REA/REB

Max. load weight CX 2 = M/Mmax Review M1, M2, M3. Mmax is the allowable moment. 2. Static moment CY 3 = Me/Memax Review Me1, Me3. Memax is the allowable moment. 3.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

rail 8 2-M3 x 0.5, depth 3.5 2-M2 x 0.4, depth 3 For magnet mounting For rail mounting 4.7 2.5 6-M3 x 0.5, depth 4 15 15 L (mm) Model G M N W H S Z J V K L MXP10-10 8 21 6.5 40 32 10 60 52.4 44 20 20 MXP10-20 20 39 7.5 65 50 20 90 82.4 74 36 36 8-8-16 16 Precision Air Slide Table Series MXP Dimensions: MXP10 with Shock Absorber Z 3 V 2-M3 x 0.5, depth 5 K 5 MX N M MTS Max. 19 Stroke: S MY

PSxx-OMR0001CN

-B() ZS-31-C() -35No.PS-OMR0001CN-J 3 ISA-19-() 4 1 3 2 ISA-19-2/3(5 ) ISA-19-4/5/6(8 ) M12 -36No.PS-OMR0001CN-J 3 () ISA3-N DC+ OUT1 N.C.

ZP

) Except 2, 4 26(20) Except 2, 4 27() Except 2, 4 (19) 26 (20) 27 () 29 (23) 30 (22) 29 (23) 31 (22) ZPR10 29 (23) 31 (21) 29 (23) 31 (22) ZPR13 31 (23) 31 (22) ZPR16 ZPR20 (51) 65 (50) 68 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) (51) 57 (50) 61 (48) ZPR25 ZPR32 64 (56) 67 (54) 64 (56) 67 (54) 65 (57) 68 (55) 64 (56) 67 (54) 66 (58) 69 (56) 66 (58) 69 (56) 67 (59) 70 (57) ZPR40

Battery-less

Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

Rotary Table/

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

CLQ

1) Remove the dust cover. 2) Supply air pressure of 0.2MPa or more to the unlocking port, and set the lock ring to the perpendicular position. 3) Screw the unlocking bolt which is included (hexagon socket head cap screw/20, 25: M3 x 5l, 32: M3 x 10l) into the lock ring to hold the unlocked condition. Unlocking bolt Unlocking port Dust cover 2.

Refrigerated Air Dryers

Corrected air flow capacity = Air flow rate (Correction factor A x B x C x D) 4 Corrected air flow capacity = 0.3 m3/min (0.82 x 0.96 x 1 x 0.88) = 0.43 m3/min Corrected air flow capacity = 0.4 m3/min (0.95 x 0.93 x 1 x 0.88) = 0.51 m3/min 5 Select the model.

AC Servo Motor Driver

4.4.6 Trouble at start-up . 4 -19 5.

Fieldbus system EtherCAT compatible SI Unit

VDC. 17 Power supply voltage level for output is below 19 VDC. 18 19 Disconnection between the units.

Floating Joint

25 25 30 30 30 38 38 47 58 58 69 89 44 52 52 67 67 67 82.5 82.5 98.5 123 123 155 213 12 16 16 19 19 19 22 22 25 32 32 70 90 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 18 24 24 30 30 30 34 34 42 48 48 54 74 8 10 10 12 12 12 16 16 20 24 27 27 33 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 48 38 44 44 57.5 57.5 57.5 71.5 71.5 86 107 107 102 144 13 17 17 22 22 22 27 27 32 41 41 41 55 0.09 0.18

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

One-touch Fittings

17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc 8 1/8 KQ2E08-01G M16 x 1 17 19 24.1 6.7 13 17 14.2 26.1 18 6 30.5 1/4 KQ2E08-02G M16 x 1 17 19 28.4 11 13 17 14.2 26.1 18 6 33.1 3/8 KQ2E08-03G M16 x 1 19 19 31.7 14.3 13 17 14.2 26.1 18 6 37.4 L1 M L2 10 1/4 KQ2E10-02G M20 x 1 22 24 29.3 9.9 15.6 21 15.6 41.5 29.5 7.5 63.8 3/8 KQ2E10-03G M20 x 1 22 24 31.4 12 15.6

High Purity Chemical Valve

Dimensions LLHmA-mm Stations 4 x Mounting hole for W Y K A D E L2 L1 N Non-locking type Locking type L3 G 60 (H1) (H2) C SMC SMC SMC SMC V 1/4 1/4 1/4 U 3/8 Pitch = B 2 x P port n x A port (mm) Dimensions (mm) A B C D E G H1 H2 K N U V W Y Station Model LLH2A LLH3A LLH4A 2 3 4 5 Model 46.5 31 65 67 19 10 85.5 87 18 27 19 34 M4 5.5 Symbol L1 L2 L3 L1 L2 L3 L1 L2 L3 47 36.5 94.5 76 27.5 19

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX3000 2 position single

•

ZPR10g 10 12 12 21 29.9 46 20 67 25 72 3 17 27 ( ::) 2PR02 26 '-I 26 27 ('J;) \ .2PR08 ZPR13g 13 15 12 21 29.9 46 20 67 25 72 3 1.B ( '2~4' ZPR16g 16 '8 12.5 21 .5 29 30 30.4 46.5 20 67.5 25 72.5 3.5 1.2 ZPR'1O 29 31 29 31 29 31 ZPR13 Deep type (mm) Model A 'B C D E F 1:M5xO.a 1:M6x1 Y' .,G H 1 ZPRl6 31 31 G H ..

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

x 0.5 3.5 M3 x 0.5 M3 x 0.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 M3 x 0.5 4.8 20 22.5 2H9 2 11 2H9 2 M3 x 0.5 3.5 M4 x 0.7 M3 x 0.5 18 56 13.4 26.2 11.3 28 10 2H9 2 M3 x 0.5 5.3 21 24.5 2H9 2 11.5 2H9 2 M3 x 0.5 3.5 M5 x 0.8 M3 x 0.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 M3 x 0.5 5.3 25 27 2H9 2 13.5 2H9 2 M4 x 0.7 4.5 M6 x 1 M5 x 0.8 23 73.5 15.4 37.4 14.9 34.5 14 3H9 3 M4 x 0.7 6.5 29 32.5

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX5000 2 position single

7

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).