VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

Secondary Batteries

Bore size 12 16 20 25 Cylinder stroke (mm) 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 350, 400 20, 25 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 400 32 to 63 *Specifications and dimensions for the 90-series are the same as standard products.

0.5

Air flow level: 1 Discharge time [s] 20 20 Air flow level: 1 Air flow level: 1 Discharge time [s] Discharge time [s] 15 15 15 10 10 10 5 Air flow level: 4 5 5 Air flow level: 4 Air flow level: 4 0 0 300 600 900 1200 0 0 Installation distance [mm] 0 300 600 900 1200 0 300 600 900 1200 Installation distance [mm] Installation distance [mm] M Stable Static Neutralization Performance, Easier

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

MY2HT40 MY2HT40 MY2HT40 40 40 40 CX 30 30 30 MY2HT25 D20 20 MY2HT25 MY2HT25 20 -X MY2HT16 2010 10 10 MY2HT16 MY2HT16 8 8 8 Data 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston speed mm/s Piston speed mm/s Load Weight/MY2HT (Double axis) MY2HT/m1 MY2HT/m2 MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 MY2HT40 MY2HT40 MY2HT40

Electric Actuators

to 350 Note 4) Basic Compact Basic Compact Basic Compact Basic Compact Basic Compact Horizontal Max. work load [lb] Note 2) Note 3) Vertical Actuator specifications Electric specifications 20 to 300 Note 4) Horizontal 20 to 350 Note 4) Speed [mm/s] Note 3) Note 6) 20 to 300 Note 4) 20 to 300 Note 4) Vertical 20 20 to 300 Note 4) Pushing speed [mm/s] Note 5) 20 Acceleration/Deceleration

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

The proper tightening torque for screws 0.3 to 0.4 Nm Rated voltage With indicator light VZ Voltage symbol Part no. 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 VS (b) VFN Valve Mounting Circuit with Indicator Light After confirming the gasket is correctly placed under the

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CS1/CS2 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation A 800 700 600 500 400 300 200 100 0

MY2

speed mm/s Piston speed mm/s 5 Model Selection Series MY2 Moment/MY2HT (Double axis) MY2HT/M3 MY2HT/M1 MY2HT/M2 300 300 300 200 200 200 100 100 100 Moment Nm Moment Nm Moment Nm 50 50 50 MY2HT40 MY2HT40 MY2HT40 40 40 40 30 30 30 MY2HT25 20 20 20 MY2HT25 MY2HT25 MY2HT16 10 10 10 MY2HT16 MY2HT16 8 8 8 5 5 5 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400 500 1000

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(Conforming to DIN) Clip Without indicator light AXT100-20-1 Rated voltage With indicator light 16.8 Voltage symbol Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 13.8 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC 24V 12V 100V 200V 110V 220V 1. It is able to change the cylinder port between side ported and top ported.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

0.23mm2 R 3 1 P Indicator light Applicable cord O.D. 3.5 to 7 90.5 83 : AC R 3 1 P M plug connector (M) 300 (Lead wire) 92 80(81) 77(78) Indicator light Cover dia 1.5 Cross section 0.23mm2 66(71) R 3 1 P : AC Dimensins n: Station (Max.20) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 16 266 276 300 310.5 17 282 292 312.5 323 18 298 308 337.5 348 19 314 324 350 360.5 20 330 340 362.5 373

ISO Cylinder

20 M22 x 1.5 8 8 G1/8 16 20 8 8 44 17 6 M8 x 1.25 32 11 24 22 11 62 13 12 13 24 95 115 126 25 22 M22 x 1.5 10 8 G1/8 16 22 8 8 50 20 8 M10 x 1.25 32 11 30 22 11 65 17 12 13 28 104 126 137 ( ): For air cushion With Rod Boot [mm] Bore size Stroke Item AM C e f K KK h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 20 8 36 22 6 M8 x 1.25 71 84 96 109 134 159 25

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to

VFR

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 Perpendicular, upward actuation A Horizontal actuation VK VZ 0 800 700 600 500

Valve Single Unit

EB 20 (A, B port) 2-Rc 1/4 (P port) Rc 1/4 42.4 For manifold gasket positioning 2-2.2 die-cast holes 41 31.5 28 121.9 3 4 5 L plug connector (L): SX7 20-L3 4 5 M plug connector (M): SX7 20-MC8 C10 C8 C10 128.6 300 141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual

SV

Double wiring specifications 09 02 9 stations 20 Note) For 20 stations (2) 2 stations Specified layout (Up to 18 solenoids possible.)

3 Port Solenoid Valve Metal Seal Series VZ200 1

/Base Mounted Series VZ400 Dimensions: Common Exhaust Common exhaust: VV3Z4-50 (G) (L) (M) (D) With light/surge voltage suppressor Max.10 93 87.5 With light/surge voltage suppressor 300 (Lead wire length) 79.9 300 (Lead wire length) 300 (Lead wire length) 2-M5 x 0.8 (Pilot EXH) 2-M5 x 0.8 (Pilot EXH) P = 20 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5 x 0.8 Manual override (Non-locking) 11.5 11.5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

3/8 50.8 50.8 49.6 20 JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Aluminum G: Grommet GS: Grommet with PCB F K 300 D D 300 K F C C J J E IN IN E A 2 x Port size 1(IN), 2(OUT) port B1 B B1 B 2 x Port size 1(IN), 2(OUT) port A G G 2 x M thread depth N 2 x M thread depth N CS: Conduit D F K 500 NPT1/2 C J IN E B1 B A 2 x Port size 1(IN), 2(OUT) port

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Above the line in the graph: Either use a cylinder with a larger bore size or install an external stopper Graph (4) up to 300 mm/s Graph (7) up to 300 mm/s 300 1000 80 80 1000 80 250 800 63 Load mass m (kg) Load mass m (kg) 200 63 600 50 63 150 40 400 50 50 100 32 40 40 32 25 20 200 32 25 20 50 100 25 0 0 20 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Load

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

AC L type plug connector (L) : SYJ3220L M3 M type plug connector (M) : SYJ3220M -M3 71.4 37 37 7.1 7.1 About 300 1.8 1.8 (Lead wire length) 8.2 8.2 4 4 A B B A 7 21.8 (Mounting holes for manifold) 7 21.8 (Mounting holes for manifold) (Lead wire length) 39.1 [45.6] About 300 Bracket 23.2 equivalent (Mounting holes) 23.2 equivalent (Mounting holes) 18.5 18.5 28 [34.5] 28 [34.5] 20 20 15.6

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller