Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Note 2) Refer to Manifold Option on page 100.

ZP

ZP2-XF80HB(JB/JF)25 ZP2-XF80HB(JB/JF)50 ZP2-XF80HB(JB/JF)75 ZP2-XF80HB(JB/JF)100 ZP2-XF100HB(JB/JF)25 ZP2-XF100HB(JB/JF)50 ZP2-XF100HB(JB/JF)75 ZP2-XF100HB(JB/JF)100 ZP2-XF125HB(JB/JF)25 ZP2-XF125HB(JB/JF)50 ZP2-XF125HB(JB/JF)75 ZP2-XF125HB(JB/JF)100 250 267 63 65 46 68 31.5 40.6 21.5 100 103 69 107 47.5 57.6 35.5 290 307 325 342 219.5 239.5 255.5 275.5 80 83 58 85 37 46.1 27.5 125 129 89

ITV

0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Supply pressure (MPa) Series ITV205 Linearity Hysteresis Repeatability 1.0 0.9 1.0 0.5 Output deviation factor (%F.S.)

LJ1H

Positioning distance (mm) 1 10 100 250 500 10 0.4 1.3 10.3 25.3 50.3 100 0.4 0.5 1.4 2.9 5.4 Speed (mm/s) 300 0.4 0.5 0.8 1.3 2.1 600 0.4 0.5 0.7 1.0 1.4 Values will vary slightly depending on the operating conditions.

JXCx-OMU0004

90 1200 200 1200 90 1200 10 175 1400 100 1400 225 1400 100 1400 11 200 1600 110 1600 250 1600 120 1600 12 225 1800 120 1800 275 1800 140 1800 13 250 2000 130 2000 300 2000 160 2000 14 275 2500 140 2500 325 2500 180 2500 15 300 3000 150 3000 350 3000 200 3000 60 No.JXC-OMU0004-A 10.7 LEL LEL LEL [mm/s] 80 2] 1000 [mm/s [mm/s] 100 2] 1000 [mm/s [mm] 10 LEL LEL25M LEL25L 2] 2] [mm/s]

20

VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5

Table of Contents

Selection ZL112 ZL212 Exhaust Characteristics Exhaust Characteristics ZX 100 90 100 90 Vacuum pressure Vacuum pressure 300 150 Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Suction flow rate (/min (ANR)) Air consumption (/min (ANR)) 250 125 Vacuum pressure (kPa) Vacuum pressure (kPa) ZR 80 80 Suction flow rate Suction flow rate 70 70 200 100 60 60 ZM Air consumption Air consumption

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

70 100 1000 70 100 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

High Power Cylinder Series RHC

100 110.5 0 138 1,000 2,000 3,000 88.5 Maximum speed Vmax [mm/s] Note) Since the cushion capacity may be exceeded in high speed, high load operation, confirm the maximum energy absorption on page 2. 100 250 =0.7 200 0.5 150 0.1 0.3 100 50 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] : Cylinder load factor Vmax : Maximum speed (Refer to page 24) 16

Adsorption Plate

Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

SQ1000/2000

Metal seal Closed center SQ1000 SQ1331 33 or less 3.2 (0.18) 25 or less 100 Rubber seal SQ1430 26 or less 3.2 (0.18) 20 or less 100 Metal seal Exhaust center SQ1431 33 or less 4.5 (0.25) 25 or less 100 Rubber seal SQ1530 26 or less 2.9 (0.16) 20 or less 100 Metal seal Pressure center SQ1531 33 or less 3.2 (0.18) 25 or less 100 Rubber seal Dual 3 port valve A B C SQ1 31 33 or less 3.2 (0.18

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

C92

Bore size (mm) Max. stroke Standard stroke (mm) MB1 32 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 CP95 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C92 100 1900 25, 50, 80, 100, 125,

Booster Regulator/Air Tank

100 200 1 0.5 30 0.5 0.8 Provide requisite conditions for selection.

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

0.4

L8 = 16n + 118.5 100 Drawing shows a SC case.

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300