Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

from the 1st station on the D-side.

Table of Contents

Max. 16 stations C3, C4, C6, M5 C6 VQ1000 Side D-sub Connector (25 pins) D side U side Stations 1 2 3 Cable assembly 015 030 050 AXT100-DS25Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

SMC Electronic Switch Series Variations

Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected

SY

D side D B M C8 8 One-touch fitting 2 to 16 stations FU1 Fuji Electric Co., Ltd.

CRB2/CRBU2/CRB1

, D-R80, D-T79.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

position U U side D D side Stations SS5Y3-45FD-05U-C6-Q .1 set (Type 45F, D-sub connector 5 station manifold base part no.)

0.4

D-G

C76

D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5

C76

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

/N.O. 1 2 3 Station D side U side 4 position dual 3 port valve: N.C./N.O. Manual override Pilot specifications Non-locking push type Nil Internal pilot Nil R External pilot Slotted locking type D Note) 4 position dual 3 port valves are not available with external pilot specification.

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5

Series VQ Base Mounted Metal Seal/Rubber Seal

Write sequentially from the 1st station on the D side.

ZSM1-115/121

ISG Supply pressure normal Supply pressure drop Supply pressure increase ZSM P1 Set value Vacuum P1 P2 Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 P2 n1 n2 n1 n2 P2 Filled pressure Set value Reverse mode AUTO-SHIFT input n1 n2 Time Normal mode Operating normally Operating normally Operating normally ON OFF Time Time ON When the Auto Shift Function is used

5 Port Solenoid Valve Series VQZ1000/2000/3000

The dashed lines indicate the DIN rail mounting [-D].

5 Port Solenoid Valve, Series VQC

D-side How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Unit: g Model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Auto Switch Dimensions Auto Switch Internal Circuit D-M9 M2.5 x 4l mounting hole Slotted set screw Indicator light D-M9B, N, P D-M9N DC(+) Brown 2.6 Main circuit of switch Main circuit of switch Main circuit of switch OUT Black 2.7 2.8 4 22 DC(-) Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC(+) Brown 22