Electric Actuator

LEY ll -lB 16 25 32 A B C With motor cover/LEY ll -lC 16 25 32 Motor cable Motor cable Motor cable (2 x 5) Step motor Servo motor Step motor Servo motor 15 15 Lock cable (3.5) 20 24 Lock cable 20 20 20 20 24 Cable length 400 Motor cable Cable length 250 65 24 65 20 24 Motor cable (2 x 5) W X X2 [mm] [mm] T2 X2 Size T2 Step motor Servo motor Size W X W X 16 25 32 7.5 83 16 25 32 105.8 124.3

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Sine Rodless Cylinder Series REA/REB

0 Moment (Nm) 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 25 25 Moment (Nm) REAHT25,32 REAHT25,32 REAHT25,32 REA 0.05 REAHT25 REAHT25 REAHT32 REAHT25 REAHT32 REB Deflection (mm) Deflection (mm) 0.03 0.04 0.02 REC 0.03 REAHT32 0.02 0.02 0.01 CY 0.01 0.01 CX 20 40 0 60 20 40 0 60 80 20 40 0 60 Moment (Nm) Moment (Nm) Moment (Nm) MQ Note) Deflection when a moment other than the above is applied

AC Servo Motor Driver (Pulse input type/Positioning type ）

B1 AWG 20 B2 Note.

CY1

25 32 40 50 63 CY1B Basic type Non-integrated guide 6 10 15 20 25 32 40 50 63 Basic type Direct mount CY1R Magnetic rodless cylinder 6 10 15 20 25 32 40 Slide bearing type CY1S 6 10 15 20 25 32 40 Ball bushing type CY1L Integrated guide 10 15 20 High precision guide type CY1H 25 (1 shaft) 25 (2 shafts) 32 Bilateral piping Centralized piping The piping type for CY1R6 is bilateral piping only

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

/25 CY1H15/20/25 CY1H15/20/25 CY1H15/20 CY1H15/20 CY1H25 CY1H15/20 CY1H25 0.08 0.03 CY1H25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) CY1HT25/32 CY1HT25/32 CY1HT25/32 0.05 CY1HT25 CY1HT25 CY1HT32 CY1HT25 CY1HT32 0.03 Deflection (mm) Deflection (mm) 0.04

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1000 1500 1500 800 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 400 500 500 200 Ly Lx 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 Work load [kg] Work load [kg] Work load [kg] 808 A Model Selection LEFB Series Motorless Type Table Accuracy (Reference

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

CATALOG VC10

40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

TABLE OF CONTENTS

40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Table B FLOW CONFIGURATION VALVE NO.

REA/REB

In cases without auto switches, there are switch rails only. 10 10 mm 15 15 mm 20 20 mm 25 25 mm 32 32 mm 40 40 mm Standard stroke Refer to Standard Stroke on page 10-2-25. Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

REA/REB

25 REAH15, 20, 25 REAH15, 20, 25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 High Precision Guide Type REAH 0.08 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.03 REAH25 0.02 0.06 0.02 0.04 0.01 0.01 0.02 Max.

Secondary Batteries

Bore size Cylinder stroke (mm) 12 16 20 25 32 40 50 63 80 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Built-in Magnet Cylinder Model 12, 16 20, 25 32, 40 50 to 100 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 If a built-in magnet cylinder without an auto switch is

Hygienic Design Cylinder Series HY

Standard Stroke Bore size (mm) Standard stroke (mm) 20 25 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Intermediate strokes of 1 mm each can be produced.

AC Servo Motor Driver (Network card type ）

(P980) . 20-19 20.4.4 Identification & Maintenance (I&M) . 20-20 20.4.5 Reset To Factory . 20-21 20.5 STATE TRANSITION . 20-22 20.5.1 Basic State Machine . 20-22 20.5.2 FSA state . 20-25 20.5.3 Controlword/Statusword . 20-27 20.5.3.1 Controlword . 20-27 20.5.3.2 Statusword . 20-30 20.6 CONTROL MODE . 20-36 20.6.1 Selection of control mode . 20-36 20.6.2 Control switching . 20-37 20.6.3 Profile

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121 133 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21

5 Port Solenoid Valve Series SY3000/5000/7000/9000

radius of D-sub cable assembly is 20 mm. 25 White None Connector manufacturers example Hirose Electric Co., Ltd.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSL3-16D MHSL3-16D 25 25 Pressure 0.6 MPa 20 20 Pressure 0.6 MPa Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 15 15 0.4 MPa 0.4 MPa 10 10 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 5 5 F 0 0 5 5 10 10 20 20 25 25 30 30 15 15 Gripping point L (mm) Gripping point L (mm) F F MHSL3-20D MHSL3-20D 40 Pressure 0.6 MPa 35 MHZ Pressure 0.6 MPa External grip 35 30 0.5 MPa 0.5 MPa MHF 30 25 25 20 20