ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Fluoropolymer Piping Equipment

M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.

AW

u r t r t i i e Drain AW20(K) t w i y Drain q AW20K to AW60K (Filter Regulator with Backflow Function) IN OUT u A-A o Drain A r t i SMC K P C U O S L H o t A Drain Component Parts No.

air-filter-e

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

KB

1 8 29.0 32.0 27.5 35.5 17 17.6 R 1 4 R 3 8 R 1 4 R 3 8 R 1 2 R 3 8 R 1 2 19 25.2 31.0 22 35.5 31.5 24 27.0 Reference dimensions after R thread installation.

Air Preparation Equipment

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

51.2 48.5 (92) Cable type (TT) 52-SY9240 (R) -TT03 04 Max.10 L 217.6 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 (108.8) 21 ATEX Compliant Base Mounted Type Series 52-SY9000 Dimensions 29 30 3-position closed centre/exhaust centre/ pressure centre L plug connector (L) 17.5 52-SY9440 (R) -L03 04 3 5 123 51.2 86.5 Manual override 2 x 5.4 (Mounting holes) 1/8" (External

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

VCC

00 02 04 No 2 port valves used 2 pcs.

E-P HYREG

00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 3(R) 1 4 1 1 2 2(A) 1(P) 9 2 2 Note

AC Servo Motor Driver (Pulse input type/Positioning type ）

Speed Rated speed 0 r/min Time [Pr. PC01] setting (0 mm/s) [Pr. PC02] setting For example for the servo motor of 3000 r/min rated speed, set 3000 (3 s) to increase the speed from 0 r/min to 1000 r/min in 1 second.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

5-Port Solenoid Valve

0 Manual override q w r e t y u i o !0 !

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

Check Valve Series AK 1

R thread Applicable tubing O.D.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Suction Guard (Produced upon receipt of order) FHG Series

Port size q Seal order no. r Seal order no. t Seal order no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

R.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.