CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VV4Z1-25Station U-00C L plug connector (L) M plug connector (M) DIN terminal (D) (Pitch) D side U side (Station n)(Station 1) Applicable cable O.D. 3.5 to 7 (mm) 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

Compressed Air Cleaning Filter Series

(4B)JIS 10K FF flange 400 A 280 B 445 150(6B) C 300(12B) 760 D 795 150 E 300 270 F 520 1033 G 1318 3 H 3 887 J 620 AMD801/811 AMD91 972 AMD800/810/90/100 ORIENTATION IN OUT 3 x H holes IN OUT Label Drain (mm) Model 500 A 300 B 200(8B) C 300 D 1300 E 1430 F 1520 G 20 H Connection (Flange) 50(2B), 80(3B)JIS 10K FF flange 50(2B), 80(3B), 100(4B)JIS 10K FF flange 100(4B), 150(6B)JIS 10K FF flange

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

Hydraulic Filters

(including O-ring for element) With relief valve Without relief valve 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Model Element size FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 EM520-074N EM620-074N EM720-074N EM820-074N EM920-074N EM030-074N EM130-074N EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

EX120/121/122

Hz with a 0.7 mm amplitude or 50 m/s2 in each X, Y, Z direction for 2 hrs (De-energized) Impact resistance 150 m/s2 in each X, Y, Z direction, 3 times (De-energized) Standard CE marking, UL (CSA) Mass 100 g (Input unit + End block) Input Block Specifications Model EX500-IE1 EX500-IE2 EX500-IE3 EX500-IE4 EX500-IE5 EX500-IE6 PNP sensor input NPN sensor input Input type NPN sensor input PNP

Table of Contents

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

Electric Actuator Miniature Rod Type Miniature Slide table Type

Move M Speed Position Accel Decel PushingF TriggerLV PushingSp MovingF Area1 Area2 In pos mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 Absolute 100 0.00 3000 3000 0 0 0 150 15.00 20.00 0.50 1 Absolute 100 25.00 3000 3000 0 0 0 150 15.00 20.00 0.50 2 Absolute 100 15.00 3000 3000 85 85 20 150 15.00 20.00 5.00 Condition 1) In case the pushing operation is Step no.0 to Step no.2.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Dual Rod Cylinder Series CXSJ/CXS

, 125, 150 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

smcmaintenancepartslist

size 32 3 to 4 1 125 15 to 17 3 100 8 to 10 2 80 6 to 8 1.5 63 4 to 5 1.5 50 3 to 5 1 40 3 to 4 1 100 st Extra 50 st 344 Series CL1 40 to 100 Replacement Procedure of Seal 3 6.

Ionizer Gun

1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350

Thermo-chiller

RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

CY1

, 150, 200 6 500 50, 100, 150, 200, 250, 300 10 50, 100, 150, 200, 250, 300, 350 400, 450, 500 15 1000 20 2000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25 4000 32 5000 40 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 50 6000 63 Note) Contact SMC if the maximum stroke will be exceeded.

240

[kg] Work load [kg] 200 200 200 200 160 160 160 160 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 120 120 120 120 X 80 80 80 80 Me m 40 40 40 40 0 0.2 0.4 0.6 0.8 1 0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50

Membrane Air Dryer

. 170 240 300 40 75 110 Note) Type V is not applicable because it is equipped 50 100 150 60 with a relief type regulator.

Slider Type Ball Screw Drive/11-LEFS Series

force is 100%.

7

Note2) The standard strokes of CKG1 are 50, 75, 100, 125 and 150 mm.