Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

, 100 25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS

5-Port Solenoid Valve

Applicable connector: 10 pins MIL type with strain relief (Conforming to MIL-C-83503) Applicable connector: 20 pins MIL type with strain relief (Conforming to MIL-C-83503) n: Stations 2 3 4 5 6 7 8 9 10 11 12 L1 84 100 116 132 148 164 180 196 212 228 244 L2 74 90 106 122 138 154 170 186 202 218 234 L3 110.5 135.5 148 160.5 173 198 210.5 223 248 260.5 273 L4 100 125 137.5 150 162.5 187.5 200

100

: 0.35 MPa/0.37 MPa (With valve) ZL6H (04P) Supply pressure: 0.5 MPa/0.52 MPa (With valve) 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL6H ZL6H04P ZL6M ZL6M04P Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Suction flow rate [L/min (ANR)] 200 100 400 300 600 500 700 0 Time to Reach Vacuum (Representative value

Modular Design with Uniform Body Style

50 200 Flow rate [L/min (ANR)] 0 50 100 Flow rate [L/min (ANR)] AFM30-D AFD30-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.01 0.01 P1 = 0.7 MPa P1 = 0.7 MPa 0 0 0 100 200 500 400 300 600 0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Movement MOD Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 2 1: Absolute 100 200 3000 3000 0 0 0 100 0 0 0.50 Note) The step data input range changes depending on the actuator model.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

by 90.)

Basic type / Direct mount type Series CY3B/CY3R

38 73 16.5 25.5 90 87 115 D10 12 M6 x 1.0 M14 x 1.5 Rc1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 -X 12 11.5 M8 x 1.25 M20 x 1.5 Rc1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 Individual -X PA dimensions are for split from center.

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

MNB

n = 2, 3, 4 60 + 30 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 90 + 100 (n 2) n = 2, 4, 6, 8 65 + 30 (n 2) n = 2, 4, 6, 8 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 85 + 30 (n 2) n = 2, 4, 6, 8 95 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 4, 6, 8 105 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 D-A3 D-G39 D-K39 n (Different sides) n (Same

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

30 40 50 60 70 80 90 02 Symbol Electrical entry CE/UKCAcompliant UL Standards 1/4 V 03 3/8 V V 04 1/2 V V 06 3/4 V 10 1 V 12 1 1/4 V 14 1 1/2 V 20 2 V 32 Flange 32A V 40 40A V 50 50A V 12 VDC G Grommet*1 *1 Cannot be used in combination with the aluminum body 24 VDC Thread 100 VAC 24 VDC 12 VDC 48 VAC 24 VAC Grommet with PCB (With surge voltage suppressor) GS CS Conduit (With surge

Table of Contents

245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B

Electric Rotary Table

at point A when a load is applied to point A 100 mm away from the rotation center.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 600.05 With shims 60 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 Without shims 900.05 With shims 90 12.5 12.7 12.8 12.9 13.0 14.5 14.7 14.8

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

1000 40 32 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (C rod retraction, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 50 m 1000 40 10 100 100 1000 Speed (mm/s) Series CH2G/H Load weight for horizontal motion Speed chart (extension, pressure 14MPa) 10 100 10 Load weight (kg) 80 63 m 50 1000 40 32 10 100 100 1000 Speed (mm/s) 31 Series CH2E

Vacuum Ejector Series ZM

, Standard Supply Pressure: S 0.45 MPa ZL ZM13S ZY Exhaust Characteristics Flow Characteristics ZF 90 180 90 80 160 80 ZP Vacuum pressure Vacuum pressure (kPa) Vacuum pressure (kPa) Suction flow rate l/min (ANR) Air consumption l/min (ANR) 70 140 70 SP 60 120 60 Air consumption ZCUK 50 100 50 40 40 80 AMJ 30 30 60 AMV 20 20 40 Suction flow rate 10 10 20 AEP 0 0 0 0 25 35 40 30 15 20 10 5

CY1

, 200, 300 100, 200, 300, 400, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

CG1

/50=0.31kg Calculation example: CGIKLN20-100 (Foot, 20, 100 stroke) Piston speed 50 to 500mm/s Basic, Axial foot, Front flange, Rear flange, Front trunnion, Rear trunnion, Clevis (Used for changing the port location by 90 degrees.)

Compact Manifold Regulator Series ARM5

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M 98 VVQ1000-90-7 17 16 110.5 VVQ1000-90-8 123 VVQ1000-90-9 IN side OUT side 148 VVQ1000-90-11 Fitting size 160.5 VVQ1000-90-12 Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 173 VVQ1000-90-13 4, 5/32 185.5 VVQ1000-90-14 2.5 6 11 37.5 6 198 VVQ1000-90-15 3 12.5 19 37.5 3 6.5 11 38 1/4 210.5 VVQ1000-90-16 3 12.5 19

C95

(variations as much as 30%) There may be large changes depending on the ambient environment. + Minimum length [mm] with bracket T Auto Switch 32 40 50 63 80 100 D-Z7/Z8, D-Y5/Y7 (W) D-Y6/Y7 (W) V D-Y7BA 80 85 90 90 95 100 60 55 85 90 65 90 70 100 75 105 85 110 Mounting and Movement of Auto Switches Caution!

Integrated Controller

200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 EQFS32HB/Ball Screw Drive Horizontal/Lead 8 Vertical/Lead 8 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 30 25 Work load: W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal