Compact Vacuum Unit Ejector/ Vacuum Pump System

Accessories to supply valve/ release valve Model Accessories ZB1-VQ110UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ110U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110LMounting screws (M1.7 x 22); 2pcs. ZB1-VQ120UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ120U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110Mounting screws (M1.7 x 15); 2pcs.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

M8 D M10 E Inch size 07 Nozzle: 0.7 10 Nozzle: 1.0 12 Nozzle: 1.2 15 Nozzle: 1.5 Refer to page 260 for identification method.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Valve 10-VQD1000 Dimensions Plug lead unit manifold: 10-VV4QD15Lead wire length 300 mm Indicator light 4 x Rc1/8 (P, R port) 2-4.5 (Mounting hole) 57.5 52.5 51 1(P) 3(R) 1(P) 3(R) 32 16 17 9 10 P=11 10 4 4 36.5 L2 L1 41.5 45 M plug connector (M) D side Stations U side 1 2 3 4 5 n Direct manual override (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread 2(B) 2(B) 27.5

ZQ-OM01301

If the rubber viscosity increases, replace the pad. (15) The product with an energy saving switch reduces air consumption by stopping air supply by creating a vacuum between the check valve and pad in the ejector while adsorbing the workpiece.

ZB-OM00301

4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

Electric Actuator

25 32 40 25 32 40 16 25 32 40 1 5 14 20 45 60 5 15 25 Up to 1000 Up to 2000 Up to 2000 Up to 600 Up to 800 Up to 1000 Up to 2000 Up to 2500 Up to 3000 Up to 400 Up to 600 Up to 800 Up to 1000 10 20 45 60 Guide Rod Slider High Rigidity Slider Type Step Motor (Servo/24 VDC) AC Servo Motor Belt drive Belt drive Series LEJB Ball screw drive Series LEL Series LEJS CAT.ES100-101 CAT.ES100-104

AC Servo Motor Driver

Refer to section 15.1.2 15 2 15.

VK3000

Specifications C: 0.54 dm3/(sbar) (Passage {4/2 5/3 (A/B R1/R2)}) Compact: Width 18 x Length 68 (mm) Low power consumption 4 W DC (Standard type) 2 W DC (Low wattage type) Suitable for copper-free applications All the parts in contact with fluid are non-copper materials Type of actuation Direct operated type 2 position single solenoid Air 10 to 50C (No freezing) 10 ms or less (Standard), 15

Step Motor Controller

Refer to the dimensions on page 15 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Electric Actuator

parallel) Series LEYG (In-line motor) Size Stroke Pushing force lbf (N) Size Stroke Pushing force lbf (N) Size Stroke Pushing force lbf (N) Size Stroke Pushing force (mm) (mm) (mm) lbf (N) (mm) 25 32 25 32 25 32 30 to 300 25 32 109.0 (485) 132.2 (588) Up tp 400 Up tp 500 109.0 (485) 165.5 (736) Up to 400 Up to 500 109.0 (485) 132.2 (588) 109.0 (485) 165.5 (736) 30 to 300 Slider Type Step

LEC-OM02904

0.5 LECSS-S7 LE-S70.5 25 15 0.5 LECSS-S8 LE-S80.9 35 15 0.7 1.

Information

) Three phase 200 to 230 VAC (50/60 Hz) PC Regeneration option Option Page 15 Part no.: LEC-MR-RB-m Option Motor cable I/O connector Part no.: LE-CSNS Page 15 Page 15 Standard cable Robotic cable LE-CSM-Smm LE-CSM-Rmm Page 10 Control circuit power supply connector (Accessory) Lock cable Page 15 CN1A Standard cable Robotic cable LE-CSB-Smm LE-CSB-Rmm CN1A CN1B Electric actuator Motor connector

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 32 (4 Port/Base Mounted Common SUP Common EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)