3 Port Air Operated Valve Series SYJA300

Type 20R Applicable solenoid valve SYJ312RSYJ322RHow to Order SS3YJ3 20R 05 A port M3 x 0.5 Applicable blanking plate assembly SYJ300-10-1A Stations P, R port thread type 02 2 stations Nil Rc : : X P R 00F R port G 20 20 stations 1/8 X port (External pilot type) M5 x 0.8 00N NPT P port 00T NPTF 1/8 Note) For more than 10 stations, supply/exhaust air to/from both sides of P port and R port

Process Valve Series VNA

Specifications Pilot Solenoid Valve Specifications VNC2 to 9 VNC2 to 9 (CE compliant) Fluid (Main piping) VNCA VNCB Coolant Note 2) VNC1 Model 5 to 60C Note 1) Fluid temperature VO301-00T-X302 VO307-00 D DZ-Q Grommet Grommet terminal Conduit terminal DIN terminal SF4--23 Pilot solenoid valve 5 to 99C(Air operated type only) Note 1) Ambient temperature Proof pressure 5 to 50C (Air operated

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

The overall manifold width is L3 for direct mounting without DIN rail. 1.2-54 SV SY SY SYJ SX VK VZ VF VFR VP7 VQC SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 1.2-55 SY3000/5000/7000 Body Ported Type Manifold Bar Stock/Flat Ribbon Cable Type20P How to Order Manifold Assemblies (Example) How to Order Manifolds Q 20P SS5Y 05 5 Thread Rc (PT) Manifold series G (PF) NPTF 00N NPT 3 SY3000 5 SY5000 00T

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

VNC

VN5-A3CA VN5-A3CB VN6-A3CA VN6-A3CB VN7-A3CA VN7-A3CB VN3-A3CA VN3-A3CB VN4-A3CA VN4-A3CB VN4-12CA VN4-12CB NBR VN1-A3CA VN1-A3CB VN2-A3CA Plate ass'y Valve material e FKM NBR VN2-A3CB VN2-12CA VN2-12CB Valve material t Valve cover AS568-010 AS568-011 AS568-012 (32A to 50A are O-ring.) i Pilot solenoid valve SF4--23 FKM VO301-00T-X302 (Refer to page 17-4-29 for part no.)

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 SV SZ Type 40 (5

5 Port Air Operated Valve

VV5FA1 3 04 31 Individual exhaust (VFA1000 only) Thread type Nil 00F 00N 00T Manifold model Stations 02 Rc G NPT NPTF 2 stations Symbol 31 P, R Port size 1/8 EA, EB Port size M5 20 20 stations Note) When placing an order for body ported valve as a single unit, mounting screws for manifold and gasket are not attached. Order them separately, if necessary.

VZ3000

VP4 Stations P, R port thread type Series VZ300 Body ported 4(A), 2(B) port 03 3 stations VZS Nil Rc G NPT Adapter plate assembly 12 12 stations 00F VFS 1(P) port Rc 1/8 00N Manifold gasket Round head combination screw NPTF 00T VS4 Rc 1/8 3/5 (R) port Adapter plate VQ7 Option Adapter gasket EVS Blanking Plate Assembly Combinations of Solenoid Valve, Gasket and Manifold Base DXT192-13-1A

VZ5000

Flat Ribbon Cable Type 21P How to Order VQ7 05 1 3 5 6 VV5Z5 21P 01 C6 C8 VZ523MOZEVS Applicable blanking plate assembly DXT199-22-3A Applicable connector assembly DXT192-52-1A (For 2 position single) DXT192-52-1A (For 2 position double, 3 position) 1: 100 VAC, 3: 110 VAC, 4: DC Stations P, R port thread type VFN 4(A), 2(B) port 03 3 stations NPT G Nil Rc 12 00F 12 stations 00N NPTF 00T

5 Port Solenoid Valve Series SQ1000/2000

position 4 position One-touch fitting Effective area mm (Cv factor) Single/Double Double (Latching/ Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T

Manifold Specifications

VP4 Stations P, R port thread type Series VZ300 Body ported 4(A), 2(B) port 03 3 stations VZS Nil Rc G NPT Adapter plate assembly 12 12 stations 00F VFS 1(P) port Rc 1/8 00N Manifold gasket Round head combination screw NPTF 00T VS4 Rc 1/8 3/5 (R) port Adapter plate VQ7 Option Adapter gasket EVS Blanking Plate Assembly Combinations of Solenoid Valve, Gasket and Manifold Base DXT192-13-1A

Manifold Specifications

Prefix it to the part nos. of the solenoid valve, etc. 3-3-60 5 Port Solenoid Valve Body Ported Series VZ5000 Common SUP/Common EXH Type 20 How to Order Stations VV5Z5 05 20 1 4(A), 2(B) port P, R port thread type 02 2 stations 1(P) port NPT G Nil Rc Rc 1/8 Applicable solenoid valve 15 15 stations 00F Rc 1/8 3/5(R) port VK 00N G L M D 01 C6 C8 NPTF 00T VZ52VZ Note) For more than 6 stations

Stations: 2 Stations, Option: N (Name Plate), One-touch Fitting: 00T (N9 5/16" One-touch Fitting)