MHY2/MHW2

Symbol Model Double acting (2) Opening angle (Both sides) Weight (g) Model Bore size (mm) Effective force (Nm) (1) Opening side Closing side MHW2-20D 0.30 5 300 20 MHW2-25D 0.73 6 510 25 MHZ2 MHW2-32D 1.61 180 5 910 32 MHW2-40D 3.70 5 2140 40 MHZJ2 MHW2-50D 8.27 4 5100 50 MHQ Note 1) At the pressure of 0.5MPa Note 2) Not including auto switch MHL2 Refer to the "How to Select the Applicable

MY1

500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

Series VQ Metal Seal/Rubber Seal Body Ported

Turn the manual override clockwise by 180 to set the mark to A and press it in the direction indecated by the arrow. It will be locked set in a (Passage: P A) state. Turn the manual override counterclockwise by 180 to set the mark to B and press it in the direction indicated by the arrow. It will be reset in a (Passage: P B) state. (It is reset when shipped.)

SX

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

CM2

200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 12.5 25 37.5 50 75 142 155 167 180 205 151 164 176 189 214 20 12.5 25 37.5 50 75 146 159 171 184 209 155 168 180 193 218 25 12.5 25 37.5 50 75 151 164 176 189 214 163 176 188 201 226 32 12.5 25 37.5 50 75 180 193 205 218 243 192 205 217 230 255 40 Built-in One-touch fitting With air cushion Pivot bracket (mm) Bore Bore Bore WA N1

Single Axis Electric Actuator Series LJ1H

500 150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 When an actuator

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

override 34 41 3.5 (Lead wire) 38.5 300 Cover diameter 1.6 Cross section 0.34mm2 SMC 35.5 A port PE 16 12 14.5 7 7.5 7.5 7.5 3-Rc(PT)1/8 P/A/R port M5 X 0.8 PE port L plug connector (L): VQZ115(R)-lLl-01 M plug connector (M): VQZ115(R)-lMl-01 60.5(65.5) 300 (Lead wire) Cover diameter 1.5 51.5(52.5) 300 (Lead wire) Cross section 0.23mm2 55.5(59) Indicator light Indicator light Cover dia 1.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Standard lead wire length: 300 mm.

AC Servo Motor Driver (Pulse input type/Positioning type)

PA07 1 12 6 3 12 6 3 20 10 5 16 8 4 Feel length multiplication (STM) (Multiplier) PE02 0 0 (<1000 stroke)/0001 (>1000 stroke) Home position return type PE03 0010 3 (Stopper type) Home position return direction PE03 0010 1 (Motor side) Home position return Speed (rpm) PE04 500 150 300 600 150 300 600 90 180 360 112 225 450 Home position return/JOG operation Accelerationeration/De celeration

IDG

IDG75M IDG100M IDG3HM IDG5HM IDG10HM IDG20HM IDG30HM IDG50HM IDG60HM IDG75HM IDG100HM 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 75 110 170 240 300 IDG60SM IDG75SM IDG100SM 50 100 150 Type V A regulator combined with the type M IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V IDG3HV IDG5HV IDG10HV IDG20HV IDG30HV

-fl Seies

Model Position /No. of solenoid TYPe Port size (NPTR Cv factor Max.Ooerelino Response time (ms) Weight lbs (kst Plug-in Non Plug-in cycle CPM 2 position Single NVFF3l00 NVFR3110 Y1 300 30 or less 0.68 (0.31) 2.3 Double NVFB3200 NVFR3210 11 300 30 or less 0.90 (0.41) 2.3 Closed center NVFR3300 NVFRgtl0 k 1 . 9 180 50 or less 0.95 (0.43) 2.0 Exhaust center NVFF3400 NVFR3410 k 1 . 9 '180 50

ZP

, 340 Reinforced pad to prevent deformation when transferring heavy or large work pieces How to Order ZP2 32 H N Pad unit Pad diameter Pad material Symbol Pad diameter 32 150 250 300 340 Symbol Material NBR Silicone rubber FKM CR N S F C 32 150 250 300 340 Note) Silicone rubber is only applicable to the 32 pad.

Shock Absorbers and Rate Controls

isl'r t-t 2 300 0lhy4 1 8?.6 6.4 ,7 f9.9 ( o E SC!

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

Micro Mechanical Valve Series VM1000

Weight (g) Application Actuator Model Polyacetal roller 110 140 150 150 160 180 180 180 170 Basic VZM550-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM550-01-01 VZM550-01-01S Hard steel roller One way roller lever VZM550-01-02 VZM550-01-02S Polyacetal roller Hard steel roller Straight plunger VZM550-01-05 VM VM Polyacetal

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

Table of Contents

Functions . 159 160 162 162 163 163 164 165 166 166 168 168 168 168 169 169 169 170 170 170 171 172 175 175 175 175 176 177 178 178 178 178 179 179 179 180 180 180 181 182 187 187 187 187 188 188 188 189 190 192 193 197 197 198 198 198 198 199 199 199 200 201 203 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

08-cs1w-e

Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) Kit no.