CL

(mm) l 40/50/63 80 100 40 50 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50/63 80 100 0.040 0.076 0.050 0.093 0.050 0.093 0.050 0.093 0.065 0.117 0.065 0.117 10 12 16 18 20 25 46 55.5 71 76.5 83 88 21 26 31 39 38 47.5 61 66.5 73 78 25.4 31.2 37.0 47.3 22 27 32 41 4 4 5 5 5 5 8 11 13 16 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 MIGAKIMARU10 MIGAKIMARU12 MIGAKIMARU16 MIGAKIMARU18 MIGAKIMARU20 MIGAKIMARU24

Rotary Actuator

Without air cushion With air cushion Angle adjustable type 50 P694020-49 P694020-50 P694020-51 63 P694030-49 P694030-50 P694030-51 80 P694040-49 P694040-50 P694040-51 100 P694050-49 P694050-50 P694050-51 Du, o, !0, !4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set.

Modular Design with Uniform Body Style

[AF] 0.1 MPa Set pressure range [AR] 0.05 to 0.85 MPa Nominal filtration rating*3 [AF] 5 m Compressed air purity class*4 ISO 8573-1:2010 [ 6 : 4 : ]*5 Drain capacity [AF] 8 cm3 25 cm3 45 cm3 Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Port size 1/2: 50 L/min (ANR) Port size 1/4: 30 L/min (ANR) Port size 3/8: 40 L/min (ANR) Min. dripping flow rate*6 [AL] 15 L/min (ANR) 50

Integrated Controller

10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg]

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

C85

3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head trunnion Clevis Bore

C85

3.2 10 65.2(72.2) 30 40 4.5 22 26 11 25 73(80) 68(75) 3.2 16 12.8 4.5 12.8 35 23.8 5 3.2 12 76(80) 40 52 5.5 30 33 14 32 86(90) 78(82) 4 20 18 5.5 18 42 32 6 4 16 82(82) 40 52 5.5 30 33 14 32 92(92) 84(84) 4 20 18 5.5 18 42 32 6 4 20 91 50 66 6.6 40 42 17 40 103 96 5 25 19 6.6 19 54 36 8 5 25 98 50 66 6.6 40 42 17 40 110 99 5 25 23 6.6 23 54 40 8 5 Rod trunnion, Head trunnion Clevis Bore

Metal Seal/Rubber Seal Series VQ Body Ported

type (Manual) Type of actuation 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) The code is L for elbow piping for all manifold stations.

C95

m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 Load weight: m (kg) Load weight: m (kg) 32 50 40 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3

Refrigerated Air Dryers Series IDF/IDU

(C) Correction factor 1.21 5 to 45 50 55 60 65 70 75 80 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 HAA HAW 1 1.25 1.00 1.07 1.10 0.82 1 0.83 1 1 AT 0.68 0.8 0.70 0.95 0.87 0.57 0.6 0.60 0.9 0.76 IDF IDU 0.86 0.74 0.82 0.72 IDFA 0.79 0.70 Data B: Ambient Temperature IDFB Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E ID IDU55E, 75E IDF120D

Table of Contents

(mm) Q1 = M Q1 = M (mm) Size Q1 = M Q1 = M 50 63 80 100 Size Shaft type Shaft type 50 63 80 100 K T K T K T K T L1 = L1 = Thread L1 = L1 = J X Z J X Z J X Z J X Z M5 x 0.8 Thread 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 6.8 6.8 L1 M8 x 1.25 Q1 Q1 K axis T axis Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 J axis Z axis 11-4-17 83 Series CRB1 (Size: 50, 63, 80,

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

However, setting "0" will be 50%. 0 0 to 100 [%] PA26 *AOP Function selection A-5 Refer to Name and function column.

CRB2/CRBU2/CRB1

(mm) Q1 = M Q1 = M Size Q1 = M Q1 = M 50 63 80 100 (mm) Shaft type Size K T K T K T K T L1 = L1 = 50 63 80 100 Thread L1 = Shaft type M5 x 0.8 L1 = J X Z J X Z J X Z J X Z 4.2 4.2 4.2 4.2 Thread M6 x 1 M5 x 0.8 5 5 5 5 4.2 4.2 4.2 4.2 M8 x 1.25 M6 x 1 6.8 6.8 L1 5 5 5 Q1 Q1 L1 M10 x 1.5 J axis Z axis Q1 Q1 M8 x 1.25 8.6 6.8 L1 L1 K axis T axis 81 Series CRB1 (Sizes: 50, 63, 80, 100)

CM2

5 !6 !7 !8 !

2/3 Port Valve

Voltage Options V S 100V AC 50/60Hz 200V AC 50/60Hz 110V AC 50/60Hz 220V AC 50/60Hz 24V DC 12V DC 240V AC 50/60Hz 48V AC 50/60Hz Other (Contact SMC separately) 1 2 3 4 5 6 7 8 9 Standard For vacuum/non-leak For steam VX Select an option symbol by the "Applicable Fluid Check List p.4.0-5 " for a special fluid out of the standard.

MGP

l (mm) 3.17-8 Compact Guide Cylinder Series MGP CL MLGC MGPL32 to 63 MGPL80 to 100 CNA Under 75 stroke Under 50 stroke CB 100 63 100 200 P=0.5MPa P=0.5MPa CV/MVG 80 50 40 50 100 40 Load weight m (kg) Load weight m (kg) 30 CXW 30 40 50 32 20 CXS 10 20 CXT 5 4 10 MX 3 5 MXU 200 2 3 4 5 20 30 40 50 10 1 100 1 100 10 200 20 30 40 50 2 3 4 5 Eccentric distance l (mm) Eccentric distance l (mm)

2 Phase Stepper Motor/Without Motor Brake Series LXP

Specifications mm kg C kg mm/s mm 50 2.0 75 2.2 100 2.3 125 2.6 150 2.8 175 2.9 200 3.1 5 to 40 (with no condensation) 6 horizontal/5 vertical Note 1) Standard stroke Body weight Operating temperature range Work load Speed Performance to 30 Note 2) Positioning repeatability 0.03 Motor 5 phase stepper motor (without brake) Ball screw 8mm, 2mm lead Ball bushing Lead screw Main parts Guide Note

Step Motor Controller

) AC servo motor (S6) 200 to 230 VAC 50/60 Hz AC servo motor (S7) AC servo motor (S8) Dimensions (mm) LECSAm 40 135 2 x 6 Mounting hole 2 x 6 Mounting hole 50 (Bearing surface thickness 5) CNP1 CNP1 CNP2 CNP2 130 120 130 120 CN1 CN1 CN3 CN3 CN2 CN2 6 6 5 5 6 5.5 LECSAm-S4 40 6 Mounting hole (Bearing surface thickness 4) 6 135 (170: LECSBm-S8) LECSBm 156 6 6 CN6 CN5 CNP1 CN3 CNP2 161 168 CN1

SYJ3000/5000/7000

/surge voltage suppressor L plug connector { } P . 1-5-26 + SYJ7000 2 position Single 2.4 4/2 5/3 (A/B EA/EB) Double { } M plug connector + For AC P . 1-5-50 Non-locking push type 3 position SYJ3000 100 VAC / Hz 110 VAC / Hz 200 VAC / Hz 220 VAC / Hz 50 60 50 Closed center 60 0.46 4/2 5/3 (A/B EA/EB) 50 60 { } Exhaust center 50 60 Note) For AC Pressure center With light/surge