 24 27 36 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 71000 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 13 17 17 22 22 22 27 27 32 41 41 41 55 For 3.5 MPa hydraulic cylinders, operate

Rotary Actuator/Vane Type

36 M4 x 0.7 depth 13.5 11 M4 x 0.7 depth 7.5 M5 x 0.8 24.5 10.5 50.5 59 22 14 21 30 50 40 13 22 80.005 0.020 16 0 0.043 5 2 8 12 1.0 26 14 43 M5 x 0.8 depth 18 16.5 M5 x 0.8 depth 10 M5 x 0.8 34.5 14 64 75 24 15.5 25 40 63 45 15 30 100.005 0.020 25 0 0.052 6.5 4.5 9 20 1.0 31 20 56 M5 x 0.8 depth 16 17.5 M5 x 0.8 depth 10 M5 x 0.8 39.8 17 79.5 90 30 21 31.6 57 B CRB2 Series Dimensions: Standard

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.