XL

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

MXQ

210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 + 0.5 S Option Specifications Stroke Adjustment Range of

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

JXCx-OMU0004

2] 2] [mm/s] [mm/s [mm/s] [mm/s 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800 17500 15 1000 20 2000 20 62 No.JXC-OMU0004-A 11. 11.1 [5m ]

Electric Actuator with Integrated Guide

Positioning distance (mm) 600 300 100 10 1 10 60.5 30.5 10.5 1.5 0.5 100 6.5 3.5 1.5 0.6 0.5 Speed (mm/s) 250 2.9 1.7 0.9 0.6 0.5 500 1.8 1.2 0.8 0.6 0.5 Values will vary slightly depending on the operating conditions.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

JB140-22-250 27 Series MGZ/MGZR Specific Product Precautions 2 Be sure to read before handing.

Guide Cylinder/Compact Type Series MGC

MGQ MGG MGC MGF MGZ Guide Cylinder/Compact Type Series MGC MGT Bore size (mm) Standard stroke (mm) 75 100 125 150 250 300 P.392 200 Compact type of Series MGG 20 25 32 40 50 Long stroke (mm) Long stroke (mm) Bore size (mm) 250 300 350 400 500 600 700 800 900 1000 450 20 D25 32 -X 40 50 Individual -X 391 Guide Cylinder/Compact Type 20, 25, 32, 40, 50 Series MGC How to Order MGC 100 L R M9BW

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type Serial Transmission System Type

Refrigerated Air Dryers Series IDF/IDU

Note Note 1) Value when cooling water inlet temperature is 32C and with rated load Note 2) Calculated at 1 RT = 3,300 kcal/h IDF-S0302 230 VAC IDU3E to 37E-23 IDU55E, 75E-23 IDF-S0198 (mm) Dimensions A B C D E Model IDF120D IDF150D 180 250 160 90 225 IDF190D IDF240D 180 250 160 48 273 IDF120D to 240D B Cooling water outlet A Condensation pressure gauge Cooling water inlet E D C Drain plug

EX120/121/122

1.4 kV 1.0 kV 25 to 90C Connector Ambient temperature 5 to 80C Operating Cable 40 to 80C Fixed Protection class IP67 (Only with screw tightened) 200 Allowable repeated insertion/withdrawal Cable retaining force 150 N/15 sec. 250 N/15 sec.

energy saving effect

Page 179 165 A Thermo-chiller Air-cooled 200 V Type Inverter Type (UL Standards) RoHS HRSH Series How to Order A 20 HRSH 250 Cooling capacity Option 100 10.5 kW 150 15.7 kW 200 20.5 kW 250 25 kW 300 28 kW Nil None A With caster adjuster-foot B With earth leakage breaker B1 With earth leakage breaker with handle K Note 1) With fluid fill port S Note 2) Conforming to CE/UL standards Cooling

LEC-OM07605CN

EMC (2) EMC EMC MCCB MC 1 4 L1 (1) 2 5 (1) L2 3 6 L3 E L11 L21 ( (RSPD-250-U4) () (2) (2) (RSPD-250-U4) (OKAYA) 1 2 3 1. AC200V240VL1L3L2 2. 11 29 11.

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

SZ3000

229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 310.5 300 281.5 14.5 1-3-37 38 Series SZ3000 Made to Order Specifications: Please contact SMC for detailed specifications, delivery and pricing.

SZ3000

229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 12 273 262.5 239.5 17 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 27 Please copy this page for use without removing it.

1.1

A B C D E HRG-BP001 1/2 168 160 120 84 109 40 2 HRG-BP005 1/2 182 145 120 93 109 40 2 HRG-BP010 3/4 206 170 150 114 138 49 2.6 HRG-BP015 3/4 236 170 150 122 138 49 3.2 Note) The connection thread of the nipple comes with PTFE seal tape. 31 Series HRG Dimensions [Separate power transformer] Specifications Type Outlet voltage Volume Transformer part no.

SZ3000

229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 310.5 300 281.5 14.5 1-3-37 Series SZ3000 Made to Order Specifications: Please contact SMC for detailed specifications, delivery and pricing.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 33 3 Station table entries In the case of a standard type manifold, solenoid