Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

LEC-OM02704CN

CR 8 9 10 11 ST1 12 ST2 13 14 15 16 17 / MD0 18 DOG DOG 19 20 21 22 23 24 / TSTP 1 DI0 25 2 DI1 26 3 DI2 27 CDP 4 DI3 28 5 DI4 29 6 DI5 30 7 DI6 31 8 DI7 14 26 14 (4) ON/OFF (a) [1][2][C][0] [1][2] [C][0] (b) b31 b 1 b 0 1 ON 0 OFF bit 16 bit CN6 bit CN6 bit CN6 bit CN6 0 14 8 16 24 1 15 9 17 25 2 16 10 18 26 3 11 19 27 4 12 20 28 5 13 21 29 6 14 22 30 7 15 23 31 14 27 14 (5)

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

5 Port Solenoid Valve SY Series

AN120-M5 AS3001F-06 AN110-01 SY3120-C6 SY3140-01 T0604 x 1 m T0806 x 1 m AS3001F-06 T0604 x 1 m T0806 x 1 m AS3001F-08 AS3001F-06 SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m T0604 x 1 m T0604 x 1 m T1209 x 1 m T1075 x 1 m AS4001F-10 SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

10

Av = Q (8) P Av : Flow coefficient [m2] Q : Flow rate [m3/s] P : Pressure difference [Pa] : Fluid density [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

Table of Contents

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 06 C6 1 1 L CE compliant 10 CE compliant Nil Q Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 06 C6 1 1 L CE compliant 10 CE compliant Nil Q Note) For CE compliant models, DC-type only.

Speed Controller: Standard Type Series AS In-line Type

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Miniature Fittings M3, R(PT) 1/8, M5 Series M

KFV-04 KFV-06 KFN-04 KFN-06 KFW-04 KFW-06 KFS-04 KFS-06 4/2.5 6/4 KFV-08U 8/5 KFV-08N 8/6 KFV-10U 10/6.5 KFV-10N 10/7.5 KFV-12U 12/8 KFV-12N 12/9 4 6 KFN-08 8 KFN-10 10 KFN-12 12 4/2.5 6/4 KFW-08U 8/5 KFW-08N 8/6 KFW-10U 10/6.5 KFW-10N 10/7.5 KFW-12U 12/8 KFW-12N 12/9 4 6 KFS-08 8 KFS-10 10 KFS-12 12 Precautions Be sure to read before handling.

5 Port Solenoid Valve

-19 (M3 x 26) 2 VF Valve + Restrictor spacer (VVQ4000-20A1 5 ) q AXT632-17-10 (M3 x 62) 3 VP4 q w w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

A leakage current breaker having Ig of 15[mA] is used with the NV-SP/SW/CP/CW/HW series. 11 31 11. OPTIONS AND AUXILIARY EQUIPMENT 11.9 EMC filter (recommended) For compliance with the EMC directive of the EN Standard, it is recommended to use the following filter.

48

How to Order Needle Valve/Flow Rate Characteristics 0 2 F A 1 AS 1 M3 X790 06 AS1201F-M350 45 40 35 30 25 20 15 10 5 0 0.5 0 1 1.5 2 2.5 3 3.5 4 4.5 5 6 7 8 Inlet pressure: 0.5 MPa Port size Push-lock type Body size Flow rate [L/min (ANR)] 1 M3 x 0.5 M3 M3 x 0.5 Applicable tubing O.D.

Applicable Auto Switch Model

(Tightening torque of M3 screw should be 0.5 to 0.7Nm.) tModification of the detecting position should be made in the condition of e.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Mount of single unit 24 or more 0 0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) ZSE ISE 31 0 0.4 0 0.4 31 ZSP PS ISA PSE IS ISG ZSM Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 851 Series PSE300 Dimensions PSE3T 38 8 x M3 3 x 7.2 (= 21.6) Front protective cover (Option) 2 x 3.4 mounting hole (Rotate 90 to mount) 6.4 2 x 6.4 1 2 3 4 35.5 28

100

m3/year 15 s 150 L/min (ANR) ON/OFF operation can be set freely within the set value range.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Round Type Hydraulic Cylinder

Pass the auto switch mounting screw (M3) supplied with the auto switch mounting band from the through-hole side of the auto switch mounting band and engage it with the M3 female thread of the auto switch mounting band through the through-hole in the switch bracket. 5. Tighten the auto switch mounting screw with the specified tightening torque (0.6 to 0.7 Nm). 6.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.