C85

Bore size Stroke Max. stroke (mm) Bore size (mm) Standard stroke (mm) Standard Non-rotating Double rod 8 10 12 16 20 25 10, 25, 40, 50, 80, 100 100 100 400 10, 25, 40, 50, 80, 100, 125, 160, 200 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 200 200 1000 1000 500 Not available with air cushion. Other strokes available on request.

XL-OMV0002

138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1 2 3 3 2 1 4 162540 50,63,80,100,160 O O O O 50 4 5 6 3 3 2 1 4 2 1 Nm 4 0.7 XLC-16 1.5 -25 2.5 -40 6 -50 6 -63 15 -80 20 -100 25 -160 O O O O

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB2 -032 BMB2 -040 BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 MDB 9-15-71 72 Technical Data 2: How to Mount and Move the Auto Switch Mounting

Compact Manifold Regulator Series ARM5

250 0 0 50 100 150 200 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa ARM5AA1-308 (One-touch fittings: IN/OUT 6) ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Condition: Inlet

Vacuum Ejector Series ZM

setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 200 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 200 setting (ZSE1) 1 output, without analog output, 200 setting, PNP output (ZSE1) Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

Integrated Controller

L4 [mm] L4 [mm] L4 600 600 600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

13 9 198 187.5 170.5 14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External Pilot Manifold L Dimension n: Stations L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200

Electric Slide Tables

LES25/Step Motor 200 180 160 140 120 100 80 60 40 20 0 70 50 30 Lead 8: LES25K Force (N) Lead 16: LES25J Set value of pushing force [%] Step 2 Check the set value of pushing force.

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Nil N H Port thread type Bore size Nil TN TF Rc NPT G Air-hydro Lube, Non-lube 125 140 160 180 200 250 300 125 140 160 125 mm 140 mm 160 mm 180 mm 200 mm 250 mm 300 mm 125 mm 140 mm 160 mm Mounting Bracket Part No. Bore size (mm) 125 140 160 180 200 250 300 For How to Order with auto switch, refer to page 417.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-34A-, for 200/220 VAC.

Vacuum System Peripherals:

Nil 3 rotations setting 200 setting 3 rotations setting 200 setting 3 rotations setting 200 setting 18 rotations setting 18 rotations setting E14 1 point setting E15 With analog output 2 points setting E16 E17 Electronic (12 to 24 VDC) 1 point setting E18 E19 With analog output With analog output With analog output Switch model 1 point setting M15 Diaphragm solid state switch (10 to 26 VDC