Cylinder with Lock Series CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

Slider Type Ball Screw Drive/11-LEFS Series

300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS32/Ball Screw Drive Horizontal Vertical 30 50 Lead B Lead B 40 Work load: W [kg] Work load: W [kg] 20 30 Lead A Lead A 20 Lead H 10 Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 30 60 Lead B Work load:

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

50.6 [57.6] (Lead wire length) Approx. 300 139.6 [144] 127 [131.4] 120 [124.4] 107.4 [111.8] 159.6 147 70.9 157.8 145.2 137.8 125.2 60 123 110.4 52.6 51.1 [53.3] 60.9 [63.1] 70 M8 x 1 44.1 26.6 53.6 64.9 72.4 Max. 10 Pg7 Note) Refer to page 176 for dimensions of connector types.

7.5

(M3) 30.6 (Lead wire length) 9.9 5.3 Silencer (Air discharge port) 4(A) port side: Blue 2(B) port side: Yellow Approx. 300 (Built-in silencer spec.)

Large Size Vacuum Module: Series ZR

pressure Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) Air consumption (l/min (ANR)) Suction flow (l/min (ANR)) 80 80 80 80 ZY Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) Vacuum pressure (kPa) 70 70 70 70 ZF 60 60 60 60 Air consumption 50 50 50 50 ZP Air consumption 40 40 Vacuum pressure 40 40 Suction flow Suction flow SP 30 30 30 30 20 20 20 20 ZCUK 10 10

MG

to 300 st Over 300 st 25 st or less 25 st or less 32 40 50 63 42 M8 x 1.25 16 96 45 4 21 44 4.5 110 3 78 6 98 63 24 48 124 300 171 34 50 M8 x 1.25 16 104 46 4 22 44 4.5 118 3 86 6 106 72 24 48 124 200 300 84 122 172 36 66 M10 x 1.5 20 130 48 5 24 60 6 146 4 110 8 130 92 24 48 124 200 300 86 124 174 38 80 M10 x 1.5 20 130 50 5 24 70 6 158 4 124 8 142 110 28 52 128 200 300 88 124 174 MGPM (

SV

SY 600 300 50% Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) 70% 30% AS2201F -02-10 AS3201F -02-12 SYJ 400 200 SX 200 100 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 50% 30% 10% 70% 50% 70% 10% 0 0 800 400 MB 80 MB 63 300 600 Stroke (mm) AS5000-

7

AC Specification (Built-in Full-wave Rectifier Type) AC Specification (Built-in Full-wave Rectifier Type) Class B Class B Apparent power (VA) Note 1) 2) Temperature rise (C) Note 3) Apparent power (VA) Temperature rise (C) Model Model VXD23 to 25 VXD26, 27 VXD28, 29 VXD2A to 2C VXD2D, 2E VXD2F, 2G 7 60 9 60 9.5 70 10 70 12 14 70 70 Class H Class H Apparent power (VA) Note 1) 2) Temperature

MGP

83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB, E (mm) (mm) A DB E Bore size (mm) Bore size (mm) X XA XB XC XL YY YL Z 25st or less Over 175st Over

CLS

2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod Series CLS 125, 140, 160, 180, 200, 250 How to Order M9B CLS L 125 125 100 100 Without

VFS

Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Average speed (mm/s) System 20 25 32 40 40 50 63 80 100 125 140 160 VK 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ A VF 0 VFR 800 700 600 500 400 300 200 100

15

Selection Graph [Graph 2] Allowable load mass by stroke 10 [Graph 1] Allowable load mass by stroke 6 10 10 Load mass [kg] Load mass [kg] y, z + A 200 y, z + A 300 y, z + A 100 1 1 0 100 200 300 400 500 600 0 100 200 300 400 Stroke [mm] Stroke [mm] [Graph 4] Allowable load mass by stroke 20 [Graph 3] Allowable load mass by stroke 15 100 10 y, z + A = 0 Load mass [kg] Load mass [kg] y, z

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Lead wire length) SV (Mounting hole) SZ SY SYJ SX (Pitch) (P , EA, EB port) M5 (n) (2) (1) stations (Pitch) (Pitch) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 (A, B port) L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 104.5 (3 position) 92 (3 position) (mm) 3 49 41 4 59.5 51.5 5 70 62 6 80.5 72.5

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 107 19 16 22 75 40 M8 x 1.25 depth 16 37 160 34.5 50 140 8.6 14 depth 10 M10 x 1.5 depth 18 142 25 19 22 110 45 M10 x 1.5 depth 20 42 194 37 80 170 10.5 17 depth 12 M12 x 1.75 depth 21 Bore size (mm) P Note 2) I J K L M N O Q R S T U V W X Y Z WH 20 25 32 40 50 60 80 86 80 25 44 38 25 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 30 52 70 95 46 32 M6 x 1 M5 x 0.8 21

Slider Type/Ball Bushing Bearing

(N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm increments

Thermo-chiller/Rack Mount Type

300 200 200 5C 5C 100 100 Ambient temperature Ambient temperature Ambient temperature Ambient temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature

VZS

(External pilot port) Not machined K plug connector: VZS2150-KZ-01 L plug connector: VZS2150-L(Z)-01 (Lead wire length) With light/ surge voltage suppressor 300 (Lead wire length) 300 Other dimensions are the same as the grommet type.

Compact Manifold Regulator Series ARM5

Handle Position Symbol Position Handle position Handle position Handle position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max. 28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 6 51.5 80 51.5 13 OUT IN 3 28 13 OUT IN 13 OUT IN 3 3 2. OUT Piping Position 3.

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -