C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

17

Standard Strokes Bore size (mm) Standard stroke (mm) 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 12, 16 20, 25 32 to 100 Manufacture of Intermediate Strokes Spacer installation Spacers are installed in the standard stroke cylinder. 12 to 32: Available by the 1

CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

4/5 Port Solenoid Valve

suppressor AC ( Hz) 50 60 1 100 VAC 2 200 VAC With light/surge voltage suppressor YOZ is not available.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

(1 1/2") 200 (2") 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200 (2") Mounting Height (NCDM) (in) D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7F D-B5 D-B6 D-B59W D-H7C D-G59 D-K59 C-C73C D-C80C Auto switch model HS 0.96 1.02 1.12 1.22 1.34 1.59 HS 0.87 0.93 0.98 1.08 1.20 1.46 HS 0.98 1.04 1.14 1.24 1.36 1.61 Bore 075 (3/4") 088 (7/8") 106 (1 1/16") 125 (1 1/4") 150 (1 1/2") 200

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) 400 400 Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa

Gun Type Ionizer

100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 5) Supply pressure: 0.4 MPa Flow rate consumption: 316 L/min (ANR) 6) Supply pressure: 0.5 MPa Flow rate consumption: 390 L/min (ANR) 200 200 2 s 150 150 1.5 s 100 100 50 50 0.5 s 1 s 1.5 s 0.5 s 1 s 50 50 100 100 150 150 200 200 1500 0 150 300 450

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

MXQ

30 MXQ20-30 MXQ20-125 MXQ20-125 MXQ20-125 0.04 0.04 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-20 MXQ20-100 MXQ20-100 MXQ20-100 MXQ20-10 MXQ20-10 MXQ20-10 0.04 MXQ20-10 MXQ20-10 MXQ20-10 0.02 0.02 0 0 400 500 600 100 200 300 0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25

IDG

IDG50HV IDG60HV IDG75HV IDG100HV 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LV IDG50LV IDG60LV IDG75LV IDG100LV 75 110 170 240 300 IDG60SV IDG75SV IDG100SV 50 100 150 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard

7.5

Switch (When equipped with switch) 2 n L L: Dimensions n: Stations 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 L1 L2 L3 L4 210.5 223 235.5 235.5 248 248 260.5 198 210.5 160.5 173 173 185.5 198 148 160.5 200 212.5 225 225 237.5 237.5 250 187.5 200 162.5 175 187.5 137.5 150 150 162.5 186.2 193.7 201.2 208.7 216.2 223.7 231.2 148.7 156.2 163.7 171.2 178.7 126.2 133.7 141.2 118.7 14.5 17 13.5 16 12

0.4

150 162.5 175 187.5 200 212.5 225 237.5 250 262.5 275 287.5 300 300 312.5 325 337.5 350 362.5 375 123 135.5 148 160.5 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 310.5 323 335.5 348 360.5 373 385.5 14 Series SQ1000 Kit (PC Wiring System Compatible Flat Ribbon Cable Kit) J Manifold Specifications Compatible with PC wiring system.

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 Protection Circuit Item Unit Standard value Influence HRSH 090 Corrosion Scale generation Caution pH (at 25C) 6.5 to 8.2 v v Electric conductivity (25C) [S/cm] 100* to 800* v v Chloride ion (Cl) [mg/L] 200 or less v Sulfuric acid ion (SO42) [mg/L] 200 or less v HRSH If operating in the below conditions, the protection circuit will activate and an operation

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Servo motor Graph of overload protection characteristics LE-T5 T6 Characteristics a T7 T8 T9 Characteristics b The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 350 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%

REA/REB

, 200, 300 500 10 150, 200, 300, 400, 500 750 15 1 axis 200, 300, 400, 500, 600 1000 20 200, 300, 400, 500, 600, 800 25 1200 25 2 axes 200, 300, 400, 500, 600, 800, 1000 1500 32 Note 1) Strokes exceeding the standard strokes are available as a special order.

Step Motor Driver （ Pulse input type ）

ORIG SW Dir 0 0 Undefined parameter21 0 0 105 - LEPS Step data default Model LEPS6 LEPS10 Lead [mm] 4 8 5 10 No. 0 0 Movement MOD ABS ABS Speed 150 300* 200 350* Position 0.00 0.00 Acceleration 3000 3000 Step data default Deceleration 3000 3000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 10 20 10 20 Moving force 150 150 Area1 0.00 0.00 Area2 0.00 0.00 In position

Thermo-con

capacity (W) Ambient temperature: 68F (20C) Ambient temperature: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity

Compressed Air Cleaning Filter Series

(6B) C 300(12B) 760 D 795 150 E 300 270 F 520 1033 G 1318 3 H 3 887 J 620 AMD801/811 AMD91 972 AMD800/810/90/100 ORIENTATION IN OUT 3 x H holes IN OUT Label Drain (mm) Model 500 A 300 B 200(8B) C 300 D 1300 E 1430 F 1520 G 20 H Connection (Flange) 50(2B), 80(3B)JIS 10K FF flange 50(2B), 80(3B), 100(4B)JIS 10K FF flange 100(4B), 150(6B)JIS 10K FF flange 870 M20 x l500 AMD100 720 M16 x l400