4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

4/5 Port Air Operated Valve SYJA3000 Series

center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2 x M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2 x M3 x 0.5 (Pilot port) (For mounting) 2 x 3.2 22 3 49 2.5 (For mounting) 2 x 3.2 equivalent (18.5) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2 x 1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2 x 1 (Bleed port)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

VK3000

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

0.4

connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Vacuum

(mm) 2, 4,6, 8, 10. 13, 16, 2 0 , 2 5 , 3 2 , 4 0 , 5 0 10, 13, 16,20 25,32, 40, 50 10,16,25,406,8, 10,13, 16,20 25,32, 40, 50 :otqq, NBR (black). Silicone (while). Urethane (brownl, Fluorine (black with markl NBR (50"), Sil'cone (40"), Urethane (60"), Fluoine (60") , : l . . : ] ] : l l How to Order Pad dia.

Series VQ Metal Seal/Rubber Seal Body Ported

0.5MPa Load factor 50% Piping length 5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS-FG AS-FG N AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-06 AS121F-M5-07 1/4" M5 x 0.8 M5 x 0.8 13.5 11.7 18.3 23.1 7 13.5 12 18.1 6 11.6 22.9 AS121F-U10/32-06 AS121F-U10/32-07 1/4" 10-32UNF 10-32UNF AS221F-01-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

44

1/2 10 14 10 14 10 14 19.4 23.8 19.4 23.8 20.9 25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10

JXCx-OMT0061CN

) 70 L 4 Address F8 H H= L= 44 - (1) [IN]() PLC RWr RWr bit 0 10.1.2 (1)[ ](P.40) Address 5 F0 L (0) 10.1.2 (1)[ ](P.40) 6 F0 H DATA(H) 00h*3 10.1.2 (1)[ ](P.40) 70 1 7 DATA(L) F8 2 70 3 10.1.2 (1)[ ](P.40) F8 4 8 9.5.1 (P.30)RWw1 Sub Function 80h OR() 9 F0 Sub Function *3 10 F0 Address 9.5.1 (P.30)00h*3 11 F0 Address (0) 0 12 F0 DATA(H) *3 13 F0 DATA(L) 00h *3 14 F0 15

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

plug connector with cover (LL) 52-SY5120-LL-01 (-F2) Insulation: Red (+) Insulation: Black () 4.1 0.3 mm2 12 14.7 L 104 (Lead wire length) Cable type (TT) 52-SY5120-TT-01 (-F2) Lead wire marking No.1 (+), No.2 () 5.9 0.75 mm2 L 120.8 (Lead wire length) Max.10 5 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5220-L-01 (-F2) 22.6 16.7

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

SFOD-OMT0005CN

01-194) Over current E <> -66- <> <> I sent ALM (1-195) E <> (01-196) E <> <>EEPROM (01-197) E <> (EEPROM 10 ) <>CPU (CPU ) CPU (01-198) CPU E <> *1 (code)-3 Byte16-19 10 -67- 16/ A () (50mm ) () ( ) 5m 5m 10%(15m 20%) -68- 17/ 17.1.

HRX-OM-W038

40 2000 2000 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz *The cooling capacity will be reduced by 300W when option: T and MT are selected.

HRX-OM-R005

HRS060--20-(BJM) 0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility