CLS

50 63 14 14 14 17 17 20 50 50 56 63 63 71 47 47 53 60 60 67 1/4 1/4 1/4 3/8 3/8 1/2 17 17 20 23 25 30 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 110 136 115 25 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 65 Up to 1000 3 5 30 46 +0.084 0 +0.100 0 0.1 0.3 161 78 18 110 146 128 28 16 114 64 110 M14 x 1.5 75 Up to

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Double acting, Single rod 25, 50, 75, 100, 125, 150 1/8 25, 50, 75, 100, 125, 150, 200 1/4 25, 50, 75, 100, 125, 150, 200, 250, 300 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 2 Bore size Suction flow rate L/min (ANR) 20/25/32/40 1.5 MPa 1.0 MPa 0.05 MPa Without auto switch: 10C to 70C With auto switch: 10C to 60C (No freezing

Brake mechanism added

55 75 80 90 75 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 35 (n 2) (n = 2, 4, 6, 8, ) Note 1) 20 + 35 (n 2) (n = 2, 3, 4, ) (Different surfaces) D-A44C n 75 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 80 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) Note 1) 55 + 50 (n 2) (n = 2, 3, 4, ) (Same surface) 1 10 75 80 90 2 (Different

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Same side 75 90 120 (n 4) 2 120 + 50 (n 2) 2 90 + 50 (n 4) 2 20 + 50 Different sides D-B59W n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6 120 + 5 (n 2) 75 + 50 (n 2) Same side n = 2, 4, 6, 8 120 90 1 pc. 15 35 80 90 Different sides 75 100 Same side 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) D-A3 D-G39 D-K39 Different

39

6Hexagon socket head cap screw wStopper bolt @1Seal washer rBumper @2Bumper stopper 50 CKZ3N-S050W Note 1) 63 CKZ3N-S063W Note 1) Table 1 50 CKZ3N-B050 Note 2) Opening angle Code J H G F E D C B A Stopper bolt kits 15 30 45 60 75 90 105 120 135 63 CKZ3N-B063 Note 2) tRubber cover !7Spacer !8Short head cap screw 50 CKZ2N-T050 63 CKZ2N-T063 Top cover kits 50 yMetal cover !

SMC Pneumatic Clean Series

, 75, 100, 125, 150 Relief type Vacuum suction type 1/8 25, 50, 75,100, 125, 150, 200 1/4 Not available 25, 50, 75, 100, 125, 150, 200, 250, 300 Non-lube Double acting, single rod Available Available 25, 50, 75, 100, 125, 150 1/8 25,50,75,100,125,150,200 1/4 25,50,75,100,125,150,200,250,300 Specifications Suction flow rate of vacuum suction type (Reference values) Bore size (mm) Item 20/25

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Table of Contents

65 60 Inrush Frequency (Hz) 50 45 55 50 65 60 50 60 50 60 50 60 50 60 50 60 50 60 9 7 19 16 30 25 11 8 20 18 32 27 VX21 VX21 VX22 VX22 VX23 VX23 Note) The values are for an ambient temperature of 20C and at the rated voltage.

MQQ

, 20 (mm) 25, 28 Bore size (mm) Stroke range (mm) A L 4-FD 2-FD 75 8 10 10 to 40 88.5 10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

ISO Standard Hydraulic Cylinder

25 to 800 75 52.3 60 M12 x 1.25 M20 x 1.5 74 20 57 33 1/2 29 11 32 18 28 30 25 42 9 24 42 53 28 63 25 to 800 90 64.3 60 M12 x 1.25 M27 x 2 80 20 55 33 29 1/2 32 13 36 17 30 32 50 13 39 30 36 68 80 25 to 800 115 82.7 80 M16 x 1.5 M33 x 2 93 28 66 40 34 3/4 39 45 20 17 40 41 60 46 9 45 41 76 100 25 to 1000 130 96.9 100 M16 x 1.5 M42 x 2 101 36 67 40 3/4 50 20 19 54 56 50 52 72 47 10 50 91

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

CV/MVGQ

RHC 1 10 90 100 110 20 90 100 110 75 90 100 110 Different sides MK(2) 2 Same side (n 2) 2 20 + 50 n = 2, 4, 6, 8 (n 4) 2 (n 4) 2 90 + 50 (n 4) 2 n = 4, 8, 12, 16 100 + 50 n = 4, 8, 12, 16 110 + 50 n = 4, 8, 12, 16 Different sides RS Q G D-B59W n 75 + 50 (n 2) n = 2, 3, 4 90 + 50 (n 2) n = 2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side RS H A 15 90

C85

201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 109 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 25 37.5 50 75 100 51 64 76 89 114 139 20 12.5 25 37.5 50 75 100 125 52 65 77

C85

201 to 300 301 to 400 401 to 500 Bore 20 M8 x 1.25 71 20 8 36 20 6 84 96 109 134 159 25 M10 x 1.25 74 22 10 36 20 8 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 12.5 25 37.5 50 75 100 51 64 76 89 114 139 20 12.5 25 37.5 50 75 100 125 52 65 77

NCM

75 50 50 25 25 1.0 0.7 0.5 0.4 0.3 0.2 1.0 0.7 0.5 0.4 0.3 0.2 Load factor (n) Load factor (n) P = 75 PSI (Example) (Example) P = 75 PSI W W = 90 lbs P = 75 PSI Fig. (2) Fig. (1) W = 100 lbs Fig. (3) W Example 1: If the minimum force of 85 lbf is necessary to keep the workpiece pressed as shown in Fig. (1), because this is the extending side, use Graph (1) to determine the load factor of

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

IDU/IDF

Grommet with waist Power cord outlet Grommet with waist 6 to 12 B A B C C A A 240 240 65 65 30 30 30 30 C 70 70 40 40 50 50 50 50 A 240 240 30 30 50 50 50 50 B 38 38 32 32 45 45 45 45 Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C B 38 38 50 50 45 45 45 45 C 70 70 49 49 50 50 50 50 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C Transformer box (1795) Power cord

Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

Cylinder with Lock

90 100 110 Different surfaces Same surface 20 75 90 100 110 2 Different surfaces 100 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) 110 + 50 (n 4) 2 (n = 4, 8, 12, 16, ) (n = 2, 4, 6, 8, ) 20 + 50 (n 2) 2 90 + 50 (n 4) 2 D-B59W (n = 4, 8, 12, 16, ) n 75 + 50 (n 2) (n = 2, 3, 4, ) 90 + 50 (n 2) (n = 2, 4, 6, 8, ) 100 + 50 (n 2) (n = 2, 4, 6, 8, ) 110 + 50 (n 2) (n = 2, 4, 6, 8, ) Same surface